Solids vaporizer

Patent metadata

Field	Value
Publication number	US-12312685-B2
Application number	US-202418740411-A
Country	US
Kind code	B2
Filing date	Jun 11, 2024
Priority date	Feb 26, 2021
Publication date	May 27, 2025
Grant date	May 27, 2025

Abstract

Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers are such that any or all chambers filled with the vaporizable solid materials provide a void space to allow the solid materials to vaporize and for gas to move through the vaporizer vessels when heated, to allow effective vaporization of the solid materials and further allow the vapor resulting from the solid materials to move to an outlet of the vessels where it can be provided as part of a process.

First claim

The invention claimed is:

1. A method of filling a vaporizer vessel for vaporizable solid source material,
the vaporizer vessel including a vaporizer vessel body, the vaporizer vessel body comprising: an end including a fill port; and an inner surface defining an interior volume; and
at least one thermally conductive reagent support panel located within the interior volume and joined to the vaporizer vessel body at the inner surface, each of the at least one thermally conductive reagent support panel extending through the interior volume,
wherein each of the at least one thermally conductive reagent support panel is joined to the vaporizer vessel body by a thermally conductive joint,
the method comprising:
orienting the vaporizer vessel in a first, filling orientation such that each of the at least one thermally conductive reagent support panel extends in a vertical direction and the fill port is provided at a top of the vaporizer vessel;
adding at least vaporizable solid source material to the interior volume of the vaporizer vessel by way of the fill port such that the at least one vaporizable solid source material is present in each space defined by the at least one thermally conductive reagent support panel and the inner surface; and
orienting the vaporizer vessel in a second, use orientation such that each of the at least one thermally conductive reagent support panel extends in a horizontal direction and support a portion of the vaporizable solid source material.

2. The method of claim 1 , wherein the at least one vaporizable solid source material includes a tungsten precursor material or a molybdenum precursor material.

3. The method of claim 1 , wherein the at least one vaporizable solid source material is in a form of a powder when the at least one vaporizable solid source material is added to the interior volume of the vaporizer vessel.

4. A method of vaporizing a vaporizable solid source material, comprising:
filling a vaporizer vessel with the vaporizable solid source material in a first, vertical orientation;
orienting a vaporizer vessel in which the solid is contained in a second, horizontal orientation for use, the vaporizer vessel comprising:
a vaporizer vessel body including an inner surface defining an interior volume;
an inlet;
an outlet; and
at least one thermally conductive reagent support panel located within the interior volume and joined to the vaporizer vessel body at the inner surface, each of the at least one thermally conductive reagent support panel extending through the interior volume;

wherein the vaporizer vessel is oriented in the second orientation such that each of the at least one thermally conductive reagent support panel extends in a horizontal direction, and that at least part of the vaporizable solid source material is resting on one or more of the at least one of thermally conductive reagent support panel;
heating the vaporizer vessel body;
transferring heat from the vaporizer vessel body to the at least one thermally conductive reagent support panel by way of thermally conductive joints where the at least one thermally conductive reagent support panel is joined to the inner surface of the vaporizer vessel body; and
transferring heat from each of the at least one thermally conductive reagent support panel to the vaporizable solid source material that is in contact with said thermally conductive reagent support panel so as to vaporize the vaporizable solid source material.

5. The method of claim 4 , further comprising extracting a vapor comprising at least some of the vaporized solid source material from the vaporizer vessel by way of the outlet.

6. The method of claim 4 , wherein the at least one vaporizable solid source material comprises a tungsten precursor material or a molybdenum precursor material.

7. The method of claim 4 , wherein the at least one vaporizable solid source material is in a form of a powder when the vaporizer vessel is oriented in the second orientation.

8. A method of filling and using a vaporizer vessel, comprising:
filling the vaporizer vessel with vaporizable solid source material while the vaporizer vessel is in a first, vertical orientation with at least one thermally conductive reagent support panels oriented vertically; and
orienting the vaporizer vessel in a second, horizontal orientation such that a portion of the vaporizable solid source material rests on each of the at least one thermally conductive reagent support panels.

9. The method of claim 8 , further comprising heating the thermally conductive reagent support panels by heating an exterior of the vaporizer vessel and conducting heat through a wall of the vaporizer vessel, through a plurality of thermally conductive joints to the at least one thermally conductive reagent support panels.

Assignees

• Entegris Inc

Inventors

• Cardozo Benjamin
• Thomas Jacob

Classifications

• C23C16/45553

  characterized by the use of precursors specially adapted for ALD · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/45544

  characterized by the apparatus · CPC title

• C23C16/448 Primary

  characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials · CPC title

• C23C16/4481 Primary

  by evaporation using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title