Method for forming protective film, method for manufacturing patterned substrate, and composition

Patent metadata

Field	Value
Publication number	US-12312487-B2
Application number	US-202318127066-A
Country	US
Kind code	B2
Filing date	Mar 28, 2023
Priority date	Oct 8, 2020
Publication date	May 27, 2025
Grant date	May 27, 2025

Abstract

A method for forming a protective film includes directly or indirectly coating only a periphery of a substrate with a composition. The composition includes a compound having an aromatic ring, and a solvent. The solvent includes a first solvent having a normal boiling point of 156° C. or higher and lower than 300° C. A content of the first solvent in the solvent is preferably 20 mass % or more and 100 mass % or less. The first solvent is preferably an ester, an alcohol, an ether, a carbonate, or a combination of two or more of an ester, an alcohol, an ether, and a carbonate.

First claim

What is claimed is:

1. A method for producing a patterned substrate, comprising:
directly or indirectly coating only a periphery of a substrate with a composition to form a protective film;
directly or indirectly forming a resist pattern on the substrate having the protective film; and
performing etching using the resist pattern as a mask,
wherein the composition comprises:
at least one compound selected from the group consisting of a novolac resin, a compound having a fluorenebisphenol skeleton, a compound having a spiroindene skeleton, a compound having a truxene skeleton, and a compound having a triphenylbenzene skeleton; and
a solvent,
the solvent comprising a first solvent having a normal boiling point of 156° C. or higher and lower than 300° C.

2. The method for producing a patterned substrate according to claim 1 , wherein a content of the first solvent in the solvent is 20 mass % or more and 100 mass % or less with respect to a total mass of the solvent.

3. The method for producing a patterned substrate according to claim 1 , wherein a content of the first solvent in the solvent is 40 mass % or more and 60 mass % or less with respect to a total mass of the solvent.

4. The method for producing a patterned substrate according to claim 1 , wherein the first solvent is an ester, an alcohol, an ether, a carbonate, or a combination of two or more of an ester, an alcohol, an ether, and a carbonate.

5. The method for producing a patterned substrate according to claim 1 , wherein the first solvent has a normal boiling point of 205° C. or higher.

6. The method for producing a patterned substrate according to claim 1 , wherein the first solvent comprises at least one selected from the group consisting of an ether and a carbonate.

7. The method for producing a patterned substrate according to claim 6 , wherein the ether is a dialkylene glycol monoalkyl ether acetate.

8. The method for producing a patterned substrate according to claim 1 , wherein a content of the solvent is 10 mass % or more and 90 mass % or less with respect to a total mass of the composition.

9. The method for producing a patterned substrate according to claim 1 , wherein the solvent further comprises a second solvent having a normal boiling point of lower than 156° C.

10. The method for producing a patterned substrate according to claim 9 , wherein the second solvent is an alkylene glycol monoalkyl ether, an alkylene glycol monoalkyl ether acetate, or a combination of an alkylene glycol monoalkyl ether and an alkylene glycol monoalkyl ether acetate.

11. The method for producing a patterned substrate according to claim 9 , wherein a content of the second solvent is 10 mass % or more and 80 mass % or less with respect to a total mass of the solvent.

12. The method for producing a patterned substrate according to claim 9 , wherein a content of the second solvent is 30 mass % or more and 60 mass % or less with respect to a total mass of the solvent.

13. The method for producing a patterned substrate according to claim 1 , wherein an evaporation rate of the first solvent relative to butyl acetate is 0.01 or more and 10 or less, provided that an evaporation rate of butyl acetate is defined as 100.

14. The method for producing a patterned substrate according to claim 1 , further comprising, before forming the resist pattern,
directly or indirectly forming an organic underlayer film on the substrate having the protective film.

15. The method for producing a patterned substrate according to claim 1 , further comprising, before forming the resist pattern,
directly or indirectly forming a silicon-containing film on the substrate having the protective film.

16. The method for producing a patterned substrate according to claim 1 , wherein the at least one compound comprises a novolac resin.

17. The method for producing a patterned substrate according to claim 16 , wherein the novolac resin is a resin having structural units derived from dihydroxynaphthalene and formaldehyde.

18. The method for producing a patterned substrate according to claim 16 , wherein the novolac resin is a resin having structural units derived from fluorenebisphenol and formaldehyde.

19. The method for producing a patterned substrate according to claim 16 , wherein the novolac resin is a resin having structural units derived from fluorenebisnaphthol and formaldehyde.

20. The method for producing a patterned substrate according to claim 16 , wherein the novolac resin is a resin having structural units derived from hydroxypyrene and formaldehyde.

21. The method for producing a patterned substrate according to claim 16 , wherein the novolac resin is a resin having structural units derived from a phenolic compound and formylpyrene.

22. The method for producing a patterned substrate according to claim 16 , wherein the novolac resin has a propargyl group.

23. A method for producing a patterned substrate, comprising:
directly or indirectly coating only a periphery of a substrate with a composition to form a protective film;
directly or indirectly forming a resist pattern on the substrate having the protective film; and
performing etching using the resist pattern as a mask,
wherein the composition comprises:
at least one compound selected from the group consisting of a novolac resin, a compound having a fluorenebisphenol skeleton, a compound having a spiroindene skeleton, a compound having a truxene skeleton, and a compound having a triphenylbenzene skeleton; and
a solvent,
the solvent comprising: a first solvent which has a normal boiling point of 205° C. or higher and is at least one solvent selected from the group consisting of a dialkylene glycol monoalkyl ether acetate and a carbonate; and a second solvent which has a normal boiling point of lower than 156° C. and is at least one solvent selected from the group consisting of an alkylene glycol monoalkyl ether and an alkylene glycol monoalkyl ether acetate,
a content of the first solvent in the solvent being 40 mass % or more and 60 mass % or less with respect to a total mass of the solvent, and a content of the second solvent is 30 mass % or more and 60 mass % or less with respect to a total mass of the solvent.

24. The method for producing a patterned substrate according to claim 23 , wherein the at least one compound comprises a novolac resin.

Assignees

• Jsr Corp

Inventors

• Takanashi Kazunori
• Miyauchi Hiroyuki
• Okumura Nao
• Kawazu Tomoharu
• Dei Satoshi

Classifications

• H10P50/287

  by chemical means · CPC title

• H10P50/73

  using masks for insulating materials · CPC title

• H10P50/71

  using masks for conductive or resistive materials · CPC title

• H10W74/01

  Manufacture or treatment · CPC title

• H10P76/2041

  Photolithographic processes · CPC title