System for determining optical probe location relative to a photonic integrated circuit

Patent metadata

Field	Value
Publication number	US-12203739-B2
Application number	US-202117538573-A
Country	US
Kind code	B2
Filing date	Nov 30, 2021
Priority date	Mar 17, 2021
Publication date	Jan 21, 2025
Grant date	Jan 21, 2025

Abstract

A system for determining optical probe location relative to a photonic integrated circuit (PIC) is described. A diffractive optical element (DOE) disposed in the PIC, and has a focal point of absolute maximum reflection at location having coordinates in three-dimensions above the PIC. The system includes an optical waveguide probe, and an optical source adapted to provide light through the optical waveguide probe and incident on the DOE. The DOE reflects and focuses light back to the optical waveguide probe, and a power meter is adapted to receive at least a portion of the light reflected and focused at the focal point above the PIC. Based on the determination of a location of the absolute maximum reflection, consistent and reliable testing of PIC can be achieved.

First claim

The invention claimed is:

1. A system for determining optical probe location relative to a photonic integrated circuit (PIC), comprising:
a diffractive optical element (DOE) disposed in the PIC, the DOE having a focal point of absolute maximum reflection at location having coordinates in three-dimensions above the PIC;
an optical waveguide probe;
an optical source adapted to provide light through the optical waveguide probe and incident on the DOE, wherein the DOE reflects and focuses light back to the optical waveguide probe;
a power meter adapted to receive at least a portion of the light reflected and focused at the focal point of maximum above the PIC;
a motorized positioner adapted to move in optical waveguide probe in the three-dimensions above the PIC; and
a controller comprising a processor and a memory that stores instructions, which when executed by the processor, causes the processor to: control the motorized positioner to: move the optical waveguide probe in a first plane to locate a first maximum reflection in the first plane; move the optical waveguide probe to a second plane, and move the optical waveguide probe in the second plane to locate a second maximum reflection in the second plane; move the optical waveguide probe to other planes until the absolute maximum reflection is located.

2. The system of claim 1 , wherein the instructions, when executed by the processor, cause the processor to estimate a beam angle of the optical waveguide probe with respect to the DOE based on a line between the first and second maximum reflections, and movement of the optical waveguide probe is along the line to locate the absolute maximum reflection in a third plane, wherein the location of the absolute maximum reflection is a reference point in three dimensions.

3. The system of claim 2 , wherein the instructions, when executed by the processor further cause the motorized positioner to: move the optical waveguide probe in the third plane to locate the location of the absolute maximum reflection.

4. The system of claim 2 , wherein the instructions, when executed by the processor further cause the motorized positioner to:
adjust a height of the optical waveguide probe between the first maximum reflection and the second maximum reflection and move the optical waveguide probe in a fourth plane to locate a fourth maximum reflection in the fourth plane.

5. The system of claim 4 , wherein the instructions, when executed by the processor further cause the motorized positioner to:
adjust the height the optical waveguide probe along the line between the first maximum reflection and the second maximum reflection to a fifth plane and move the optical waveguide probe in the fifth plane to locate a fifth maximum reflection.

6. The system of claim 5 , wherein the instructions, when executed by the processor further cause the motorized positioner to: determine a beam angle from the locations of the fourth maximum reflection and the fifth maximum reflection.

7. The system of claim 1 , wherein the DOE is not a linear diffraction grating.

8. The system of claim 1 , wherein the optical waveguide probe does not contact a surface of the PIC.

9. The system of claim 2 , wherein the location of the maximum reflection is insensitive to an angle of the optical waveguide probe.

10. A non-transitory computer readable medium that stores instructions for a system comprising: a photonic integrated circuit (PIC), comprising: a diffractive optical element (DOE) disposed in the PIC, the DOE having a focal point of absolute maximum reflection at location having coordinates in three-dimensions above the PIC; an optical waveguide probe; and an optical source adapted to provide light through the optical waveguide probe and incident on the DOE at a beam angle, wherein the DOE reflects and focuses light back to the optical waveguide probe, wherein the instructions, when executed by a processor, cause the processor to:
control a motorized positioner to: move an optical waveguide probe in a first plane to locate a first maximum reflection of a DOE in the first plane; move the optical waveguide probe to a second plane, and move the optical waveguide probe in the second plane to locate a second maximum reflection of the DOE in the second plane; and estimate a beam angle based on the first reflection maximum.

11. The non-transitory computer readable medium of claim 10 , wherein the instructions, when executed by the processor further cause the processor to control the motorized positioner to move the optical waveguide probe along a line between the first maximum reflection and the second maximum reflection to locate the absolute maximum reflection in a third plane, wherein a location of the absolute maximum reflection is a reference point in three dimensions.

12. The non-transitory computer readable medium of claim 10 , wherein the instructions, when executed by the processor further cause the motorized positioner to: move the optical waveguide probe in a third plane to locate the absolute maximum reflection.

13. The non-transitory computer readable medium of claim 10 , wherein the instructions, when executed by the processor further cause the motorized positioner to:
adjust a height of the optical waveguide probe along a line between the first maximum reflection and the second maximum reflection and move the optical waveguide probe in a fourth plane to locate a fourth maximum reflection in the fourth plane.

14. The non-transitory computer readable medium of claim 13 , wherein the instructions, when executed by the processor further cause the motorized positioner to:
adjust the height the optical waveguide probe along the line between the first maximum reflection and the second maximum reflection to a fifth plane and move the optical waveguide probe in the fifth plane to locate a fifth maximum reflection.

15. The non-transitory computer readable medium of claim 14 , wherein the instructions, when executed by the processor further cause the motorized positioner to: determine a beam angle from locations of the fourth maximum reflection and the fifth maximum.

16. The non-transitory computer readable medium of claim 11 , wherein the first, second and third maximum reflections are not from a linear diffraction grating.

17. The non-transitory computer readable medium of claim 10 , wherein a location of the absolute maximum reflection is insensitive to an angle of the optical waveguide probe.

18. A method of determining location of an optical waveguide probe relative to a photonic integrated circuit (PIC) comprising a diffractive optical element (DOE) disposed in the PIC, the DOE being a focusing optical element and having a focal point of absolute maximum reflection at location having coordinates in three-dimensions above the PIC, the method comprising:
moving the optical waveguide probe in a first plane to locate a first maximum reflection in the first plane;
moving the optical waveguide probe to a second plane, and moving the optical waveguide probe in the second plane to locate a second maximum reflection in the second plane; and
estimating a beam angle of the optical waveguide probe with respect to the DOE based on the first reflection maximum.

19. The method of claim 18 , further comprising:
moving the optical waveguide probe along a line between the first maximum reflection and the second maximum reflection to locate the absolute maximum reflection in a third plane, wherein the location of the absolute maximum reflection is a reference point in three dimensions.

Assignees

• Keysight Technologies Inc

Inventors

• Coleman Christopher
• Scott Ryan

Classifications

• G02B27/4233

  having a diffractive element [DOE] contributing to a non-imaging application (diffusers having a diffractive element G02B5/0252; filters having a diffractive element G02B5/203; systems for controlling the direction of light having diffractive elements G02B26/0808; scanning systems having diffractive elements G02B26/106; beam shaping systems using diffractive optical elements G02B27/0944; beam splitting or combining systems operating by diffraction G02B27/1086) · CPC title

• G01B11/0608

  Height gauges · CPC title

• G01B11/005 Primary

  coordinate measuring machines · CPC title

• G02B27/4255 Primary

  for alignment or positioning purposes (optical displacement encoding scales G01D5/347) · CPC title