Microelectromechanical systems device

Patent metadata

Field	Value
Publication number	US-12294832-B2
Application number	US-202217843220-A
Country	US
Kind code	B2
Filing date	Jun 17, 2022
Priority date	Jun 22, 2021
Publication date	May 6, 2025
Grant date	May 6, 2025

Abstract

A microelectromechanical systems device includes a vibrator and a reinforcing film. The vibrator includes a piezoelectric element configured to convert pressure to an electrical signal. The reinforcing film is configured to reinforce strength of the vibrator. The vibrator further has a groove at which a portion of the reinforcing film is disposed.

First claim

What is claimed is:

1. A microelectromechanical systems device comprising:
a vibrator including a piezoelectric element configured to convert pressure to an electrical signal; and
a reinforcing film configured to reinforce strength of the vibrator,
wherein the vibrator further includes a groove at which a portion of the reinforcing film is disposed,
wherein the vibrator further includes:
a front surface that has an aperture of the groove; and
a boundary surface that defines a boundary of the groove,

wherein the reinforcing film is connected to the front surface and the boundary surface,
wherein the vibrator further includes a rear surface at a rear side of the vibrator facing the front surface,
wherein at least one section of the groove has a length in a lateral direction orthogonal to a thickness direction connecting the front surface and the rear surface, and
wherein the length increases in a stepwise manner toward the rear surface from the front surface.

2. The microelectromechanical systems device according to claim 1 ,
wherein material of the reinforcing film includes organic material and filler, and
wherein the filler reduces difference between a linear expansion coefficient of the organic material and a linear expansion coefficient of material included in the vibrator.

3. The microelectromechanical systems device according to claim 1 ,
wherein the vibrator further includes:
a support end portion that has a section fixed to a support base; and
a free end portion that is integrally connected to the support end portion,

wherein the groove is disposed at the free end portion, and
wherein the reinforcing film is disposed at the free end portion.

4. The microelectromechanical systems device according to claim 3 ,
wherein the piezoelectric element included in the support end portion and the piezoelectric element included in the free end portion are insulated to each other,
wherein the vibrator further includes an electrode configured to connect an external device and the piezoelectric element included in the support end portion, and
wherein the electrode is disposed at the support end portion at a side closer to the support base.

5. The microelectromechanical systems device according to claim 4 ,
wherein the vibrator includes a plurality of vibrators,
wherein the free end portion includes a plurality of free end portions that are respectively included in the vibrators,
wherein the free end portions respectively have first ends and second ends, and the first ends are respectively separated from the second ends,
wherein the free end portions respectively have a plurality of tips correspondingly located at the second ends,
wherein the support end portion is located at each of the first ends,
wherein the free end portions are respectively tapered from the first ends to the second ends, and
wherein the tips respectively located at the second ends are linked through the reinforcing film.

6. The microelectromechanical systems device according to claim 1 ,
wherein the vibrator includes a plurality of vibrators,
wherein a gap for relieving acoustic pressure as the pressure is disposed among the vibrators, and
wherein a portion of the gap is closed by the reinforcing film.

7. A microelectromechanical systems device comprising:
a vibrator including a piezoelectric element configured to convert pressure to an electrical signal; and
a reinforcing film configured to reinforce strength of the vibrator,
wherein the vibrator further includes a groove at which a portion of the reinforcing film is disposed,
wherein the vibrator further includes:
a support end portion that has a section fixed to a support base; and
a free end portion that is integrally connected to the support end portion,

wherein the groove is disposed at the free end portion,
wherein the reinforcing film is disposed at the free end portion,
wherein the piezoelectric element included in the support end portion and the piezoelectric element included in the free end portion are insulated to each other,
wherein the vibrator further includes an electrode configured to connect an external device and the piezoelectric element included in the support end portion,
wherein the electrode is disposed at the support end portion at a side closer to the support base,
wherein the vibrator includes a plurality of vibrators,
wherein the free end portion includes a plurality of free end portions that are respectively included in the vibrators,
wherein the free end portions respectively have first ends and second ends, and the first ends are respectively separated from the second ends,
wherein the free end portions respectively have a plurality of tips correspondingly located at the second ends,
wherein the support end portion is located at each of the first ends,
wherein the free end portions are respectively tapered from the first ends to the second ends, and
wherein the tips respectively located at the second ends are linked through the reinforcing film.

Assignees

• Denso Corp
• Toyota Motor Co Ltd
• MIRISE Technologies Corporation
• Nisshinbo Micro Devices Inc

Inventors

• Ohara Yuki
• Joke Tomoya
• Enomoto Tetsuya
• Yamada Hideo
• Katakami Shuji
• Usui Takahide
• Kuchiji Hiroyuki
• Masumoto Naoki

Classifications

• H04R7/18

  at the periphery · CPC title

• B81C2201/013

  Etching · CPC title

• B81B2203/04

  Electrodes · CPC title

• B81B2203/0127

  Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function · CPC title

• B81B2201/0257

  Microphones or microspeakers · CPC title