Charged particle beam apparatus

Patent metadata

Field	Value
Publication number	US-12283452-B2
Application number	US-202118285457-A
Country	US
Kind code	B2
Filing date	Apr 15, 2021
Priority date	Apr 15, 2021
Publication date	Apr 22, 2025
Grant date	Apr 22, 2025

Abstract

Provided is a charged particle beam apparatus capable of realizing a highly reliable insulating structure. This charged particle beam apparatus emits a charged particle beam from a charged particle beam emission device onto a sample, detects charged particles generated from the sample, and creates a sample image or processes the sample. The charged particle beam emission device is provided with a charged particle source and a shield arranged in an interior of a metal housing that is filled with an insulating gas, and an acceleration electrode arranged below the charged particle source, power being supplied to the acceleration electrode via the shield.

First claim

The invention claimed is:

1. A charged particle beam apparatus that emits a charged particle beam from a charged particle beam emission device onto a sample, detects a charged particle generated from the sample, and creates a sample image or processes the sample, the charged particle beam emission device comprising:
a charged particle source and a shield that are arranged in an interior of a metal housing that is filled with an insulating gas; and
an acceleration electrode arranged below the charged particle source, wherein
power is supplied to the acceleration electrode via the shield.

2. The charged particle beam apparatus according to claim 1 , comprising
a charged particle source shield having the same potential as any portion of the charged particle source in an insulating gas space between the shield and the charged particle source.

3. The charged particle beam apparatus according to claim 1 , comprising:
a first multicore cable and a first bushing; and
a second multicore cable and a second bushing, wherein
the first multicore cable and the first bushing are arranged at positions different from the second multicore cable and the second bushing, power is supplied to the acceleration electrode via the first multicore cable and the first bushing, and electrical connection to any portion of the charged particle source is made via the second multicore cable and the second bushing.

4. The charged particle beam apparatus according to claim 1 , comprising:
one or more control wirings and a current introduction terminal; and
a charged particle source control device that is connected to the control wiring via an opening provided in the shield, wherein
the charged particle source control device controls an ON/OFF state of a voltage and/or a current of the charged particle source.

5. The charged particle beam apparatus according to claim 1 , wherein an inner surface of the shield and/or the metal housing is coated to have an insulating property.

6. The charged particle beam apparatus according to claim 2 , wherein an inner surface of at least of the shield, the metal housing, and the charged particle source shield is coated to have an insulating property.

7. The charged particle beam apparatus according to claim 3 , wherein an inner surface of the shield and/or the metal housing is coated to have an insulating property.

8. The charged particle beam apparatus according to claim 4 , wherein an inner surface of the shield and/or the metal housing is coated to have an insulating property.

9. The charged particle beam apparatus according to claim 2 , comprising:
a first multicore cable and a first bushing; and
a second multicore cable and a second bushing, wherein
the first multicore cable and the first bushing are arranged at positions different from the second multicore cable and the second bushing, power is supplied to the acceleration electrode via the first multicore cable and the first bushing, and electrical connection to any portion of the charged particle source is made via the second multicore cable and the second bushing.

10. The charged particle beam apparatus according to claim 2 , comprising:
one or more control wirings and a current introduction terminal; and
a charged particle source control device that is connected to the control wiring via an opening provided in the shield, wherein
the charged particle source control device controls an ON/OFF state of a voltage and/or a current of the charged particle source.

11. The charged particle beam apparatus according to claim 3 , comprising:
one or more control wirings and a current introduction terminal; and
a charged particle source control device that is connected to the control wiring via an opening provided in the shield, wherein
the charged particle source control device controls an ON/OFF state of a voltage and/or a current of the charged particle source.

12. A charged particle beam apparatus that emits a charged particle beam from a charged particle beam emission device onto a sample, detects a charged particle generated from the sample, and creates a sample image or processes the sample, the charged particle beam emission device comprising:
a charged particle source and a shield that are arranged in an interior of a metal housing that is filled with an insulating gas; and
an acceleration electrode arranged below the charged particle source, wherein
a potential of the shield is the same as that in any portion of the charged particle source, and
power is supplied to the acceleration electrode by an accelerating tube power supply wiring arranged inside the shield.

Assignees

• Hitachi High Tech Corp

Inventors

• Morita Hiroshi
• Kubo Takashi
• Sakamaki Minoru
• Ishikawa Shuhei
• Watanabe Shunichi

Classifications

• H01J2237/0473

  accelerating · CPC title

• H01J37/2955

  using scanning ray · CPC title

• H01J37/241

  High voltage power supply or regulation circuits · CPC title

• H01J37/16 Primary

  Vessels; Containers · CPC title

• H01J37/09

  Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields · CPC title