Magnetic-field-assisted plasma coating system

Patent metadata

Field	Value
Publication number	US-12224165-B2
Application number	US-202318113703-A
Country	US
Kind code	B2
Filing date	Feb 24, 2023
Priority date	Dec 6, 2019
Publication date	Feb 11, 2025
Grant date	Feb 11, 2025

Abstract

A magnetic-field-assisted plasma coating system and method are provided. In another aspect, a coating system employs a cathode with a linearly moveable magnetic field. A further aspect employs a workpiece as an anode within which is located an elongated cathode which internally coats a bore of the workpiece. Still another aspect of the present system and method employs an elongated and hollow cathode with at least one magnetic source therein. In yet another aspect, end caps or plates seal against one or more open ends of a workpiece bore to be coated, with a cathode inserted into the bore and a vacuum being created within the bore such that the workpiece itself defines at least a portion of a vacuum chamber.

First claim

The invention claimed is:

1. A method for coating a workpiece, the method comprising:
(a) inserting an elongated cathode inside an elongated internal bore of the workpiece;
(b) sealing at least one open end of the bore, such that the workpiece itself defines a portion of a vacuum chamber;
(c) creating a vacuum in the vacuum chamber between the workpiece and the cathode;
(d) emitting a process gas into the vacuum chamber;
(e) generating an arc in a plasma between the cathode and the workpiece, the workpiece acting as an anode;
(f) ionizing the gas in the vacuum chamber while depositing an ionic ta-C plasma arc deposition coating on the internal bore of the workpiece within a magnetic field;
(g) longitudinally spacing apart at least two electromagnets and locating the electromagnets within a hollow interior of the cathode;
(h) a programmable controller and an electrical circuit being connected to the electromagnets;
(i) moving the magnetic field within the vacuum chamber to assist in linearly and rotationally moving the arc relative to the workpiece, the arc spanning between the cathode and the internal bore of the workpiece;
(j) sequentially energizing and de-energizing the at least two electromagnets to sequentially energize and de-energize the electromagnetic field in corresponding locations;
(k) causing the arc and coating ions to linearly follow the magnetic field locations without movement of the cathode, the electromagnets or the workpiece during the depositing;
(l) a complete coating cycle from when vacuum pressure is started to when vacuum pressure ends, is no greater than five minutes; and
(m) exposing an exterior of the workpiece to ambient air during the coating cycle.

2. The method of claim 1 , further comprising:
causing the workpiece to be stationary when the magnetic field passes between the cathode and the workpiece; and
only placing a single and stationary cathode within the internal bore of the workpiece when the magnetic field passes between the cathode and the workpiece.

3. The method of claim 1 , further comprising:
removably locating an end cap over the internal bore, the end cap defining part of the vacuum chamber, and the vacuum chamber being entirely within the internal bore inside the workpiece; and
sealing the end cap to an open edge of the workpiece within which is the internal bore, the edge being of substantially a same thickness as a wall of the workpiece which surrounds at least a majority of the cathode.

4. The method of claim 1 , further comprising:
retaining a magnet holder to a distal end of a shaft;
electrically isolating the magnet holder from the cathode; and
longitudinally and rotationally moving the magnet holder with an automated actuator controlled by the programmable controller.

5. The method of claim 1 , further comprising:
causing a magnetic force at an outer surface of the cathode to be 1-20 milliteslas.

6. The method of claim 1 , wherein:
the outer surface of the elongated cathode includes graphite.

7. The method of claim 1 , further comprising the programmable controller controlling the arc, a vacuum pump, a relief valve, a seal-actuator and a cathode-movement actuator.

8. The method of claim 1 , wherein coating the internal bore of the workpiece includes depositing the coating on an internal piston cylinder of a metallic automotive vehicle engine block, and the cathode is a cool-cathode of less than 120° C. at an outer surface thereof to avoid the use of cooling fluid during the coating.

9. The method of claim 1 , wherein the workpiece is a metallic tube or pipe which is at least three meters long and configured for transporting corrosive or abrasive liquids or slurries.

10. The method of claim 1 , further comprising inflating a bulb seal to seal an endcap to the workpiece, a centerline of the cathode intersecting the endcap, and the endcap enclosing an adjacent end of the internal bore.

11. A method for coating a workpiece, the method comprising:
(a) locating a cathode inside an internal bore of the workpiece;
(b) covering an open end of the bore by removably contacting the workpiece with an endcap, such that a vacuum chamber is defined at least in part by the bore and the endcap;
(c) creating a vacuum in the vacuum chamber while exposing an exterior of the workpiece to ambient air;
(d) generating an arc in a plasma between the cathode and the workpiece;
(e) causing the workpiece to be an anode;
(f) depositing an ionic coating on a cylindrical surface defining the internal bore by plasma arc deposition coating;
(g) moving a magnetic field within the bore to cause the arc to move relative to the workpiece, the arc spanning between the cathode and the internal bore of the workpiece;
(h) longitudinally spacing apart at least two electromagnets and locating the electromagnets within a hollow interior of the cathode;
(i) connecting a programmable controller and an electrical circuit to the electromagnets;
(j) sequentially energizing and de-energizing the at least two electromagnets to sequentially energize and de-energize the electromagnetic fields in corresponding locations; and
(k) causing the arc and coating ions to linearly follow the magnetic field locations without movement of the cathode, the electromagnets or the workpiece during the depositing.

12. The method of claim 11 , further comprising:
causing the workpiece to be stationary when the magnetic field passes between the cathode and the workpiece;
the depositing causing the coating to have an ion impact energy of at least 10 eV against the workpiece;
locating an exterior surface of the cathode 2-5 cm away from an inner surface of the bore; and
the depositing of the ionic coating including depositing an ionic ta-C coating on the bore surface in an outwardly extending fan-like side view shape.

13. The method of claim 11 , further comprising sealing the end cap to an open edge of the workpiece within which is the internal bore, the edge being of substantially a same thickness as a wall of the workpiece which surrounds at least a majority of the cathode, and a longitudinal length of the cathode is greater than a lateral diameter of the cathode.

14. The method of claim 11 , further comprising:
retaining a magnet holder to an elongated shaft;
electrically isolating the magnet holder from the cathode.

15. The method of claim 11 , further comprising:
locating more than two of the electromagnets within a hollow interior of the cathode, all of the electromagnets being longitudinally arranged relative to each other; and
causing a magnetic force at an outer surface of the cathode to be 1-20 milliteslas.

16. The method of claim 11 , further comprising the programmable controller controlling the arc, a vacuum pump, a relief valve, a seal-actuator and a cathode-movement actuator.

17. The method of claim 11 , wherein the workpiece is an internal piston cylinder, and the cathode is less than 120° C. at an outer surface thereof without the use of cooling fluid during the depositing.

18. The method of claim 11 , wherein the workpiece is a metallic tube or pipe which is at least three meters long and configured for transporting corrosive or abrasive liquids or slurries.

19. The method of claim 11 , further comprising inflating a bulb seal to seal the endcap to the workpiece, subsequently creating the vacuum within the sealed bore, and thereafter performing the depositing in the sealed bore.

20. A method for coating a workpiece, the method comprising:
(a) inserting a ca

Assignees

• Univ Michigan State
• Franhofer USA
• Fraunhofer Usa

Inventors

• Schuelke Thomas
• Becker Michael
• Haubold Lars
• Fan Qi Hua

Classifications

• C23C14/35

  by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title

• C23C14/046

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title

• F02F2200/00

  Manufacturing · CPC title

• F02F1/00

  Cylinders; Cylinder heads · CPC title

• C23C14/325

  Electric arc evaporation · CPC title