Mems transducer with increased performance
US-2023047856-A1 · Feb 16, 2023 · US
US12289580B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12289580-B2 |
| Application number | US-202218085553-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 20, 2022 |
| Priority date | Jan 17, 2022 |
| Publication date | Apr 29, 2025 |
| Grant date | Apr 29, 2025 |
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The disclosure provides an electronic device including a substrate, a first vibrating unit, and a supporting unit. The substrate has a first surface. The first vibrating unit is disposed on the first surface and has a second surface. The second surface faces the first surface. The supporting unit is disposed between the substrate and the first vibrating unit. The first surface and the second surface are separated by a distance through the supporting unit. This distance ranges from equal to or greater than 0.06 mm to equal to or less than 65.4 mm.
Opening claim text (preview).
What is claimed is: 1. An electronic device, comprising: a substrate having a first surface; a first vibrating unit disposed on the first surface and having a second surface, wherein the second surface faces the first surface; and a supporting unit disposed between the substrate and the first vibrating unit, wherein the first surface and the second surface are separated by a distance through the supporting unit, and the supporting unit comprises a plurality of supporting members, the supporting members surround the first vibrating unit in a top view of the electronic device, and two of the adjacent supporting members are separated by a gap, wherein the distance ranges from equal to or greater than 0.06 mm to equal to or less than 65.4 mm. 2. The electronic device according to claim 1 , wherein the distance ranges from equal to or greater than 0.1 mm to equal to or less than 32.7 mm. 3. The electronic device according to claim 1 , wherein the first vibrating unit comprises a conductive layer and an oscillation layer, the oscillation layer overlaps the conductive layer, and a ratio of a thickness of the oscillation layer to a thickness of the conductive layer ranges from equal to or greater than 0.5 to equal to or less than 1. 4. The electronic device according to claim 3 , wherein the oscillation layer comprises a piezoelectric material. 5. The electronic device according to claim 1 , wherein the first vibrating unit is adapted to generate a sound wave. 6. The electronic device according to claim 1 , further comprising a sound wave guiding unit disposed on the first surface and corresponding to the gap. 7. The electronic device according to claim 1 , further comprising a second vibrating unit disposed on the first surface, wherein the substrate has a recess, and the recess is located between the first vibrating unit and the second vibrating unit in a top view of the electronic device. 8. The electronic device according to claim 7 , further comprising a vibration absorbing unit disposed in the recess. 9. The electronic device according to claim 1 , further comprising a heat conducting unit disposed between the substrate and the supporting unit. 10. The electronic device according to claim 9 , wherein the heat conducting unit comprises metal, metal oxide, boron nitride, or a ceramic material. 11. The electronic device according to claim 1 , further comprising a first driving unit and a display panel, wherein the display panel is electrically connected to the first driving unit, the substrate has a third surface, the third surface is opposite to the first surface, and the display panel is disposed on the third surface. 12. The electronic device according to claim 11 , wherein the first driving unit is electrically connected to the first vibrating unit. 13. The electronic device according to claim 11 , further comprising a circuit board and a second driving unit, wherein the second driving unit is electrically connected to the first vibrating unit, and the first driving unit and the second driving unit are disposed on the circuit board.
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