Optically-finished thin diamond substrate or window of high aspect ratio and a method of production thereof

Patent metadata

Field	Value
Publication number	US-12209306-B2
Application number	US-202318172668-A
Country	US
Kind code	B2
Filing date	Feb 22, 2023
Priority date	Apr 16, 2015
Publication date	Jan 28, 2025
Grant date	Jan 28, 2025

Abstract

In a method of forming a diamond film, substrate, or window, a substrate is provided and the diamond film, substrate, or window is CVD grown on a surface of the substrate. The grown diamond film, substrate, or window has a thickness between 150-999 microns and an aspect ratio≥100, wherein the aspect ratio is a ratio of a largest dimension of the diamond film, substrate or window divided by a thickness of the diamond film. The substrate can optionally be removed or separated from the grown diamond film, substrate, or window.

First claim

The invention claimed is:

1. A composite substrate comprising: a diamond film CVD grown on a substrate to form a composite substrate, the substrate having a polished surface and a thickness>2 mm, the diamond film having a thickness≥150 microns and a diameter≥50 mm, wherein the diamond film has an aspect ratio≥100, wherein the polished surface of the substrate has an optical finish having a surface roughness (Ra)<10 nm,
wherein the diamond film has a nucleation side surface connected to the polished surface of the substrate and the diamond film has a growth side surface opposite the nucleation side surface, and the nucleation side surface has an optical finish having surface roughness (Ra)<50 nm when connected to the substrate, and the growth side surface has an optical finish having a surface roughness (Ra)≤20 nm.

2. The composite substrate of claim 1 , wherein the substrate has a thickness>10 mm.

3. The composite substrate of claim 2 , wherein for an Ra of the polished surface of the substrate<10 nm, the Ra of the nucleation side of the diamond film is <20 nm.

4. The composite substrate of claim 1 , wherein a side of the diamond film that is connected to the polished surface of the substrate has a surface roughness (Ra)<50 nm.

5. The composite substrate of claim 1 , wherein the polished surface of the substrate and a nucleation side of the diamond film are non-planar, and a shape of the nucleation side of the diamond film is a conformal negative of the shape of the polished surface of the substrate.

6. The composite substrate of claim 1 , wherein a shape of a nucleation side of the diamond film includes at least one of a dome, a cone, a pyramid, a sphere, a parabola, and a hyperbola.

7. The composite substrate of claim 1 , wherein the substrate has been removed from the diamond film.

8. The composite substrate of claim 1 , wherein a growth side of the diamond film has a greater thermal conductivity than a nucleation side of the diamond film, substrate, or window.

9. The composite substrate of claim 1 , further comprising at least one of the following: a light management coating on a growth surface of the diamond film, substrate, or window; and a light management coating on a nucleation side of the diamond film, substrate, or window.

10. The composite substrate of claim 1 , wherein the substrate comprises one or more pieces.

11. The composite substrate of claim 1 , wherein the diamond film is CVD grown in an atmosphere that includes at least one of the following: oxygen, carbon monoxide, carbon dioxide, nitrogen, and boron.

12. The composite substrate of claim 1 , wherein the diamond film includes diamond particle seeds.

13. The composite substrate of claim 1 , wherein a largest dimension of the substrate is ≥30 mm.

14. The composite substrate of claim 1 , wherein a largest dimension of the substrate is a diameter of the substrate.

15. The composite substrate of claim 1 , wherein the diamond film has a 1.06 micron light scattering coefficient, measured at a distance of 34 cm from a blocking lens, of ≤20/cm.

Assignees

• Ii Vi Delaware Inc

Inventors

• Xu Wen-Qing
• Anderson Thomas E
• Barbarossa Giovanni
• Eissler Elgin E
• Liu Chao
• Tanner Charles D

Classifications

• C23C16/511

  using microwave discharges · CPC title

• Y10T428/30

  Self-sustaining carbon mass or layer with impregnant or other layer · CPC title

• C23C16/56

  After-treatment · CPC title

• C23C16/01

  on temporary substrates, e.g. substrates subsequently removed by etching · CPC title

• C23C16/02

  Pretreatment of the material to be coated (C23C16/04 takes precedence) · CPC title