Device maintenance in semiconductor manufacturing environment

Patent metadata

Field	Value
Publication number	US-12246404-B2
Application number	US-202318517239-A
Country	US
Kind code	B2
Filing date	Nov 22, 2023
Priority date	May 17, 2019
Publication date	Mar 11, 2025
Grant date	Mar 11, 2025

Abstract

A system for maintaining a device in a semiconductor manufacturing environment that includes a controller configured to determine a distance travelled by the device within the semiconductor manufacturing environment, where the device has a feature that selectively engages a carrier configured to carry a semiconductor wafer such that the device moves the semiconductor wafer to different processing stations within the semiconductor manufacturing environment. The system also includes an inspection component configured to inspect the device responsive to the distance travelled by the device exceeding a distance threshold, a repair component configured to repair the device responsive to a repair indication from at least one of the controller or the inspection component, and a cleaning component configured to clean the device responsive to a clean indication from at least one of the controller or the inspection component.

First claim

What is claimed is:

1. A system, comprising:
a carrier configured to carry a semiconductor wafer;
a device configured to selectively engage the carrier;
a track configured to receive the device, wherein the track extends between a first processing station and a second processing station within a semiconductor manufacturing environment to enable transport of the semiconductor wafer, via the carrier engaged with the device, between the first processing station and the second processing station;
a controller configured to determine a distance traveled by the device along the track;
a sidetrack coupled to the track;
a first transfer component, in communication with the controller, and configured to transfer the device from the track to the sidetrack responsive to the controller indicating that the distance traveled by the device exceeds a distance threshold; and
a repair component disposed along the sidetrack and configured to repair the device upon the device being transferred from the track to the sidetrack.

2. The system of claim 1 , comprising:
an inspection component disposed along the sidetrack and configured to inspect the device upon the device being transferred from the track to the sidetrack prior to the device being repaired.

3. The system of claim 1 , comprising:
a cleaning component disposed along the sidetrack and configured to clean the device, wherein the cleaning component comprises a lift mechanism configured to move the device in a direction perpendicular to a pathway of the sidetrack.

4. The system of claim 3 , wherein the sidetrack comprises a first section coupled to the lift mechanism and detachable from a second section of the sidetrack.

5. The system of claim 1 , comprising a second transfer component configured to transfer the device from the sidetrack to the track.

6. The system of claim 5 , wherein the repair component is between the first transfer component and the second transfer component along a pathway of the sidetrack.

7. The system of claim 1 , comprising:
a sensor coupled to at least one of the device or the track; and
an identifier coupled to at least one of the device or the track, wherein the controller is configured to determine the distance traveled by the device based upon a sensing of the identifier by the sensor.

8. The system of claim 1 , wherein the device comprises an odometer and the controller is configured to determine the distance traveled by the device based upon the odometer.

9. The system of claim 1 , comprising:
an inspection component configured to inspect cleanliness of the device, wherein the cleanliness of the device corresponds to at least one of:
a size of a particle on the device; or
a number of particles on the device.

10. The system of claim 1 , comprising:
an inspection component configured to inspect wear of the device, wherein the wear of the device corresponds to at least one of:
a diameter of a wheel of the device;
a depth of a crack in the wheel of the device;
a width of the crack in the wheel of the device; or
a flatness of a feature of the device that selectively engages the carrier.

11. The system of claim 10 , wherein the inspection component is configured to at least one of:
utilize image recognition to determine at least one of the depth or the width;
utilize a laser to determine the diameter; or
utilize a contact sensor to determine the flatness.

12. The system of claim 1 , wherein the repair component comprises a wheel replacement tool comprising a tool arm configured to replace a wheel of the device.

13. The system of claim 1 , wherein the repair component comprises a circuit card replacement tool comprising a tool arm configured to replace a circuit card of the device.

14. The system of claim 1 , wherein the repair component comprises a fluid insertion tool comprising a dispensing arm configured to dispense at least one of a gas or a liquid to the device.

15. A system, comprising:
a carrier configured to carry a semiconductor wafer;
a device configured to selectively engage the carrier;
a track configured to receive the device, wherein the track extends between a first processing station and a second processing station within a semiconductor manufacturing environment to enable transport of the semiconductor wafer, via the carrier engaged with the device, between the first processing station and the second processing station;
a controller configured to determine a distance traveled by the device along the track;
a sidetrack coupled to the track;
a first transfer component, in communication with the controller, and configured to transfer the device from the track to the sidetrack responsive to the controller indicating that the distance traveled by the device exceeds a distance threshold; and
a repair component disposed along the sidetrack and configured to repair the device upon the device being transferred from the track to the sidetrack responsive to a repair indication generated after an inspection of the device.

16. The system of claim 15 , wherein the repair component is configured to at least one of:
replace a wheel of the device,
replace a circuit card of the device, or
dispense at least one of a gas or a liquid to the device.

17. The system of claim 15 , wherein the sidetrack comprises a first section coupled to a lift mechanism and detachable from a second section of the sidetrack.

18. A system, comprising:
a carrier configured to carry a semiconductor wafer;
a device configured to selectively engage the carrier;
a track configured to receive the device, wherein the track extends between a first processing station and a second processing station within a semiconductor manufacturing environment to enable transport of the semiconductor wafer, via the carrier engaged with the device, between the first processing station and the second processing station;
a controller configured to determine a distance traveled by the device along the track;
a sidetrack coupled to the track;
a first transfer component, in communication with the controller, and configured to transfer the device from the track to the sidetrack responsive to the controller indicating that the distance traveled by the device exceeds a distance threshold; and
a repair component disposed along the sidetrack and configured to repair the device upon the device being transferred from the track to the sidetrack, wherein the repair component is configured to at least one of:
replace a wheel of the device,
replace a circuit card of the device, or
dispense at least one of a gas or a liquid to the device.

19. The system of claim 18 , comprising:
an inspection component disposed along the sidetrack and configured to inspect the device upon the device being transferred from the track to the sidetrack prior to the device being repaired.

20. The system of claim 18 , comprising:
a cleaning component disposed along the sidetrack and configured to clean the device, wherein the cleaning component comprises a lift mechanism configured to move the device in a direction perpendicular to a pathway of the sidetrack.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Chien Vincent
• Yi-Cheng Shih
• Liao Hill

Classifications

• H10P72/3304

  characterised by movements or sequence of movements of transfer devices · CPC title

• H10P72/3214

  by means of a cart or a vehicle · CPC title

• H10P72/0451

  Apparatus for manufacturing or treating in a plurality of work-stations · CPC title

• H10P72/32 Primary

  between different workstations · CPC title

• H10P72/0612

  Production flow monitoring, e.g. for increasing throughput · CPC title