Driving signal parameter variation for driving MEMS mirrors for synchronization control and tuning Lissajous scanning

Patent metadata

Field	Value
Publication number	US-12196950-B2
Application number	US-202117220149-A
Country	US
Kind code	B2
Filing date	Apr 1, 2021
Priority date	Apr 1, 2021
Publication date	Jan 14, 2025
Grant date	Jan 14, 2025

Abstract

A method of Lissajous scanning includes driving a first oscillator structure about a first rotation axis at a first resonance frequency according to a first driving signal, and driving a second oscillator structure about a second rotation axis at a second resonance frequency according to second driving signal different from the first resonance frequency. The first driving signal has a first low level, a first high level, and a first duty cycle, the combination of which produces the first resonance frequency, and the second driving signal has a second low level, a second high level, and a second duty cycle, the combination of which produces the second resonance frequency. At least one of the second low level, the second high level, and the second duty cycle is different from the first low level, the first high level, and the first duty cycle, respectively.

First claim

What is claimed is:

1. A Lissajous scanning system, comprising:
a first oscillator structure configured to oscillate about a first rotation axis;
a second oscillator structure configured to oscillate about a second rotation axis;
a first driver circuit configured to generate a first driving signal to drive the first oscillator structure about the first rotation axis at a first resonance frequency, wherein the first driving signal is a waveform having a first low signal level, a first high signal level, and a first duty cycle, the combination of which produces the first resonance frequency;
a second driver circuit configured to generate a second driving signal to drive the second oscillator structure about the second rotation axis at a second resonance frequency different from the first resonance frequency, wherein the second driving signal is a waveform having a second low signal level, a second high signal level, and a second duty cycle, the combination of which produces the second resonance frequency,
wherein at least one of the second low signal level, the second high signal level, and the second duty cycle is different from the first low signal level, the first high signal level, and the first duty cycle, respectively; and
a controller configured to control the first low signal level, the first high signal level, the first duty cycle, the second low signal level, the second high signal level, and the second duty cycle to maintain a first target frequency difference between the first resonance frequency and the second resonance frequency.

2. The Lissajous scanning system of claim 1 , wherein the controller is configured to control the first driving signal and the second driving signal in order to synchronize the first and the second oscillator structures and to generate a Lissajous scanning pattern according to a predefined frame rate.

3. The Lissajous scanning system of claim 1 , wherein the controller is configured to control the first low signal level and the second low signal level to be different to maintain the first target frequency difference.

4. The Lissajous scanning system of claim 1 , wherein the controller is configured to control the first high signal level and the second high signal level to be different to maintain the first target frequency difference.

5. The Lissajous scanning system of claim 1 , wherein the controller is configured to control the first duty cycle and the second duty cycle to be different to maintain the first target frequency difference.

6. The Lissajous scanning system of claim 1 , wherein the controller is configured to modulate at least one of the first duty cycle or the second duty cycle to maintain a zero phase difference between an oscillation of the first oscillator structure and an oscillation of the second oscillator structure.

7. The Lissajous scanning system of claim 1 , wherein:
the first driver circuit is configured to generate a third driving signal to drive the first oscillator structure about the first rotation axis at a first startup frequency that is different than the first resonance frequency, wherein the third driving signal is a waveform having a third low signal level, a third high signal level, and a third duty cycle, the combination of which produces the first startup frequency,
at least one of the third low signal level, the third high signal level, or the third duty cycle is different than at least one of the first low signal level, the first high signal level, or the first duty cycle, respectively, and
the controller is configured to control the first driver circuit to generate the third driving signal during a startup operation of the first oscillator structure and to shift to generating the first driving signal during a resonance operation of the first oscillator structure after completion of the startup operation.

8. The Lissajous scanning system of claim 7 , wherein:
the second driver circuit configured to generate a fourth driving signal to drive the second oscillator structure about the second rotation axis at a second startup frequency that is different than the second resonance frequency, wherein the fourth driving signal is a waveform having a fourth low signal level, a fourth high signal level, and a fourth duty cycle, the combination of which produces the second startup frequency,
at least one of the fourth low signal level, the fourth high signal level, or the fourth duty cycle is different than at least one of the second low signal level, the second high signal level, or the second duty cycle, respectively, and
the controller is configured to control the second driver circuit to generate the fourth driving signal during a startup operation of the second oscillator structure and to shift to generating the second driving signal during a resonance operation of the second oscillator structure after completion of the startup operation.

9. The Lissajous scanning system of claim 1 , further comprising:
a phase detection circuit configured to measure a phase of the first oscillator structure and a phase of the second oscillator structure,
wherein the controller is configured to modulate at least one of the first low signal level, the first high signal level, or the first duty cycle of the first driving signal based on the phase of the first oscillator structure and the phase of the second oscillator structure in order to maintain a zero phase difference therebetween.

10. The Lissajous scanning system of claim 1 , further comprising:
a deflection angle detection circuit configured to measure a maximum deflection angle of the first oscillator structure and a maximum deflection angle of the second oscillator structure during a resonance operation of the first and the second oscillator structures,
wherein the at least one-controller is configured to modulate at least one of the first low signal level, the first high signal level, or the first duty cycle of the first driving signal based on the maximum deflection angle of the first oscillator structure and the maximum deflection angle of the second oscillator structure in order to maintain a zero maximum deflection angle difference therebetween.

11. The Lissajous scanning system of claim 10 , wherein the controller is configured to modulate the at least one of the first low signal level, the first high signal level, or the first duty cycle of the first driving signal in order to maintain the zero maximum deflection angle difference therebetween, while further maintaining the first target frequency difference between the first resonance frequency and the second resonance frequency.

12. The Lissajous scanning system of claim 1 , wherein:
the first driver circuit is configured to generate a third driving signal to drive the first oscillator structure about the first rotation axis at a third resonance frequency that is different from the first resonance frequency, wherein the third driving signal is a waveform having a third low signal level, a third high signal level, and a third duty cycle, the combination of which produces the third resonance frequency,
at least one of the third low signal level, the third high signal level, or the third duty cycle is different from at least one of the first low signal level, the first high signal level, and the first duty cycle, respectively,
the controller is configured to control the first driver circuit to switch from the first driving signal to the third driving signal to change a density of a Lissajous scanning pattern during a resonance operation of the first oscillator structure.

13. The Lissajous scanning system of claim 12 , wherein:
the second driver circuit configured to generate a

Assignees

• Infineon Technologies Ag

Inventors

• Yoo Han Woong
• Albert Stephan Gerhard
• Brunner David
• Druml Norbert
• Karic Selma
• Niedermueller Leonhard
• Schitter Georg
• Schroedter Richard

Classifications

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G02B26/085

  the reflecting means being moved or deformed by electromagnetic means · CPC title

• G02B26/0841

  the reflecting element being moved or deformed by electrostatic means · CPC title

• G02B26/101 Primary

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title