Multilayer coatings of component parts for a work piece processing chamber

Patent metadata

Field	Value
Publication number	US-12266509-B2
Application number	US-201917311639-A
Country	US
Kind code	B2
Filing date	Nov 13, 2019
Priority date	Dec 13, 2018
Publication date	Apr 1, 2025
Grant date	Apr 1, 2025

Abstract

A processing tool, comprising a processing chamber for processing a work piece, the processing chamber including at least one component part that is coated with multi-layer protective coating including (a) an aluminum layer formed on the at least one component part and (b) a ceramic coating formed on the aluminum layer. In various embodiments, the multi-layer protective coating can be applied to at least one component part prior to assembly of the processing chamber or at least partially in situ the processing chamber.

First claim

What is claimed is:

1. A processing tool comprising a processing chamber for processing a work piece, the processing chamber including at least one component part subject to mechanical stress having a multi-layer coating including (a) an aluminum mechanical protection layer formed on the at least one component part, the aluminum mechanical protection layer comprising a thickness of 25 microns or greater, and (b) a deposited ceramic coating formed on the aluminum mechanical protection layer, wherein the deposited ceramic coating has a thickness of 10 microns or less, wherein the deposited the ceramic coating comprises yttrium oxide and is protective against fluorine, and wherein the at least one component part is made from an iron-containing alloy.

2. The processing tool of claim 1 , wherein the deposited ceramic coating is an amorphous aluminum oxide ceramic layer.

3. The processing tool of claim 1 , wherein the deposited ceramic coating is a laminate of amorphous aluminum oxide ceramic and yttrium oxide.

4. The processing tool of claim 1 , wherein the deposited ceramic coating has a thickness of 0.1 to 1 micron.

5. The processing tool of claim 1 , wherein the aluminum mechanical protection layer has a thickness of 25 to 250 microns.

6. The processing tool of claim 1 , wherein the deposited ceramic coating has a thickness of 0.1 to 1 micron.

7. The processing tool of claim 1 , wherein the aluminum mechanical protection layer comprises a rack mark, and wherein the deposited ceramic coating covers the rack mark.

8. The processing tool of claim 1 , wherein the at least one component part is a spring, a washer, or a retaining ring.

9. The processing tool of claim 1 , wherein the processing tool is either a deposition tool or an etching tool.

10. A method of forming at least one component part of a processing chamber subject to mechanical stress, comprising:
electroplating the at least one component part to form an aluminum mechanical protection layer formed on the at least one component part, the aluminum mechanical protection layer comprising a thickness of 25 microns or greater, wherein the at least one component part is made of an iron-containing alloy; and
depositing a deposited ceramic coating formed on the aluminum mechanical protection layer after the electroplating using vapor phase deposition, wherein the deposited ceramic coating has a thickness of 0.25 micron to 10 microns and is protective against fluorine, and wherein the electroplating and depositing is performed prior to assembly of the processing chamber including the at least one component part.

11. The method of claim 10 , wherein the aluminum mechanical protection layer has a thickness of 25 to 250 microns.

12. The method of claim 10 , wherein the deposited ceramic coating comprises one of the following:
(c) an amorphous aluminum oxide ceramic layer;
(d) a yttrium oxide layer; or
(e) a laminate of amorphous aluminum oxide ceramic and yttrium oxide.

13. The method of claim 10 , wherein the deposited ceramic coating comprises a thickness of 1 micron or less.

14. The method of claim 10 , wherein the at least one component part is a spring, a washer, or a retaining ring.

15. The method of claim 10 , wherein the processing chamber is incorporated into either a deposition tool or an etching tool.

16. The processing tool of claim 8 , wherein the at least one component part is the washer, and wherein the washer is a bearing-centered load distribution washer.

17. The method of claim 14 , wherein the at least one component part is the washer, and wherein the washer is a bearing-centered load distribution washer.

18. A processing tool comprising a processing chamber for processing a work piece, the processing chamber including at least one component part subject to mechanical stress having a multi-layer coating including (a) an aluminum mechanical protection layer formed on the at least one component part, the aluminum mechanical protection layer comprising a thickness of 25 microns or greater, and (b) a deposited ceramic coating formed on the aluminum mechanical protection layer, wherein the deposited ceramic coating has a thickness of 0.25 micron to 10 microns and is protective against fluorine, and wherein the at least one component part is made from an iron-containing alloy.

19. The processing tool of claim 18 , wherein the deposited ceramic coating comprises a deposited amorphous aluminum oxide layer.

20. The processing tool of claim 18 , wherein the deposited ceramic coating comprises a deposited yttrium oxide layer.

Assignees

• Lam Res Corp
• Lam Researh Corp

Inventors

• Konkola Paul
• Chandrasekharan Ramesh
• Breninger Andrew H
• Kaushal Tony Shaleen

Classifications

• H10P95/90

  Thermal treatments, e.g. annealing or sintering · CPC title

• H10D64/011

  of electrodes ohmically coupled to a semiconductor · CPC title

• C23C28/345

  with at least one oxide layer · CPC title

• C23C28/32

  including at least one pure metallic layer · CPC title

• H01J37/32477 Primary

  characterised by the means for protecting vessels or internal parts, e.g. coatings · CPC title