Plating systems having reduced air entrainment

Patent metadata

Field	Value
Publication number	US-12312702-B2
Application number	US-202318348055-A
Country	US
Kind code	B2
Filing date	Jul 6, 2023
Priority date	Jul 10, 2017
Publication date	May 27, 2025
Grant date	May 27, 2025

Abstract

Electroplating processing systems according to the present technology may include a recirculating tank containing a first volume of processing fluid. The recirculating tank may be fluidly coupled with a delivery pump. The systems may include a vessel configured to receive the processing fluid from the pump. The vessel may include an inner chamber and an outer chamber, and the inner chamber may be sized to hold a second volume of processing fluid less than the first volume of processing fluid. A liquid level sensor may be associated with the vessel to provide a liquid level indication in the outer chamber. The systems may include a return line coupled with an outlet of the vessel and coupled with an inlet of the recirculating tank. The systems may also include a return pump fluidly coupled with the return line. The return pump may be electrically coupled with the liquid level sensor.

First claim

What is claimed is:

1. An electroplating processing system comprising:
a recirculating tank;
a vessel configured to receive a processing fluid from the recirculating tank, wherein the vessel comprises an inner chamber and an outer chamber;
a return line positioned between an outlet of the vessel and an inlet of the recirculating tank; and
a container fluidly coupled with the return line comprising a standpipe coupled with a base of the container, wherein the container is configured to receive processing fluid exiting the vessel through a top of the standpipe, and wherein the container comprises a media configured to extract entrained bubbles within the processing fluid,
wherein the container comprises a height sufficient to reduce an amount of air or bubbles in the processing fluid.

2. The electroplating processing system of claim 1 , wherein the media is configured to extract bubbles characterized by a diameter of 1 μm or greater.

3. The electroplating processing system of claim 1 , wherein the media is chemically compatible with at least one of methanesulfonic acid, potassium hydroxide, and boric acid.

4. The electroplating processing system of claim 1 , wherein the media comprises a polymeric material.

5. The electroplating processing system of claim 4 , wherein the polymeric material comprises a mesh disposed within the container.

6. The electroplating processing system of claim 5 , wherein the container is coupled with at least two vessels.

7. The electroplating processing system of claim 1 , wherein the height is a height such that an entry force or flow of processing fluid does not fully permeate the media before the media removes bubbles from the processing fluid.

8. An electroplating processing system comprising:
a recirculating tank;
a processing vessel configured to receive a processing fluid from the recirculating tank, wherein the processing vessel comprises an inner chamber and an outer chamber;
a return line positioned between an outlet of the processing vessel and an inlet of the recirculating tank; and
a buffer vessel fluidly coupled with the return line between the processing vessel and the recirculating tank, wherein the buffer vessel comprises a first exit port from the buffer vessel, wherein the buffer vessel comprises a standpipe coupled with a base of the buffer vessel, wherein the standpipe is characterized by a sloped surface of an interior edge at a top of the standpipe, wherein the standpipe is characterized by a port proximate the base of the buffer vessel, and wherein a second exit port from the buffer vessel is accessed through the standpipe.

9. The electroplating processing system of claim 8 , wherein the buffer vessel comprises a channel positioned within the buffer vessel and configured to deliver processing fluid down into the buffer vessel.

10. The electroplating processing system of claim 8 , wherein a media configured to extract entrained bubbles within the processing fluid is positioned within the standpipe or within the return line.

11. The electroplating processing system of claim 8 , wherein the system comprises a plurality of processing vessels configured to receive the processing fluid from the recirculating tank, and wherein the buffer vessel is configured to receive processing fluid from each of the processing vessels of the plurality of processing vessels.

12. The electroplating processing system of claim 11 , wherein the buffer vessel comprises a plurality of standpipes, and wherein each standpipe extends from the base of the buffer vessel to a height different from each other standpipe of the plurality of standpipes.

13. The electroplating processing system of claim 8 , wherein the standpipe is characterized by one or ports or a weir about a top of the standpipe.

14. The electroplating processing system of claim 8 , wherein the second exit port is fluidly connected to the return line.

Assignees

• Applied Materials Inc

Inventors

• Law Cameron
• Durado Daniel
• Oberlitner Thomas
• Plavidal Richard W

Classifications

• H10P72/0476

  comprising at least one plating chamber · CPC title

• H10P14/46 Primary

  using a liquid · CPC title

• H10W20/043

  for electroplating · CPC title

• C25D21/10

  Agitating of electrolytes; Moving of racks · CPC title

• C25D17/04

  External supporting frames or structures · CPC title