Wafer-handling end effectors configured to selectively lift a wafer from an upper surface of the wafer, probe systems that include the wafer-handling end effectors, and methods of utilizing the wafer-handling end effectors

Patent metadata

Field	Value
Publication number	US-12337467-B2
Application number	US-202318506935-A
Country	US
Kind code	B2
Filing date	Nov 10, 2023
Priority date	Dec 9, 2022
Publication date	Jun 24, 2025
Grant date	Jun 24, 2025

Abstract

Wafer-handling end effectors, probe systems that include wafer-handling end effectors, and methods of utilizing wafer-handling end effectors are disclosed herein. The wafer-handling end effectors are configured to selectively lift a wafer from an upper surface thereof and include a blade, a surface extension, and an attachment mechanism. The blade defines a wafer-facing blade side and includes a gas distribution manifold in fluid communication with the wafer-facing blade side. The surface extension defines a wafer-facing extension side that extends away from the blade. The surface extension extends at least partially around the wafer-facing blade side and includes at least three projecting regions that project from the wafer-facing extension side and are configured to physically contact the upper surface of the wafer. The attachment mechanism is configured to permit selective attachment of the surface extension to the blade and selective separation of the surface extension from the blade.

First claim

The invention claimed is:

1. A wafer-handling end effector configured to selectively lift a wafer from an upper surface of the wafer via a pressure force, the end effector comprising:
a blade that defines a wafer-facing blade side, wherein the blade includes a gas distribution manifold in fluid communication with the wafer-facing blade side;
a surface extension that defines a wafer-facing extension side that extends away from the blade, wherein the surface extension extends at least partially around the wafer-facing blade side, and further wherein the surface extension includes at least three projecting regions that project from the wafer-facing extension side, wherein the at least three projecting regions are configured to physically contact the upper surface of the wafer when the end effector selectively lifts the wafer; and
an attachment mechanism configured to permit selective attachment of the surface extension to the blade and selective separation of the surface extension from the blade.

2. The end effector of claim 1 , wherein the end effector includes a plurality of surface extensions, and further wherein each surface extension of the plurality of surface extensions is configured to be individually and selectively attached to the blade and individually and selectively separated from the blade via the attachment mechanism.

3. The end effector of claim 1 , wherein the surface extension is a first surface extension, wherein the end effector includes a second surface extension, and further wherein the end effector is configured such that the attachment mechanism permits selective attachment and selective separation of only one of the first surface extension and the second surface extension to the blade at a given time.

4. The end effector of claim 1 , wherein at least one of:
(i) the first surface extension defines a first surface extension shape, and wherein the second surface extension defines a second surface extension shape that differs from the first surface extension shape; and
(ii) the first surface extension includes at least three first projecting regions, the second surface extension includes at least three second projecting regions, and a relative orientation of the at least three first projecting regions differs from a relative orientation of the at least three second projecting regions.

5. The end effector of claim 1 , wherein the blade includes an extension-receiving region, and further wherein the surface extension extends around the extension-receiving region.

6. The end effector of claim 5 , wherein the extension-receiving region is at least one of:
(i) an arcuate extension-receiving region;
(ii) an at least partially circular extension-receiving region;
(iii) an at least partially U-shaped extension-receiving region; and
(iv) a polygonal-shaped extension-receiving region.

7. The end effector of claim 1 , wherein the wafer-facing blade side is an at least substantially planar wafer-facing blade side.

8. The end effector of claim 1 , wherein the blade defines a wafer-opposed blade side and a blade edge that extends between the wafer-facing blade side and the wafer-opposed blade side, wherein the wafer-opposed blade side is an at least substantially planar wafer-opposed blade side, and further wherein the blade edge defines an extension-receiving region of the blade.

9. The end effector of claim 1 , wherein the blade is defined by a blade material, wherein the surface extension is defined by an extension material that differs from the blade material.

10. The end effector of claim 1 , wherein the gas distribution manifold includes a plurality of apertures defined within the wafer-facing blade side.

11. The end effector of claim 10 , wherein the wafer-facing blade side defines a wafer-facing blade side normal direction, wherein the plurality of apertures extends from a plurality of corresponding fluid conduits, wherein each fluid conduit of the plurality of corresponding fluid conduits defines a corresponding fluid flow axis, and further wherein the corresponding fluid flow axis of each fluid conduit is oriented at a corresponding flow angle relative to the wafer-facing blade side normal direction, and further wherein the corresponding flow angle is at least 30 degrees and at most 80 degrees.

12. The end effector of claim 11 , wherein the plurality of apertures is arranged in a plurality of concentric circles, and further wherein the corresponding flow angle of each fluid conduit of each aperture within a given concentric circle of the plurality of concentric circles extends along an at least partially conic surface.

13. The end effector of claim 1 , wherein the gas distribution manifold is configured such that the wafer-handling end effector selectively lifts the wafer via at least one of the Bernoulli effect and the cyclone effect.

14. The end effector of claim 1 , wherein the wafer-facing extension side extends at least substantially parallel to the wafer-facing blade side.

15. The end effector of claim 1 , wherein the at least three projecting regions are configured to physically contact the upper surface of the wafer within an edge exclusion zone of the wafer.

16. The end effector of claim 1 , wherein, when the end effector selectively lifts the wafer, the at least three projecting regions are configured to resist sliding motion relative to the wafer via a static friction force between the wafer and a projection end of each of the at least three projecting regions.

17. The end effector of claim 1 , wherein the attachment mechanism includes at least one of a clasp, a lever, a cam, a fastener, a keyed region, a projecting region, a recessed region, a friction fit, a resilient fit, an adhesive connection, a magnetic connection, a vacuum connection, and an electrostatic connection.

18. A method of utilizing the wafer-handling end effector of claim 1 , wherein the surface extension is a first surface extension, and further wherein the wafer-facing extension side is a first wafer-facing extension side, the method comprising:
separating, from the blade of the wafer-handling end effector, the first surface extension that defines the first wafer-facing extension side with a first wafer-facing extension surface area; and
attaching, to the blade of the wafer-handling end effector, a second surface extension that defines a second wafer-facing extension side with a second wafer-facing extension surface area that differs from the first wafer-facing extension surface area.

19. The method of claim 18 , wherein at least one of:
(i) the separating includes resiliently deforming the first surface extension; and
(ii) the attaching includes resiliently deforming the second surface extension.

20. The method of claim 19 , wherein, prior to the separating, the method includes utilizing the end effector to position a first wafer of a first diameter, and further wherein, subsequent to the attaching, the method further includes utilizing the end effector to position a second wafer of a second diameter, which differs from the first diameter.

21. A probe system configured to test a wafer that includes an integrated circuit device, the probe system comprising:
a chuck that defines a support surface configured to support the wafer;
a signal generation and analysis assembly configured to generate a test signal and to receive a resultant signal;
a probe assembly configured to at least one of:
(i) receive the test signal from the signal generation and analysis assembly and provide the test signal t

Assignees

• Formfactor Inc

Inventors

• Marx Benedikt
• Becker Axel

Classifications

• B25J11/0095 Primary

  Manipulators transporting wafers · CPC title

• B25J15/0616 Primary

  with vacuum · CPC title