Two-axis scanning mirror using piezoelectric drivers and serpentine torsion springs

Patent metadata

Field	Value
Publication number	US-12306398-B2
Application number	US-202117566030-A
Country	US
Kind code	B2
Filing date	Dec 30, 2021
Priority date	Dec 27, 2021
Publication date	May 20, 2025
Grant date	May 20, 2025

Abstract

Embodiments of the disclosure provide a scanning mirror assembly. In certain configurations, the scanning mirror assembly may include a two-dimensional micro-electromechanical system (MEMS) scanning mirror, a skeleton on a back surface of the MEMS scanning mirror, a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of serpentine torsion springs, and a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of serpentine torsion springs. The first pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a first axis, and the second pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a second axis orthogonal to the first axis.

First claim

What is claimed is:

1. A scanning mirror assembly, comprising:
a two-dimensional micro-electromechanical system (MEMS) scanning mirror;
a skeleton on a back surface of the MEMS scanning mirror, wherein the skeleton is a two-dimensional silicon grid;
a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of serpentine torsion springs, wherein the first pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a first axis; and
a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of serpentine torsion springs, wherein the second pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a second axis orthogonal to the first axis.

2. The scanning mirror assembly of claim 1 , wherein the first pair of serpentine torsion springs join the second pair of serpentine torsion springs at a stage.

3. The scanning mirror assembly of claim 2 , further comprising:
a post protruding from the MEMS scanning mirror and configured to bond the MEMS scanning mirror to the stage.

4. The scanning mirror assembly of claim 1 , wherein:
the first pair of piezoelectric electrodes is configured to oscillate the MEMS scanning mirror around the first axis at a first frequency,
the second pair of piezoelectric electrodes is configured to oscillate the MEMS scanning mirror around the second axis at a second frequency, and
the first frequency is higher than the second frequency.

5. The scanning mirror assembly of claim 4 , wherein the first pair of serpentine torsion springs has a first number of folds predetermined at least partially based on the first frequency, and the first pair of serpentine torsion springs has a second number of folds predetermined at least partially based on the second frequency.

6. The scanning mirror assembly of claim 1 , wherein the first pair of serpentine torsion springs and the second pair of serpentine torsion springs each contains a single fold.

7. The scanning mirror assembly of claim 1 , wherein the first pair of serpentine torsion springs or the second pair of serpentine torsion springs contains multiple folds.

8. The scanning mirror assembly of claim 1 , further comprising a ceramic substrate, wherein the first pair of piezoelectric electrodes and the second pair of piezoelectric electrodes are electrically connected to the ceramic substrate.

9. The scanning mirror assembly of claim 1 , wherein the first pair of first electrodes or the second pair of piezoelectric electrodes comprises lead zirconate titanate (PZT) films coated on silicon plates.

10. The scanning mirror assembly of claim 1 , wherein the MEMS scanning mirror comprises a single layer of silicon coated with a reflective metal layer.

11. The scanning mirror assembly of claim 10 , wherein the skeleton is mounted to the single layer of silicon.

12. A transmitter for an optical sensing system, comprising:
a light source configured to emit a light beam; and
a scanner for steering the light beam towards an object, the scanner comprising:
a two-dimensional micro-electromechanical system (MEMS) scanning mirror;
a skeleton on a back surface of the MEMS scanning mirror, wherein the skeleton is a two-dimensional silicon grid;
a first pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a first pair of serpentine torsion springs, wherein the first pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a first axis; and
a second pair of piezoelectric electrodes coupled to the MEMS scanning mirror through a second pair of serpentine torsion springs, wherein the second pair of piezoelectric electrodes drives the MEMS scanning mirror and the skeleton to rotate around a second axis orthogonal to the first axis.

13. The transmitter of claim 12 , wherein:
the first pair of piezoelectric electrodes is configured to oscillate the MEMS scanning mirror around the first axis at a first frequency, and
the second pair of piezoelectric electrodes is configured to oscillate the MEMS scanning mirror around the second axis at a second frequency lower than the first frequency.

14. The transmitter of claim 13 , wherein:
the first pair of serpentine torsion springs has a first number of folds predetermined at least partially based on the first frequency, and
the second pair of serpentine torsion springs has a second number of folds predetermined at least partially based on the second frequency.

15. The transmitter of claim 12 , wherein the first pair of serpentine torsion springs and the second pair of serpentine torsion springs each contains a single fold.

16. The transmitter of claim 12 , wherein the first pair of serpentine torsion springs or the second pair of serpentine torsion springs contains multiple folds.

17. The transmitter of claim 12 , wherein the MEMS scanning mirror comprises a single layer of silicon coated with a reflective metal layer and the skeleton is a mounted to the single layer of silicon.

18. A method for operating a scanner of an optical sensing system, comprising:
applying a first potential to a first pair of piezoelectric electrodes to drive a two-dimensional micro-electromechanical system (MEMS) scanning mirror with a skeleton on a back surface of the MEMS scanning mirror to rotate around a first axis, wherein the first pair of piezoelectric electrodes is coupled to the MEMS scanning mirror through a first pair of serpentine torsion springs and the skeleton is a two-dimensional silicon grid; and
applying a second potential to a second pair of piezoelectric electrodes to drive the MEMS scanning mirror and the skeleton to independently rotate around a second axis orthogonal to the first axis, wherein the second pair of piezoelectric electrodes is coupled to the MEMS scanning mirror through a second pair of serpentine torsion springs.

19. The method of claim 18 , further comprising:
applying a third potential to the first pair of piezoelectric electrodes and the second pair of piezoelectric electrodes to move the MEMS scanning mirror and the skeleton along a third axis orthogonal to both the first axis and the second axis.

Assignees

• Beijing Voyager Tech Co Ltd

Inventors

• Wang Youmin
• Wang Yufeng
• Ho Kong Yin
• Li Gary

Classifications

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G02B26/0858 Primary

  the reflecting means being moved or deformed by piezoelectric means · CPC title