Synchronization of microelectromechanical system (MEMS) mirrors

Patent metadata

Field	Value
Publication number	US-11307403-B2
Application number	US-201916376544-A
Country	US
Kind code	B2
Filing date	Apr 5, 2019
Priority date	Apr 5, 2019
Publication date	Apr 19, 2022
Grant date	Apr 19, 2022

Abstract

A multi-mirror system includes a first mirror configured to oscillate about a first axis; a second mirror configured to oscillate about a second axis; a first driver configured to drive an oscillation of the first mirror, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive an oscillation of the second mirror, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the oscillation of the second mirror with at least one of a phase or a frequency of the oscillation of the first mirror, respectively, based on the first and the second position signals.

First claim

What is claimed is:

1. A multi-mirror system, comprising:
a first mirror configured to oscillate about a first axis;
a second mirror configured to oscillate about a second axis;
a first driver configured to drive an oscillation of the first mirror, receive a first measurement signal representative of an entire angular trajectory traversed by the first mirror throughout its oscillation, detect first crossing events of the first mirror at which a value of the first measurement signal is equal to a first predefined value that corresponds to a first predefined displacement angle of the first mirror with respect to the first axis, and generate a first position signal that indicates each of the detected first crossing events with a signal transition;
a second driver configured to drive an oscillation of the second mirror, receive a second measurement signal representative of an entire angular trajectory traversed by the second mirror throughout its oscillation, detect second crossing events of the second mirror at which a value of the second measurement signal is equal to a second predefined value that corresponds to a second predefined displacement angle of the second mirror with respect to the second axis, wherein the first predefined displacement angle is equal to the second predefined displacement angle, and generate a second position signal that indicates each of the detected second crossing events with a signal transition; and
a synchronization controller configured to receive the first position signal and the second position signal, and synchronize at least one of a phase or a frequency of the oscillation of the second mirror with at least one of a phase or a frequency of the oscillation of the first mirror, respectively, based on the first position signal and the second position signal.

2. The multi-mirror system of claim 1 , wherein the synchronization controller comprises:
a phase frequency detector configured to receive the first position signal and the second position signal and generate a control signal based thereon; and
a loop filter configured to generate an actuation value based on the control signal, and transmit the actuation value to the second driver.

3. The multi-mirror system of claim 2 , wherein the second driver is configured to receive the actuation value and control an actuation of the second mirror based on the actuation value such that the at least one of the phase or the frequency of the oscillation of the second mirror is synchronized with the at least one of the phase or the frequency of the oscillation of the first mirror, respectively.

4. The multi-mirror system of claim 3 , wherein the frequency of the first mirror has a predefined fractional relationship with the frequency of the second mirror, wherein the predefined fractional relationship is not equal to 1.

5. The multi-mirror system of claim 4 , wherein the synchronization controller further comprises:
a first divider configured to divide a frequency of the first position signal by a first integer; and
a second divider configured to divide a frequency of the second position signal by a second integer, wherein a ratio of the first integer and the second integer negate the predefined fractional relationship in the first position signal and the second position signal,
wherein the phase frequency detector is configured to receive the frequency divided first position signal as the first position signal and receive the frequency divided second position signal as the second position signal.

6. The multi-mirror system of claim 1 , further comprising:
a phase detector configured to receive the first position signal and the second position signal and measure a phase difference therebetween; and
a Lissajous frame start detector configured to receive the measured phase difference and determine a start of a Lissajous frame based on the measured phase difference.

7. The multi-mirror system of claim 6 , wherein the frequency of the first mirror has a predefined fractional relationship with the frequency of the second mirror, wherein the predefined fractional relationship is not equal to 1, and the synchronization controller further comprises:
a first divider configured to divide a frequency of the first position signal by a first integer; and
a second divider configured to divide a frequency of the second position signal by a second integer, wherein a ratio of the first integer and the second integer negates a predefined fractional relationship between the first position signal and the second position signal,
wherein the phase detector is configured to receive the frequency divided first position signal as the first position signal and receive the frequency divided second position signal as the second position signal.

8. The multi-mirror system of claim 1 , wherein:
the first driver is configured to trigger a change in the first position signal at each of the first crossing events such that the first position signal indicates the frequency and a phase of the oscillation of the first mirror, and
the second driver is configured to trigger a change in the second position signal at each of the second crossing events such that the second position signal indicates the frequency and a phase of the oscillation of the second mirror.

9. The multi-mirror system of claim 1 , wherein:
the first driver is configured to generate a first phase clock signal based on the detected first crossing events, wherein the first driver determines a time interval between two consecutive first crossing events, divides the time interval into first equidistant slices according to a predetermined number of slices, and generates the first phase clock signal having a first pulse at each of the first equidistant slices; and
the second driver is configured to generate a second phase clock signal based on the detected second crossing events, wherein the second driver determines a time interval between two consecutive second crossing events, divides the time interval into second equidistant slices according to the predetermined number of slices, and generates the second phase clock signal having a second pulse at each of the second equidistant slices.

10. The multi-mirror system of claim 9 , wherein the synchronization controller is configured to receive the first phase clock signal and the second phase clock signal, and synchronize the at least one of the phase or the frequency of the oscillation of the second mirror with the at least one of the phase or the frequency of the oscillation of the first mirror, respectively, based on the first phase clock signal and the second phase clock signal.

11. The multi-mirror system of claim 10 , wherein the synchronization controller is configured to compare the first position signal with the second position signal to generate a first comparison result, compare the first phase clock signal and the second phase clock signal to generate a second comparison result, and synchronize the at least one of the phase or the frequency of the oscillation of the second mirror with the at least one of the phase or the frequency of the oscillation of the first mirror, respectively, based on the first comparison result and the second comparison result.

12. The multi-mirror system of claim 11 , wherein the synchronization controller is configured to generate an error signal based on the first comparison result and to generate the second comparison resulted based on the error signal, the first phase clock signal, and the second phase clock signal.

13. The multi-mirror system of claim 11 , wherein the synchronization controller is configured to generate an actuation value based on the first c

Assignees

• Infineon Technologies Ag

Inventors

• Druml Norbert
• Greiner Philipp
• Kirillov Boris
• Maksymova Ievgeniia
• Sladkov Maksym
• Van Lierop Hendrikus

Classifications

• G01S7/4817

  relating to scanning · CPC title

• G02B26/0841 Primary

  the reflecting element being moved or deformed by electrostatic means · CPC title

• G02B26/0833 Primary

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G01S17/10

  using transmission of interrupted, pulse-modulated waves (determination of distance by phase measurements G01S17/32) · CPC title

• G01S7/4972

  Alignment of sensor · CPC title