Sealing article comprising metal coating, method of making and method of using the same

Patent metadata

Field	Value
Publication number	US-12227839-B2
Application number	US-202318513448-A
Country	US
Kind code	B2
Filing date	Nov 17, 2023
Priority date	Sep 28, 2017
Publication date	Feb 18, 2025
Grant date	Feb 18, 2025

Abstract

A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.

First claim

What is claimed is:

1. A method of using a sealing article, comprising step of:
installing the sealing article in a semiconductor processing chamber,
wherein the sealing article comprises a body comprising a polymeric elastomer, and a coating layer disposed on a top surface of the body, the coating layer comprising at least one metal, and wherein the body has a whole cross-section in a semi-circular or semi-elliptical shape, the top surface of the body is a flat surface, and the coating layer is a layer disposed on the flat surface of the body only.

2. The method of claim 1 , further comprising providing ultra violet (UV) light from a radiation source disposed on a top portion of the semiconductor processing chamber, wherein the top surface of the body with the coating layer faces upward toward the radiation source.

3. The method of claim 1 , further comprising providing plasma to the semiconductor processing chamber, and heating the semiconductor processing chamber to an elevated temperature.

4. The method of claim 1 , wherein the coating layer is made of aluminum and has a thickness in a range of from 10 micrometers to about 10,000 micrometers.

5. The method of claim 1 , wherein the polymeric elastomer in the body is selected from the group consisting of perfluoroelastomer, fluoroelastomer and combinations thereof.

6. The method of claim 1 , wherein the body is provided by molding and curing a polymeric elastomer.

7. The method of claim 1 , wherein the at least one metal in the coating layer is selected from the group consisting of aluminum, copper, gold, silver, and combinations thereof.

8. The method of claim 1 , wherein the coating layer is formed using a process selected from the group consisting of sputtering, electroplating, plastic plating and electroless plating.

9. The method of claim 1 , wherein the body defines pores on the flat surface.

10. The method of claim 9 , wherein the at least one metal penetrates into the pores.

11. A method of using a sealing article, comprising:
installing the sealing article in a semiconductor processing chamber,
wherein the sealing article comprises a body comprising a polymeric elastomer, and a coating layer disposed on at least one surface of the body, the coating layer comprising at least one metal,
wherein the polymeric elastomer comprises perfluoroelastomer (FFKM),
wherein the body has a whole cross-section in a semi-circular or semi-elliptical shape, the top surface of the body is a flat surface, and the coating layer is a layer disposed on the flat surface of the body only, and
wherein the coating layer on the top surface of the body is configured to face toward radiation in a semiconductor processing chamber and reflect or absorb the radiation.

12. The method of claim 11 , wherein the polymeric elastomer further comprises a fluoroelastomer.

13. The method of claim 11 , wherein the at least one metal in the coating layer is selected from the group consisting of aluminum, copper, gold, silver, and combinations thereof.

14. The method of claim 11 , wherein:
the coating layer is made of aluminum; and
the body defines pores on the flat surface, and the at least one metal penetrates into the pores.

15. The method of claim 11 , wherein the coating layer has a thickness in a range of from 10 micrometers to about 10,000 micrometers.

16. A method of using a sealing article, comprising:
installing the sealing article in a semiconductor processing chamber,
wherein the sealing article comprises a body comprising a polymeric elastomer, and a coating layer disposed on at least one surface of the body, the coating layer comprising at least one metal,
wherein the polymeric elastomer comprises perfluoroelastomer (FFKM), and wherein the FFKM comprises a copolymer,
wherein the body has a whole cross-section in a semi-circular or semi-elliptical shape, the top surface of the body is a flat surface, and the coating layer is a layer disposed on the flat surface of the body only,
wherein the body defines pores on the flat surface, and the at least one metal penetrates into the pores, and
wherein the coating layer on the top surface of the body is configured to face toward radiation in a semiconductor processing chamber and reflect or absorb the radiation.

17. The method of claim 16 , wherein the copolymer comprises perfluoro (alkyl vinyl ether), tetrafluoroethylene, and a cure site monomer.

18. The method of claim 16 , wherein the polymeric elastomer further comprises fluoroelastomer.

19. The method of claim 16 , wherein the at least one metal in the coating layer is selected from the group consisting of aluminum, copper, gold, silver, and combinations thereof.

20. The method of claim 16 , wherein the coating layer has a thickness in a range of from 10 micrometers to about 10,000 micrometers.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Hong Peng-Cheng
• Pu jun-liang
• Hsu W L
• Kao Chung-Hao
• Hung Chia-Chun
• Wu Cheng-Yi
• Lee Chin-Szu

Classifications

• C23C18/2086

  with use of organic or inorganic compounds other than metals, first · CPC title

• C23C18/30

  Activating {or accelerating or sensitising with palladium or other noble metal} · CPC title

• C23C18/24

  using acid aqueous solutions · CPC title

• C23C18/285

  Sensitising or activating with tin based compound or composition · CPC title

• C23C14/205

  by cathodic sputtering · CPC title