Suction apparatus for an end effector, end effector for holding substrates and method of producing an end effector

Patent metadata

Field	Value
Publication number	US-10259124-B2
Application number	US-201815875713-A
Country	US
Kind code	B2
Filing date	Jan 19, 2018
Priority date	Jan 27, 2017
Publication date	Apr 16, 2019
Grant date	Apr 16, 2019

Abstract

A suction apparatus for an end effector has a main body, which has a through-channel and a contact surface, and a sealing lip. The contact surface has an edge and recesses, wherein the through-channel issues into the recesses and the recesses terminate in front of the edge. The main body has a base portion and a fastening portion, which adjoins the base portion. In the fastening portion connection channels are provided which are in fluid communication with the through-channel and extend from the edge of the fastening portion. An end effector and a method of producing an end effector are also shown.

First claim

The invention claimed is:

1. A suction apparatus for an end effector for holding substrates, comprising a main body which has a through-channel and a contact surface, and a sealing lip which surrounds the contact surface on an edge side, wherein the contact surface has an edge and at least one recess wherein the through-channel is connected with at least one recess,
wherein the main body has a conical or cylindrical base portion, of which the end side constitutes the contact surface,
wherein the main body has a fastening portion which adjoins the base portion on the end side of the base portion facing away from the contact surface,
wherein in the fastening portion at least one connection channel is provided which is in fluid communication with the through-channel and extends from the edge of the fastening portion, and
wherein starting from the through-channel the at least one recess becomes flatter and transitions into the contact surface.

2. The suction apparatus as claimed in claim 1 , wherein the at least one recess terminates in front of the edge of the contact surface.

3. The suction apparatus as claimed in claim 1 , wherein the sealing lip is fastened to the base portion and extends as far as the contact surface or beyond a plane defined by the contact surface.

4. The suction apparatus as claimed in claim 1 , wherein the base portion has, on its circumference, an annular groove in which the sealing lip is fastened.

5. The suction apparatus as claimed in claim 4 , wherein the annular groove extends obliquely with respect to a radial plane of the base portion.

6. An end effector for holding substrates, comprising a carrier which comprises a top layer and a bottom layer and at least one suction apparatus, which is fastened to the carrier, the at least one suction apparatus comprising a main body which has a through-channel and a contact surface, and a sealing lip which surrounds the contact surface on an edge side, wherein the contact surface has an edge and at least one recess wherein the through-channel is connected with at least one recess,
wherein the main body has a conical or cylindrical base portion, of which the end side constitutes the contact surface,
wherein the main body has a fastening portion which adjoins the base portion on the end side of the base portion facing away from the contact surface,
wherein in the fastening portion at least one connection channel is provided which is in fluid communication with the through-channel and extends from the edge of the fastening portion, and
wherein the fastening portion of the suction apparatus lies between the top layer and the bottom layer and is clamped between these layers.

7. The end effector as claimed in claim 6 , wherein the carrier has a fastening opening, through which the base portion of the main body extends, wherein the fastening opening has a smaller diameter than the fastening portion, and wherein the fastening portion has a larger diameter than the base portion.

8. The end effector as claimed in claim 7 , wherein the sealing lip is provided on the side of the fastening opening facing away from the fastening portion, wherein the suction apparatus is fixed in the fastening opening by means of the sealing lip and the fastening portion.

9. The end effector as claimed in claim 7 , wherein in the carrier at least one fluid channel is provided, wherein the at least one connection channel of the fastening portion is in fluid communication with the at least one fluid channel of the carrier.

10. The end effector as claimed in claim 6 , wherein the main body is fastened between the stop layer and the bottom layer.

11. A method of producing an end effector, comprising the steps of:
a) providing a first layer of the end effector which has a fastening opening,
b) inserting a fastening portion of a main body of a suction apparatus into the fastening opening from a first side of the first layer, and
c) fastening a second layer of the end effector to at least one of the first layer and the main body, and
d) forming a fluid channel between the first layer and the second layer defined by the first layer and the second layer wherein the fastening portion of the suction apparatus is clamped between the first layer and the second layer.

12. The method as claimed in claim 11 , wherein a sealing lip is fastened to the main body from a second side of the first layer opposite the first side.

Assignees

• Suss Microtec Lithography Gmbh

Inventors

• Bogner Bernhard

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• B25J19/007

  Means or methods for designing or fabricating manipulators · CPC title

• B25J15/0616

  with vacuum · CPC title

• B25J15/0683 Primary

  Details of suction cup structure, e.g. grooves or ridges · CPC title