Vacuum apparatus temperature sensor assembly

Patent metadata

Field	Value
Publication number	US-12320710-B2
Application number	US-202117999632-A
Country	US
Kind code	B2
Filing date	May 26, 2021
Priority date	May 26, 2020
Publication date	Jun 3, 2025
Grant date	Jun 3, 2025

Abstract

A vacuum apparatus temperature sensor assembly for measuring the temperature of a vacuum apparatus and a method are disclosed. The vacuum apparatus temperature sensor assembly comprises: a sheet substrate configured to conform to a shape of an item, equipment or apparatus whose temperature is to be determined; and a temperature sensor thermally coupled with the sheet substrate, wherein the sheet substrate is configured to provide a thermal path from the apparatus to the temperature sensor. In this way, the substrate provides a larger area than that of the temperature sensor to couple with the apparatus which enables the average temperature of the apparatus to be more reliably and accurately conveyed to the temperature sensor and make the temperature measurements less reliant on the exact placing of the temperature sensor with respect to the apparatus.

First claim

The invention claimed is:

1. A vacuum apparatus temperature sensor assembly, comprising:
a vacuum apparatus whose temperature is to be determined, said vacuum apparatus having heater elements;
a sheet substrate which is a planar sheet and which is pliable to conform to an external surface of said vacuum apparatus, wherein said sheet substrate has a width which is greater than a distance between said heater elements and wherein said sheet substrate has a length which provides for a plurality of turns around said vacuum apparatus; and
a temperature sensor thermally coupled with said sheet substrate, wherein the sheet substrate is configured to provide a thermal path from said vacuum apparatus to said temperature sensor and wherein said sheet substrate is interposed between said temperature sensor and said vacuum apparatus.

2. The vacuum apparatus temperature sensor assembly of claim 1 , further comprising an outer insulating layer overlying said sheet substrate and said temperature sensor to provide a greater thermal conductivity across said sheet substrate than between said plurality of turns.

3. The vacuum apparatus temperature sensor assembly of claim 1 , wherein said sheet substrate has a thermal conductivity selected to reduce a temperature variation across a surface of said sheet substrate compared to a temperature variation across a surface of said vacuum apparatus.

4. The vacuum apparatus temperature sensor assembly of claim 1 , wherein said sheet substrate has a thermal mass selected to be lower than a thermal mass of said vacuum apparatus.

5. The vacuum apparatus temperature sensor assembly of claim 1 , wherein said temperature sensor overlies said sheet substrate.

6. The vacuum apparatus temperature sensor assembly of claim 1 , wherein said sheet substrate has a thermal conductivity selected to be greater than a thermal conductivity of said vacuum apparatus.

7. A method, comprising:
conforming a sheet substrate, which is a planar sheet and which is pliable, to an external surface of a vacuum apparatus whose temperature is to be determined, said vacuum apparatus having heater elements, and said sheet substrate having a width which is greater than a distance between said heater elements and a length which provides for a plurality of turns around said vacuum apparatus; and
thermally coupling a temperature sensor with said sheet substrate to provide a thermal path from said vacuum apparatus to said temperature sensor by interposing said sheet substrate between said temperature sensor and said vacuum apparatus.

Assignees

• Edwards Vacuum Llc

Inventors

• Faulkner Budd Edward

Classifications

• G01K1/143 Primary

  for measuring surface temperatures · CPC title

• F16L53/70

  Cooling of pipes or pipe systems · CPC title

• F16L53/38

  using elongate electric heating elements, e.g. wires or ribbons · CPC title

• H01J37/16

  Vessels; Containers · CPC title

• G01K1/16 Primary

  Special arrangements for conducting heat from the object to the sensitive element · CPC title