Pressure sensor

Patent metadata

Field	Value
Publication number	US-12339190-B2
Application number	US-202117790988-A
Country	US
Kind code	B2
Filing date	Feb 15, 2021
Priority date	Feb 21, 2020
Publication date	Jun 24, 2025
Grant date	Jun 24, 2025

Abstract

[Problem] To provide a pressure sensor that has a plurality of detection parts in a lamination direction, and moreover has improved detection accuracy. [Solution] A pressure sensor 10 has a membrane 22 in which deformation corresponding to pressure occurs, a first gauge layer 40 which is formed on the membrane 22 , an intermediate insulation layer 50 which is formed on the first gauge layer 40 , and a second gauge layer 60 which is formed on the intermediate insulation layer 50 . The first gauge layer 40 and the second gauge layer 60 respectively include a first detection part 42 and a second detection part 62 which detect the deformation of the membrane. The distance from the surface of the membrane 22 to the second detection part 62 is no more than 30 μm.

First claim

The invention claimed is:

1. A pressure sensor comprising:
a membrane generating a deformation in response to pressure;
a first gauge layer formed on the membrane;
an intermediate insulating layer formed on the first gauge layer;
a second gauge layer formed on the intermediate insulating layer; and
an electrode layer that is in contact with an upper surface of the first gauge layer exposed from both the intermediate insulating layer and the second gauge layer, and in contact with an upper surface of the second gauge layer, and that connects the first gauge layer and the second gauge layer,
wherein the first gauge layer and the second gauge layer include a first | sensor and a second sensor detecting the deformation of the membrane, respectively, and
a distance from a surface of the membrane to the second sensor is within 30 μm.

2. The pressure sensor according to claim 1 , wherein each of the first gauge layer, the intermediate insulating layer, and the second gauge layer has a thickness of 10 μm or less.

3. The pressure sensor according to claim 1 , wherein
the membrane is conductive, and
a base insulating layer having a thickness of 10 μm or less is formed between the membrane and the first gauge layer.

4. The pressure sensor according to claim 1 , wherein
the electrode layer has a thickness of 10 μm or less.

5. The pressure sensor according to claim 1 , wherein a pattern arrangement of the first gauge layer and a pattern arrangement of the second gauge layer are substantially the same when viewed from a normal direction of the membrane.

6. The pressure sensor according to claim 1 , wherein a pattern arrangement of the first gauge layer and a pattern arrangement of the second gauge layer are displaced in a rotational direction when viewed from a normal direction of the membrane.

7. The pressure sensor according to claim 1 , further comprising a comparator circuit configured to compare and monitor a first detection signal detected by the first sensor and a second detection signal detected by the second sensor.

8. The pressure sensor according to claim 1 , further comprising a switch configured to switch and output a first detection signal detected by the first sensor and a second detection signal detected by the second sensor.

9. The pressure sensor according to claim 1 , wherein
another gauge layer is laminated on the second gauge layer via another intermediate insulating layer, and
a distance from a surface of the membrane to a sensor of another gauge layer is within 50 μm.

Assignees

• Tdk Corp

Inventors

• Kobayashi Masanori
• Unno Ken
• Sasahara Tetsuya
• Nawaoka Kohei

Classifications

• G01L9/0042

  Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms (details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively) · CPC title

• G01L9/0051 Primary

  using variations in ohmic resistance · CPC title

• G01L9/0055

  bonded on a diaphragm · CPC title

• G01L9/0001 Primary

  Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means (G01L9/0026, G01L9/0033, G01L9/0082, G01L9/0089, G01L9/0091 take precedence) · CPC title