Suspended type nanowire and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-12281008-B2
Application number	US-202016929955-A
Country	US
Kind code	B2
Filing date	Jul 15, 2020
Priority date	Jul 16, 2019
Publication date	Apr 22, 2025
Grant date	Apr 22, 2025

Abstract

Provided is a suspended type nanowire that is fixed and electrically connected to each of a first electrode disposed on a substrate and a second electrode disposed on the substrate and spaced apart from the first electrode and suspended on the substrate. Here, a cross-section in a direction perpendicular to a longitudinal direction of the suspended type nanowire includes at least one curved part, and the curve part includes a reference surface and at least one side surface extending downward from the reference surface.

First claim

What is claimed is:

1. A suspended type nanowire that is fixed and electrically connected to each of a first electrode disposed on a substrate and a second electrode that is disposed on the substrate and spaced apart from the first electrode, the suspended type nanowire being suspended on the substrate,
wherein a cross-section in a direction perpendicular to a longitudinal direction of the suspended type nanowire comprises:
a reference surface; and
at least one side surface extending to be perpendicular to the reference surface, the at least one side surface having one end contacting one end of the reference surface.

2. The suspended type nanowire of claim 1 , wherein the at least one side surface extends downward or upward.

3. The suspended type nanowire of claim 1 , wherein the at least one side surface has the other end extending downward from the reference surface.

4. The suspended type nanowire of claim 1 , wherein the cross-section comprises:
a first area extending outward based on the reference surface; and
a second area extending outward based on the reference surface.

5. The suspended type nanowire of claim 4 , wherein a maximum height of the first area is equal to or different from that of the second area.

6. The suspended type nanowire of claim 1 , wherein the at least one side surface comprises:
a first side surface having one end contacting one end of the reference surface and the other end extending downward from the reference surface; and
a second side surface having one end contacting the other end of the reference surface and the other end extending downward from the reference surface.

7. The suspended type nanowire of claim 6 , wherein the cross-section comprises:
a first area extending outward based on the reference surface;
a second area extending outward based on the first side surface; and
a third area extending outward based on the second side surface.

8. The suspended type nanowire of claim 7 , wherein a maximum height of the second area is equal to or different from that of the third area, and
a maximum height of the first area is equal to or greater than a greater value of the maximum height of the second area and the maximum height of the third area.

9. The suspended type nanowire of claim 1 , wherein each of the first electrode and the second electrode is one of a thermoelectric device, a piezoelectric device, a nanowire heater, a transistor, a chemical sensor, and an infrared light emitter.

Assignees

• Korea Advanced Inst Sci & Tech

Inventors

• Yoon Jun-Bo
• Lee Jaeshin
• Choi Kwang-Wook
• Jo Min-Seung

Classifications

• B82B3/008

  Processes for improving the physical properties of a device · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B82Y15/00

  Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors · CPC title

• C23C14/0005

  Separation of the coating from the substrate · CPC title

• C23C14/225

  Oblique incidence of vaporised material on substrate · CPC title