Engineered actuators usable in MEMs active cooling devices

Patent metadata

Field	Value
Publication number	US-12274035-B2
Application number	US-202217890917-A
Country	US
Kind code	B2
Filing date	Aug 18, 2022
Priority date	Dec 6, 2019
Publication date	Apr 8, 2025
Grant date	Apr 8, 2025

Abstract

An actuator usable in a cooling system is described. The actuator includes an anchored region and a cantilevered arm. The cantilevered arm extends outward from the anchored region. The cantilevered arm includes a step region, an extension region and an outer region. The step region extends outward from the anchored region and has a step thickness. The extension region extends outward from the step region and has an extension thickness less than the step thickness. The outer region extends outward from the extension region and has an outer thickness greater than the extension thickness.

First claim

What is claimed is:

1. An actuator, comprising:
an anchored region configured to be coupled to a support structure; and
a cantilevered arm extending outward from the anchored region, the cantilevered arm having a mass per unit length that varies with a distance from the anchored region, wherein the cantilevered arm includes
a step region extending outward from the anchored region having a first mass per unit length;
an extension region extending outward from the step region having a second mass per unit length less than the first mass per unit length; and
an outer region extending outward from the extension region having a third mass per unit length greater than the second mass per unit length;

wherein at least a portion of the actuator is configured to undergo vibrational motion when the actuator is actuated; and
wherein the step region, the extension region, and the outer region of the cantilevered arm are configured to undergo motion with respect to the anchored region when the actuator is actuated.

2. The actuator of claim 1 , wherein the anchored region has the first mass per unit length.

3. The actuator of claim 1 , wherein the step region has a step thickness, at least a portion of the extension region has an extension thickness less than the step thickness, and at least a portion of the outer region has an outer thickness greater than the extension thickness.

4. The actuator of claim 3 , wherein the step region further includes:
an additional step region between the step region and the extension region, the additional step region having an additional step thickness less than the step thickness and greater than the extension thickness.

5. The actuator of claim 1 , wherein at least a portion of the cantilevered arm has a varying mass per unit depth perpendicular to the distance.

6. The actuator of claim 1 , wherein at least one of the step region, the extension region and the outer region includes at least one recess therein.

7. The actuator of claim 6 , wherein the at least one recess includes a taper such that a width of the at least one recess increases with a distance from the anchored region.

8. The actuator of claim 6 , further comprising:
a cover configured such that the at least one recess is internal to the actuator.

9. The actuator of claim 1 , wherein the cantilevered arm includes a piezoelectric.

10. The actuator of claim 1 , wherein at least a portion of the step region has a constant thickness.

11. The actuator of claim 1 , wherein the step region has a first face and a second face opposite to the first face, the first face being substantially parallel to the second face for the actuator not being actuated.

12. An actuator, comprising:
an anchored region configured to be coupled to a support structure;
a cantilevered arm extending outward from the anchored region, the cantilevered arm having a mass per unit length that varies with a distance from the anchored region, wherein the cantilevered arm includes
a step region extending outward from the anchored region having a first mass per unit length;
an extension region extending outward from the step region having a second mass per unit length less than the first mass per unit length;
an outer region extending outward from the extension region having a third mass per unit length greater than the second mass per unit length;

an additional cantilevered arm extending outward from the anchored region opposite to the cantilevered arm, wherein the additional cantilevered arm includes
an additional step region extending outward from the anchored region having a fourth mass per unit length;
an additional extension region extending outward from the additional step region and having a fifth mass per unit length less than the fourth mass per unit length; and
an additional outer region extending outward from the additional extension region and having a sixth mass per unit length greater than the fifth mass per unit length.

13. The actuator of claim 12 , wherein the fourth mass per unit length is equal to the first mass per unit length, the fifth mass per unit length is equal to the second mass per unit length, and the sixth mass per unit length is equal to the third mass per unit length.

14. The actuator of claim 12 , wherein the additional step region and the step region each has a step thickness, the additional extension region and the extension region has an extension thickness less than the step thickness, and the additional outer region and the outer region has an outer thickness greater than the extension thickness.

15. A cooling system, comprising:
a support structure; and
a cooling element including an anchored region and a cantilevered arm, the anchored region being coupled to the support structure, the cantilevered arm extending outward from the anchored region and having a mass per unit length that varies with a distance from the anchored region, wherein the cantilevered arm includes
a step region extending outward from the anchored region having a first mass per unit length;
an extension region extending outward from the step region having a second mass per unit length less than the first mass per unit length; and
an outer region extending outward from the extension region having a third mass per unit length greater than the second mass per unit length;

wherein the cooling element is configured to undergo vibrational motion when actuated to drive a fluid to transfer heat from a heat-generating structure coupled to the support structure; and
wherein the step region, the extension region, and the outer region of the cantilevered arm are configured to undergo motion with respect to the anchored region when the cooling element is actuated.

16. The cooling system of claim 15 , wherein the step region has a step thickness, at least a portion of the extension region has an extension thickness less than the step thickness, and at least a portion of the outer region has an outer thickness greater than the extension thickness.

17. The cooling system of claim 15 , wherein at least a portion of the cantilevered arm has a varying mass per unit depth perpendicular to the distance.

18. A cooling system, comprising:
a support structure; and
a cooling element including an anchored region and a cantilevered arm, the anchored region being coupled to the support structure, the cantilevered arm extending outward from the anchored region and having a mass per unit length that varies with a distance from the anchored region, wherein the cantilevered arm includes
a step region extending outward from the anchored region having a first mass per unit length;
an extension region extending outward from the step region having a second mass per unit length less than the first mass per unit length; and
an outer region extending outward from the extension region having a third mass per unit length greater than the second mass per unit length;

wherein the cooling element includes an additional cantilevered arm extending outward from the anchored region opposite to the cantilevered arm, wherein the additional cantilevered arm includes
an additional step region extending outward from the anchored region having fourth mass per unit length;
an additional extension region extending outward from the additional step region and having a fifth mass per unit length less than the fourth mass per unit length; and
an additional outer region extending outward from the additional extension region and having a sixth mass per unit length greater than the fifth mass per unit length;

wherein th

Assignees

• Frore Systems Inc

Inventors

• Mukundan Vikram
• Ganti Suryaprakash
• Yalamarthy Ananth Saran
• Madhavapeddy Seshagiri Rao
• Sathyamurthy Prabhu

Classifications

• H10W40/43

  by flowing gases, e.g. forced air cooling · CPC title

• H05K7/20418

  the radiating structures being additional and fastened onto the housing · CPC title

• H05K7/20254

  Cold plates transferring heat from heat source to coolant · CPC title

• H05K7/20509 Primary

  Multiple-component heat spreaders; Multi-component heat-conducting support plates; Multi-component non-closed heat-conducting structures · CPC title

• H05K7/20272

  Accessories for moving fluid, for expanding fluid, for connecting fluid conduits, for distributing fluid, for removing gas or for preventing leakage, e.g. pumps, tanks or manifolds · CPC title