Solids vaporizer

Patent metadata

Field	Value
Publication number	US-12037684-B2
Application number	US-202217681186-A
Country	US
Kind code	B2
Filing date	Feb 25, 2022
Priority date	Feb 26, 2021
Publication date	Jul 16, 2024
Grant date	Jul 16, 2024

Abstract

Vaporizer vessels include one or more reagent support panels, serving as dividers of interior space of the vessel, in a vertical orientation such as when filling the vaporizer vessels, and when rotated into a horizontal orientation, the panels support the vaporizable solid materials placed in one or more chambers formed by the panels and interior walls of the vessels and enable transfer of heat to those solid materials. The chambers are such that any or all chambers filled with the vaporizable solid materials provide a void space to allow the solid materials to vaporize and for gas to move through the vaporizer vessels when heated, to allow effective vaporization of the solid materials and further allow the vapor resulting from the solid materials to move to an outlet of the vessels where it can be provided as part of a process.

First claim

The invention claimed is:

1. A vaporizer vessel for vaporizable solid source material, comprising:
a vaporizer vessel body including an inner surface defining an interior volume;
an inlet configured for introducing carrier gas to the interior volume of the vaporizer vessel for flow of the carrier gas through the interior volume in contact with the vaporizable solid source material to form a carrier gas/solid source vapor mixture; and
an outlet configured to allow discharge of the carrier gas; solid source vapor mixture from the vaporizer vessel; and
at least one thermally conductive reagent support panel located within the interior volume and joined to the vaporizer vessel body at the inner surface by a thermally conductive joint, each of the at least one thermally conductive reagent support panel extending in a first, vertical direction when the vaporizer vessel body is oriented in a filling orientation and the at least one thermally conductive reagent support panel extending horizontally to support a portion of the vaporizable solid source material when in a second, use orientation,
wherein each of the at least one thermally conductive reagent support panel is joined to the inner surface of the vaporizer vessel body by a plurality of the thermally conductive joints, wherein between the plurality of thermally conductive joints, a gap is present between the thermally conductive reagent support panel and the inner surface of the vaporizer vessel body, and wherein the at least one thermally conductive reagent support panel is formed of sheet metal.

2. The vaporizer vessel of claim 1 , wherein the vaporizer vessel includes a plurality of the thermally conductive reagent support panels.

3. The vaporizer vessel of claim 2 , wherein each of the plurality of the thermally conductive reagent support panels are each parallel to one another.

4. The vaporizer vessel of claim 2 , wherein each of the plurality of the thermally conductive reagent support panel extends from the inner surface of the vaporizer vessel body to a center line of the interior volume.

5. The vaporizer vessel of claim 4 , wherein the plurality of thermally conductive reagent support panels is evenly radially distributed around the center line of the interior volume.

6. The vaporizer vessel of claim 1 , wherein the vaporizer vessel comprises four thermally conductive reagent support panels.

7. The vaporizer vessel of claim 1 , wherein an angle between any of the thermally conductive reagent support panels and any adjacent thermally conductive reagent support panel is 90°.

8. The vaporizer vessel of claim 1 , wherein the thermally conductive joint extends an entire length of the at least one thermally conductive reagent support panel.

9. The vaporizer vessel of claim 1 , wherein the thermally conductive joint is a weld.

10. The vaporizer vessel of claim 1 , further comprising a fill port, the fill port spaced apart from the thermally conductive reagent support panels such that the fill port is in communication with all spaces defined by the at least one thermally conductive reagent support panel.

11. The vaporizer vessel of claim 1 , wherein the at least one thermally conductive reagent support panel includes one or more openings through said reagent support panel.

12. The vaporizer vessel of claim 1 , wherein a material of the at least one thermally conductive reagent support panel is selected from a group consisting of stainless steel, nickel, aluminum, and graphite.

Assignees

• Entegris Inc

Inventors

• Cardozo Benjamin
• Thomas Jacob

Classifications

• C23C16/45553

  characterized by the use of precursors specially adapted for ALD · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/45544

  characterized by the apparatus · CPC title

• C23C16/448 Primary

  characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials · CPC title

• C23C16/4481 Primary

  by evaporation using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title