Wire grid polarizer and fabrication method therefor

Patent metadata

Field	Value
Publication number	US-12248247-B2
Application number	US-202117764418-A
Country	US
Kind code	B2
Filing date	May 19, 2021
Priority date	Jun 30, 2020
Publication date	Mar 11, 2025
Grant date	Mar 11, 2025

Abstract

Wire grid polarizer and manufacturing method thereof are provided, the wire grid polarizer includes: substrate; first wire grid formed on substrate, including first wire grid reflection strips arranged parallel to each other and at equal intervals; second wire grid formed at a side of first wire grid away from substrate, including second wire grid reflection strips arranged in parallel to each other and at equal intervals; second wire grid reflection strips are in one-to-one correspondence with first wire grid reflection strips; orthographic projections of second wire grid reflection strip onto substrate falls within orthographic projections of corresponding first wire grid reflection strip onto substrate; wire width of second wire grid reflection strip is less than that of first wire grid reflection strip; and wire spacing of second wire grid reflection strip is greater than that of the first wire grid reflection strip.

First claim

What is claimed is:

1. A wire grid polarizer, wherein the wire grid polarizer comprises:
a substrate;
a first wire grid, formed on the substrate, the first wire grid comprising a plurality of first wire grid reflection strips arranged parallel to each other and at equal intervals; and
a second wire grid, formed at a side of the first wire grid away from the substrate, the second wire grid comprising a plurality of second wire grid reflection strips arranged in parallel to each other and at equal intervals;
wherein the plurality of second wire grid reflection strips is in one-to-one correspondence with the plurality of first wire grid reflection strips, an orthographic projection of one of the plurality of second wire grid reflection strips onto the substrate falls within an orthographic projection of a corresponding one of the plurality of first wire grid reflection strips onto the substrate, and a wire width for the plurality of second wire grid reflection strips is less than a wire width for the plurality of the first wire grid reflection strips, and a wire spacing for the plurality of second wire grid reflection strips is greater than a wire spacing for the plurality of first wire grid reflection strips;
wherein the second wire grid is arranged in a first arrangement or a second arrangement;
wherein in the first arrangement, the second wire grid comprises:
a plurality of imprinting adhesive grid strips, arranged parallel to each other and at equal intervals, wherein the plurality of imprinting adhesive grid strips is formed by using an imprinting adhesive material, each of the plurality of imprinting adhesive grid strips comprises a top end located at a side away from the substrate, a bottom end located at a side adjacent to the substrate, and a side face located between the top end and the bottom end; and
a plurality of reflection grid strips, arranged in parallel to each other and at equal intervals, wherein the plurality of reflection grid strips is formed by using a wire grid reflection material, the plurality of reflection grid strips is in one-to-one correspondence with the plurality of imprinting adhesive grid strips, and each of the plurality of reflection grid strips covers a top end and a side face of a corresponding one of the plurality of imprinting adhesive grid strips;

wherein in the second arrangement, the second wire grid comprises:
a plurality of imprinting adhesive grid strips, arranged parallel to each other and at equal intervals, wherein the plurality of imprinting adhesive grid strips is formed by using an imprinting adhesive material, each of the plurality of imprinting adhesive grid strips comprises a top end located at a side away from the substrate, a bottom end located at a side adjacent to the substrate, and a side face located between the top end and the bottom end; and

a plurality of reflection grid strips, arranged in parallel to each other and at equal intervals, wherein the plurality of reflection grid strips is formed by using a wire grid reflection material, the plurality of reflection grid strips is in one-to-one correspondence with the plurality of imprinting adhesive grid strips, and each of the plurality of reflection grid strips is only located on a top end of a corresponding one of the plurality of imprinting adhesive grid strips.

2. The wire grid polarizer of claim 1 , wherein in the first arrangement, a ratio of a wire width for the plurality of imprinting adhesive grid strips to a wire width for the plurality of reflection grid strips ranges from 1:2 to 1:1, and a ratio of a height for the plurality of imprinting adhesive grid strips to a height for the plurality of reflection grid strip ranges from 1:2 to 4:5.

