Spectrometer including tunable on-chip laser and spectrum measurement method

Patent metadata

Field	Value
Publication number	US-12350013-B2
Application number	US-202017021157-A
Country	US
Kind code	B2
Filing date	Sep 15, 2020
Priority date	Oct 25, 2019
Publication date	Jul 8, 2025
Grant date	Jul 8, 2025

Abstract

A spectrometer may include: a tunable on-chip laser source configured to irradiate a biological tissue with laser radiation; a photodetector configured to receive the laser radiation reflected from the biological tissue; and at least one processor. The tunable on-chip laser source may include: a semiconductor gain chip having a gain bandwidth for operating the tunable on-chip laser source in a predetermined wavelength range; and a plurality of resonator cavities connected between the semiconductor gain chip and the at least one processor, and configured to perform a coarse high-speed measurement and a fine measurement to measure a spectrum of the laser radiation reflected from the biological tissue.

First claim

What is claimed is:

1. A spectrometer comprising:
a tunable on-chip laser source configured to irradiate a biological tissue with laser radiation;
a photodetector configured to receive the laser radiation reflected from the biological tissue; and
at least one processor;
wherein the tunable on-chip laser source comprises:
a semiconductor gain chip having a gain bandwidth for operating the tunable on-chip laser source in a predetermined wavelength range;
a plurality of resonator cavities connected between the semiconductor gain chip and the at least one processor, and comprising a first resonator cavity configured to radiate a light of a first wavelength band and a second resonator cavity configured to radiate a light of a second wavelength band;

wherein the first resonator cavity comprises:
a first tunable filter that comprises at least two cascaded micro-resonator cavities; and
a first mirror that provides a feedback loop between the first resonator cavity and the semiconductor gain chip, and

wherein the second resonator cavity comprises:
a second tunable filter that comprises at least two cascaded micro-resonator cavities; and
a second mirror that provides a feedback loop between the second resonator cavity and the semiconductor gain chip,

wherein the at least one processor is further configured to control the photodetector to;
measure, during a first measurement step, a spectrum of the laser radiation reflected from the biological tissue at a first wavelength interval within a first wavelength range while the biological tissue is irradiated by the laser radiation generated by the first tunable filter,
select a second wavelength range that is narrower than the first wavelength range and includes only a greatest peak intensity point from a plurality of peak intensity points of a spectrum within the first wavelength range, and
during a second measurement step subsequent to the first measurement step, measure the spectrum of the laser radiation reflected from the biological tissue at a second wavelength interval within the second wavelength range, while the biological tissue is irradiated by the laser radiation generated by the second tunable filter, and

wherein the second wavelength interval is narrower than the first wavelength interval.

2. The spectrometer according to claim 1 , wherein the tunable on-chip laser source further comprises a waveguide that connects the semiconductor gain chip to each of the plurality of resonator cavities.

3. The spectrometer according to claim 1 , comprising
a plurality of metal heating elements located in the plurality of resonator cavities and configured to receive voltage from an external source, and
a thermo-optic control circuit configured to tune a wavelength of the plurality of resonator cavities by applying the voltage to the plurality of metal heating elements.

4. The spectrometer according to claim 1 , further comprising
a plurality of electro-optic control circuits configured to tune a wavelength of the plurality of resonator cavities by applying an electric field to the plurality of resonator cavities to change an effective refractive index of the plurality of resonator cavities and a transmission spectrum of the laser radiation emitted from the spectrometer.

5. The spectrometer according to claim 1 , further comprising
a plurality of acousto-optic control circuits, configured to tune a wavelength of the plurality of resonator cavities, by exposing the plurality of resonator cavities to ultrasonic vibrations from an external source.

6. The spectrometer according to claim 1 , wherein the semiconductor gain chip having the gain bandwidth for operating the tunable on-chip laser source in the predetermined wavelength range is a first semiconductor gain chip having a first gain bandwidth for operating the tunable on-chip laser source in the predetermined wavelength range,
wherein the spectrometer comprises an array of semiconductor gain chips having different gain bandwidths to provide sweeping along a wavelength in an extended wavelength range that is wider than the predetermined wavelength range, and
wherein the array of semiconductor gain chips having the different gain bandwidths comprises the first semiconductor gain chip having the first gain bandwidth.

7. The spectrometer according to claim 1 , further comprising a splitter configured to split a waveguide that extends from the semiconductor gain chip into a plurality of waveguides that are connected to the plurality of resonator cavities.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Lantsov Alexey Dmitrievich
• SHCHEKIN Alexey Andreevich
• Koptyaev Sergey Nikolaevich
• ANIKANOV Alexey Grigorievich
• RYABKO Maksim Vladimirovich
• IVSHIN Pavel Alexandrovich
• GRIGORIEV Vasiliy Viktorovich
• KOPYSOVA Tatyana Igorevna

Classifications

• G01J2003/106

  the two sources being alternating or selectable, e.g. in two ranges or line:continuum · CPC title

• A61B5/1455

  using optical sensors, e.g. spectral photometrical oximeters · CPC title

• G01N21/39

  using tunable lasers · CPC title

• G01J2003/423

  Spectral arrangements using lasers, e.g. tunable · CPC title

• G01J3/42

  Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry (beam switching arrangements G01J3/08) · CPC title