Radiation detection apparatus, radiation imaging system, and manufacturing method of radiation detection apparatus

Patent metadata

Field	Value
Publication number	US-12345840-B2
Application number	US-202318172541-A
Country	US
Kind code	B2
Filing date	Feb 22, 2023
Priority date	Feb 25, 2022
Publication date	Jul 1, 2025
Grant date	Jul 1, 2025

Abstract

A radiation detection apparatus includes a sensor array in which a plurality of pixels having photoelectric conversion elements is arranged on a substrate, a phosphor layer made of a plurality of columnar crystals provided on the sensor array, a phosphor protective layer provided on the phosphor layer to protect the phosphor layer, and a reflection layer provided on the phosphor protective layer to reflect light from the phosphor layer. The phosphor protective layer is a cross-linked body made of a metallic alkoxide and oxygen cross-linking at least some of metallic atoms included in the metallic alkoxide, and the reflection layer is made of a resin and a metallic compound dispersed in the resin.

First claim

What is claimed is:

1. A radiation detection apparatus comprising:
a sensor array in which a plurality of pixels having photoelectric conversion elements is arranged on a substrate;
a phosphor layer made of a plurality of columnar crystals provided on the sensor array;
a phosphor protective layer provided on the phosphor layer to protect the phosphor layer; and
a reflection layer provided on the phosphor protective layer to reflect light from the phosphor layer,
wherein the phosphor protective layer is a cross-linked body made of a metallic alkoxide and oxygen cross-linking at least some of metallic atoms included in the metallic alkoxide, and
wherein the reflection layer, made of a resin dispersed with a metallic compound, intrudes into interstices between columnar crystals within a range of 1 to 50 μm, from distal ends of the columnar crystals toward the sensor array.

2. The radiation detection apparatus according to claim 1 , wherein the metallic alkoxide is a compound represented by the following formula:
M 1(OR) n,

where M1 is selected from the group consisting of Si, Al, Ti, and Zr, R is at least one selected from the group consisting of a methyl group, an ethyl group, a propyl group, an isopropyl group, and a butyl group, n is 4 in a case where M1 is Si, Ti, or Zr, and n is 3 in a case where M1 is Al.

3. The radiation detection apparatus according to claim 1 ,
wherein the reflection layer has a metallic layer, and
wherein the resin and the metallic compound are provided between the metallic layer and the phosphor layer.

4. The radiation detection apparatus according to claim 1 , wherein the resin is a hot-melt resin.

5. The radiation detection apparatus according to claim 1 , wherein the metallic compound is a rutile-type titanium dioxide.

6. The radiation detection apparatus according to claim 1 , wherein the plurality of columnar crystals is made of cesium iodide.

7. The radiation detection apparatus according to claim 1 , wherein the plurality of columnar crystals includes thallium iodide as an activator.

8. The radiation detection apparatus according to claim 1 , wherein the phosphor layer has a film density in a range of 70 to 85%.

9. A radiation imaging system comprising:
the radiation detection apparatus according to claim 1 ; and
an image processing unit configured to process radiation detected by the radiation detection apparatus as a radiation image.

10. A manufacturing method of a radiation detection apparatus, comprising:
forming a phosphor layer made of a plurality of columnar crystals on a sensor array in which a plurality of pixels having photoelectric conversion elements is arranged on a substrate;
forming a phosphor protective layer on the phosphor layer to protect the phosphor layer; and
forming a reflection layer on the phosphor protective layer to reflect light from the phosphor layer,
wherein the forming of the phosphor protective layer includes forming the phosphor protective layer as a cross-linked body made of a metallic alkoxide and oxygen cross-linking at least some of metallic atoms included in the metallic alkoxide, and
wherein the forming of the reflection layer includes introducing a resin, dispersed with a metallic compound, into interstices between columnar crystals through thermocompression bonding.

Assignees

• Canon Kk

Inventors

• Ishida Yohei
• Saruta Shoshiro

Classifications

• G01T1/20189

  Damping or insulation against damage, e.g. caused by heat or pressure · CPC title

• G01T1/2002

  Optical details, e.g. reflecting or diffusing layers · CPC title

• G01T1/2023 Primary

  Selection of materials · CPC title

• G01T1/202 Primary

  the detector being a crystal · CPC title