3. The wire grid polarizer of claim 1 , wherein in the second arrangement, a wire width for the plurality of imprinting adhesive grid strips is the same or substantially the same as a wire width for the plurality of reflection grid strip, and a ratio of a height for the plurality of imprinting adhesive grid strips to a height for the plurality of reflection grid strips ranges from 3:1 to 5:1.

4. The wire grid polarizer of claim 1 , wherein in the first arrangement,
the wire grid reflection material of the first wire grid reflection strip is selected as a metal material; and
in the plurality of second wire grid reflection strips, the imprinting adhesive material for the plurality of imprinting adhesive grid strips is selected as a resin material, and the wire grid reflection material for the plurality of reflection grid strips is selected as a metal material.

5. The wire grid polarizer of claim 1 , wherein the wire grid polarizer further comprises:
at least one intermediate buffer layer, located between the first wire grid and the second wire grid.

6. The wire grid polarizer of claim 5 , wherein the layer number of the at least one intermediate buffer layer is less than or equal to 3.

7. The wire grid polarizer of claim 6 , wherein the layer number of the at least one intermediate buffer layer is only one, and the at least one intermediate buffer layer is formed by using at least one material selected from silicon nitride and silicon oxide.

8. The wire grid polarizer of claim 7 , wherein a film layer thickness for the at least one intermediate buffer layer ranges from 0.8 microns to 1.0 microns.

9. The wire grid polarizer of claim 1 , wherein in the first arrangement,
the plurality of first wire grid reflection strips is formed only by a first wire grid reflection material, and the plurality of reflection grid strips in the plurality of second wire grid reflection strips is formed only by a second wire grid reflection material; or
the plurality of first wire grid reflection strip each comprises a first wire grid reflection material strip and a first mask photoresist strip overlaid on a side of the first wire grid reflection material strip away from the substrate, and the plurality of reflection grid strips in the plurality of second wire grid reflection strips each comprises a second wire grid reflection material strip and a second mask photoresist strip overlaid on a side of the second wire grid reflection material strip away from the substrate.

10. A wire grid polarizer, wherein the wire grid polarizer comprises:
a substrate;
a first wire grid, formed on the substrate, the first wire grid comprises a plurality of first wire grid reflection strips arranged parallel to each other and at equal intervals; and
a second wire grid, formed at a side of the first wire grid away from the substrate, the second wire grid comprises a plurality of second wire grid reflection strips arranged in parallel to each other and at equal intervals;
wherein the plurality of second wire grid reflection strips is in one-to-one correspondence with the plurality of first wire grid reflection strips, an orthographic projection of each of the plurality of second wire grid reflection strips onto the substrate falls within an orthographic projection of a corresponding one of the plurality of first wire grid reflection strips onto the substrate, and the second wire grid is in direct contact with the first wire grid;
wherein each of the plurality of first wire grid reflection strips comprises a first wire grid reflection material strip and a first mask photoresist strip overlaid on a side of the first wire grid reflection material strip away from the substrate; the plurality of second wire grid reflection strips each comprises a second wire grid reflection material strip and a second mask photoresist strip overlaid on a side of the second wire grid reflection material strip away from the substrate.

11. The wire grid polarizer of claim 10 , wherein the wire grid

Assignees

• Boe Technology Group Co Ltd

Inventors

• Zhang Xiao
• Liu Yongxing
• Han Jiahui
• Huang Hua
• Guo Kang
• Gu Xin

Classifications

• G02B5/3058

  comprising electrically conductive elements, e.g. wire grids, conductive particles · CPC title

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• G02F1/1335

  Structural association of cells with optical devices, e.g. polarisers or reflectors · CPC title

• G03F7/00

  Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P76/00, H05K) · CPC title

• G03F7/0007 Primary

  Filters, e.g. additive colour filters; Components for display devices · CPC title