High-throughput, precise semiconductor slurry blending tool

Patent metadata

Field	Value
Publication number	US-12343841-B2
Application number	US-202318446816-A
Country	US
Kind code	B2
Filing date	Aug 9, 2023
Priority date	Jun 15, 2020
Publication date	Jul 1, 2025
Grant date	Jul 1, 2025

Abstract

A slurry blending tool may include a blending tank to receive and blend one or more materials into a slurry, and at least one inlet pipe connected to the blending tank and to provide the one or more materials to the blending tank. The at least one inlet pipe may vertically enter the blending tank and may not contact the blending tank. The slurry blending tool may include a blending pump partially provided within the blending tank and to blend the one or more materials into the slurry. The slurry blending tool may include an outlet pipe connected to the blending pump and to remove the slurry from the blending tank.

First claim

What is claimed is:

1. A method of making a slurry, comprising:
receiving one or more materials in a blending tank via at least one inlet pipe connected to the blending tank, wherein the at least one inlet pipe vertically enters the blending tank and does not contact the blending tank;
blending the one or more materials in the blending tank into the slurry with a blending pump that is partially provided within the blending tank,
wherein the blending pump prevents blending of the one or more materials into the slurry until after the one or more materials are provided to the blending tank; and

removing the slurry from the blending tank with a single outlet pipe physically connected to the blending pump.

2. The method of claim 1 , wherein the blending tank is supported by a support base with reinforced feet.

3. The method of claim 1 , further comprising:
measuring a level of the slurry or the one or more materials in the blending tank with one or more tank level sensors connected to a tank level sensor bracket.

4. The method of claim 3 , wherein the tank level sensor bracket and the one or more tank level sensors are provided adjacent to an exterior sidewall of the blending tank and do not contact the exterior sidewall of the blending tank.

5. The method of claim 1 , wherein the single outlet pipe comprising plastic having lattices rearranged to release stress from the single outlet pipe.

6. The method of claim 1 , further comprising:
providing the slurry to a semiconductor chemical-mechanical polishing tool.

7. The method of claim 1 , further comprising:
measuring a weight of the slurry or the one or more materials in the blending tank with a scale.

8. The method of claim 7 , wherein the scale is in a support base for the blending tank.

9. A method of making a slurry, comprising:
receiving, via a plurality of inlet pipes exterior to a blending tank and entering the blending tank without contacting the blending tank, one or more materials in the blending tank;
blending, via a blending pump, the one or more materials in the blending tank into the slurry; and
removing, via a single outlet pipe physically connected to the blending pump and another outlet pipe via a single point of connection, the slurry from the blending tank.

10. The method of claim 9 , wherein the blending tank comprises a plurality of openings corresponding to the plurality of inlet pipes.

11. The method of claim 9 , wherein the plurality of inlet pipes enter the blending tank at a first end of the blending tank, and wherein the blending pump is provided at a second end of blending tank that is opposite of the first end.

12. The method of claim 9 , wherein the plurality of inlet pipes enter the blending tank at a first end of the blending tank, and wherein the single outlet pipe is provided at a second end of blending tank that is opposite of the first end.

13. The method of claim 9 , wherein the blending pump and the single outlet pipe are provided at a same end of the blending tank.

14. The method of claim 9 , wherein the blending pump is provided within and outside of the blending tank.

15. The method of claim 9 , further comprising:
measuring a level of the slurry or the one or more materials in the blending tank with one or more tank level sensors connected to a tank level sensor bracket.

16. A method of making a slurry, comprising:
receiving, via one or more inlet pipes, one or more materials in a blending tank;
measuring, via a plurality of tank level sensors, a level of the one or more materials in the blending tank;
blending, via a blending pump, the one or more materials in the blending tank into the slurry; and
removing, via a plurality of outlet pipes connected via a single point of connection separate from the plurality of outlet pipes, the slurry from the blending tank.

17. The method of claim 16 , wherein the plurality of tank level sensors comprises a plurality of optical sensors.

18. The method of claim 16 , wherein the plurality of tank level sensors are located exterior to the blending tank and do not contact a wall of the blending tank.

19. The method of claim 16 , wherein the blending of the one or more materials begins after all of the one or more materials are received in the blending tank.

20. The method of claim 16 , further comprising:
measuring a weight of the slurry or the one or more materials in the blending tank with a scale.

Assignees

• Taiwan Semiconductor Mfg Co Ltd
• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chiu Chi-Wei
• Chen Yung-Long
• Chen Bo-Zhang
• Su Chong-Cheng
• Chen Yu-Chun
• Hsu Ching-Jung
• Lai Chi-Tung

Classifications

• H10P52/402

  of semiconductor materials · CPC title

• B01F23/56

  by introducing solids in liquids, e.g. dispersing or dissolving · CPC title

• B24B57/02

  for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents · CPC title

• B01F27/808

  with stirrers driven from the bottom of the receptacle · CPC title

• B01F23/53

  using driven stirrers · CPC title