Semiconductor device package with improved die pad and solder mask design

Patent metadata

Field	Value
Publication number	US-12278205-B2
Application number	US-202016778250-A
Country	US
Kind code	B2
Filing date	Jan 31, 2020
Priority date	Feb 1, 2019
Publication date	Apr 15, 2025
Grant date	Apr 15, 2025

Abstract

A described example includes a package substrate having an array of die pads arranged in rows and columns on a die mount surface, and having an opposing board side surface; a solder mask layer overlying the die mount surface; a first plurality of solder mask defined openings in the solder mask layer at die pad locations, the solder mask defined openings exposing portions of a surface of corresponding die pads, the surface facing away from the package substrate; and at least one non-solder mask defined opening in the solder mask layer at a die pad location, exposing the entire surface of the die pad and sidewalls of the die pad at the non-solder mask defined opening.

First claim

What is claimed is:

1. An apparatus comprising:
a package substrate having a die mount surface;
an array of die pads arranged in rows and columns in a first region of the die mount surface, wherein the array of die pads includes:
a first column of die pads defining and being coextensive with a first boundary of the array;
a second column of die pads defining and being coextensive with a second boundary of the array opposite the first boundary;
a first row of die pads defining and being coextensive with a third boundary of the array perpendicular to the first boundary; and
a second row of die pads defining and being coextensive with a fourth boundary of the array opposite the third boundary, wherein the first, second, third, and fourth boundaries define the first region, and wherein a second region of the die mount surface outside the first, second, third and fourth boundaries is exclusive of die pads;

a solder mask layer overlaying the die mount surface; and
openings extended through the solder mask layer, wherein the openings include:
a plurality of solder mask defined (SMD) openings at a plurality of die pad locations corresponding to a plurality of die pads of the array, each of the SMD openings exposing a portion of a surface of a corresponding die pad, the surface facing away from the package substrate; and
a first column of non-solder mask defined (NSMD) openings at die pad locations, each one of the die pads of the first column of die pads respectively aligning with a corresponding one of the NSMD openings of the first column of NSMD openings, each of the NSMD openings exposing an entire surface of a corresponding die pad and sidewalls of the die pad.

2. The apparatus of claim 1 , further comprising:
a semiconductor device die with a first surface and having conductive post connects extending from bond pads on the first surface;
wherein the semiconductor device die is mounted to the die mount surface of the package substrate by solder joints formed between the die pads of the array and the conductive post connects, the solder joints extending through the openings in the solder mask layer.

3. The apparatus of claim 1 , further comprising:
a plurality of NSMD openings at die pads corresponding to one or more exterior corner locations of the array of die pads.

4. The apparatus of claim 1 , wherein the openings include a second column of NSMD openings corresponding to the second column of die pads, each of the second column of NSMD openings exposing an entire surface of a corresponding die pad and sidewalls of the die pad.

5. The apparatus of claim 1 , wherein at least one of the first column of NMSD openings comprises sidewalls in the solder mask layer, the sidewalls intersecting the die mount surface of the package substrate at a right angle.

6. The apparatus of claim 1 , wherein at least one of the first column of NMSD openings comprises sidewalls in the solder mask layer, the sidewalls intersecting the die mount surface of the package substrate at an acute angle such that the at least one of the first column of NSMD openings is wider proximate the die mount surface of the package substrate than proximate a top surface of the solder mask layer.

7. The apparatus of claim 1 , wherein at least one of the first column of NMSD openings comprises sidewalls in the solder mask layer, the sidewalls intersecting the die mount surface of the package substrate at an angle between 60 and 80 degrees.

8. The apparatus of claim 1 , wherein the die pads have a first diameter, the SMD openings have a second diameter less than the first diameter, and the NSMD openings have a third diameter greater than the first diameter.

9. The apparatus of claim 1 , wherein the NSMD openings have sidewalls spaced from sidewalls of the die pads, a first diameter at a surface of the solder mask layer that faces away from the package substrate, and a second diameter where the NSMD openings meet the die mount surface, the first diameter less than the second diameter.

10. A method for manufacturing a packaged semiconductor device, comprising:
forming an array of die pads in rows and columns in a first region of a die mount surface of a package substrate, wherein the array of die pads includes:
a first column of die pads defining and being coextensive with a first boundary of the array;
a second column of die pads defining and being coextensive with a second boundary of the array opposite the first boundary;
a first row of die pads defining and being coextensive with a third boundary of the array perpendicular to the first boundary; and
a second row of die pads defining and being coextensive with a fourth boundary of the array opposite the third boundary, wherein the first, second, third and fourth boundaries define a first region, and wherein a second region of the die mount surface outside the first, second, third and fourth boundaries is exclusive of die pads;

forming a solder mask layer over the array of die pads; and
forming openings extended though the solder mask layer, wherein the openings include:
a plurality of solder mask defined (SMD) openings having a first diameter that is less than a second diameter of the die pads; and
a first column of non-solder mask defined (NSMD) openings at die pad locations, each one of the die pads of the first column of die pads respectively aligning with a corresponding one of the NSMD openings of the first column of NSMD openings, each of the NSMD openings having a third diameter that is greater than the second diameter of the die pads.

11. The method of claim 10 , further comprising:
flip chip mounting a semiconductor device die to the die mount surface of the package substrate, the semiconductor device die having a plurality of conductive post connects extending from bond pads on a first surface of the semiconductor device die and each conductive post connect having solder at an end portion; and
forming solder joints between the conductive post connects of the semiconductor device die and the die pads of the package substrate using a thermal reflow process, wherein the solder joints extend through the openings in the solder mask layer.

12. The method of claim 10 , further comprising:
forming NSMD openings at locations corresponding to one or more exterior corner locations in the array of die pads.

13. The method of claim 10 , further comprising:
forming a second column of NSMD openings, each of the second column of NSMD openings having the third diameter.

14. The method of claim 10 , further comprising:
forming NSMD openings at locations in the array of die pads that are selected at one or more of the first and second boundaries.

15. The method of claim 10 , wherein at least one NSMD opening of the first column of NSMD openings has sidewalls that are spaced from sidewalls of a corresponding die pad, the solder mask layer having sidewalls that intersect with the die mount surface of the package substrate at a right angle.

16. The method of claim 10 , wherein at least one NSMD opening of the first column of NSMD openings has sidewalls that are spaced from sidewalls of a corresponding die pad, the solder mask layer having sidewalls that intersect with the die mount surface of the package substrate at an acute angle such that the at least one of the first column of NSMD openings is wider proximate the die mount surface of the package substrate than proximate a top surface of the solder mask layer.

17. A packaged semiconductor device, comprising:
a package substrate having a die mount surface;
an array of die pads arranged in rows an

Assignees

• Texas Instruments Inc

Inventors

• Williamson Jaimal Mallory
• Li Guangxu

Classifications

• H10W90/724

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W90/701

  characterised by the relative positions of pads or connectors relative to package parts · CPC title

• H10W74/15

  on active surfaces of flip-chip devices, e.g. underfills · CPC title

• H10W74/012

  of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills · CPC title

• H10W72/07236

  Soldering or alloying · CPC title