Systems and methods for controlling a gas dopant vaporization rate during a crystal growth process

Patent metadata

Field	Value
Publication number	US-12195871-B2
Application number	US-202218046314-A
Country	US
Kind code	B2
Filing date	Oct 13, 2022
Priority date	Oct 13, 2022
Publication date	Jan 14, 2025
Grant date	Jan 14, 2025

Abstract

A method of growing a single crystal ingot includes growing a single crystal silicon ingot from a silicon melt in a crucible within an inner chamber, adding a volatile dopant into a feed tube, positioning the feed tube within an inner chamber at a first height relative to a surface of the melt, adjusting the feed tube within the inner chamber to a second height at a speed rate, and heating the volatile dopant to form a gaseous dopant as the feed tube is moved from the first height to the second height at the speed rate. Each of the second height and the speed rate are selected to control a vaporization rate of the volatile dopant. The method also includes introducing dopant species into the melt while growing the ingot by contacting the surface of the melt with the gaseous dopant.

First claim

What is claimed is:

1. A method of growing a doped single crystal silicon ingot using an ingot pulling apparatus including an inner chamber, a crucible disposed within the inner chamber, a heat source, and a feed tube having an open end, the feed tube comprising a capsule proximate the open end, the method comprising:
adding polycrystalline silicon to the crucible;
heating, by the heat source, the crucible to form a silicon melt from the polycrystalline silicon in the crucible;
growing a single crystal silicon ingot from the melt by contacting the melt with a seed crystal and pulling the seed crystal away from the melt to grow the single crystal silicon ingot, the single crystal silicon ingot having a neck region, a shoulder region, and a body region;
adding a charge of a volatile dopant into the feed tube, the charge of the volatile dopant being received by the capsule;
positioning the feed tube within the inner chamber such that the open end of the feed tube has a first height relative to a surface of the melt;
adjusting the feed tube within the inner chamber to move the open end of the feed tube from the first height to a second height relative to the surface of the melt, the second height being smaller than the first height, the open end of the feed tube being moved from the first height to the second height at a speed rate;
heating, by the heat source and radiant heat from the surface of the melt, the capsule containing the volatile dopant to form a gaseous dopant as the open end is moved from the first height to the second height at the speed rate, each of the second height and the speed rate being selected to control a vaporization rate of the volatile dopant; and
introducing dopant species into the melt while growing the body region of the single crystal silicon ingot by contacting the surface of the melt with the gaseous dopant, wherein the vaporization rate is controlled such that the dopant species are introduced at a rate sufficient to maintain a resistivity of the body region over an axial length of the body region,
wherein multiple charges of the volatile dopant are added into the feed tube, each of the multiple charges being added after dopant species from a previous volatile dopant charge have been introduced into the melt.

2. The method of claim 1 , wherein the vaporization rate is controlled such that the dopant species are introduced at a rate sufficient to maintain a resistivity of the body region within a predetermined range and to control variations in the resistivity of the body region to within +/−15% over an axial length of at least 300 mm.

3. The method of claim 1 , wherein the vaporization rate is controlled such that the dopant species are introduced at a rate sufficient to maintain a resistivity of the body region within a predetermined range and to control variations in the resistivity of the body region to within +/−15% over an axial length of at least 500 mm.

4. The method of claim 1 , wherein the vaporization rate is controlled such that the dopant species are introduced at a rate sufficient to maintain a resistivity of the body region within a predetermined range and to control variations in the resistivity of the body region to within +/−15% over an axial length of at least 800 mm.

5. The method of claim 1 , wherein the vaporization rate is controlled such that the dopant species are introduced at a rate sufficient to maintain a resistivity of the body region within a predetermined range and to control variations in the resistivity of the body region to within +/−10% over an axial length of at least 300 mm.

6. The method of claim 1 , wherein the vaporization rate is controlled such that the dopant species are introduced at a rate sufficient to maintain a resistivity of the body region within a predetermined range and to control variations in the resistivity of the body region to within +/−10% over an axial length of at least 500 mm.

7. The method of claim 1 , wherein the vaporization rate is controlled such that the dopant species are introduced at a rate sufficient to maintain a resistivity of the body region within a predetermined range and to control variations in the resistivity of the body region to within +/−10% over an axial length of at least 800 mm.

8. A method of growing a doped single crystal silicon ingot using an ingot pulling apparatus including an inner chamber, a crucible disposed within the inner chamber, a heat source, and a feed tube having an open end, the feed tube comprising a capsule proximate the open end, the method comprising:
adding polycrystalline silicon to the crucible;
heating, by the heat source, the crucible to form a silicon melt from the polycrystalline silicon in the crucible;
growing a single crystal silicon ingot from the melt by contacting the melt with a seed crystal and pulling the seed crystal away from the melt to grow the single crystal silicon ingot, the single crystal silicon ingot having a neck region, a shoulder region, and a body region;
adding a charge of a volatile dopant into the feed tube, the charge of the volatile dopant being received by the capsule;
positioning the feed tube within the inner chamber such that the open end of the feed tube has a first height relative to a surface of the melt;
adjusting the feed tube within the inner chamber to move the open end of the feed tube from the first height to a second height relative to the surface of the melt, the second height being smaller than the first height, the open end of the feed tube being moved from the first height to the second height at a speed rate;
heating, by the heat source and radiant heat from the surface of the melt, the capsule containing the volatile dopant to form a gaseous dopant as the open end is moved from the first height to the second height at the speed rate, each of the second height and the speed rate being selected to control a vaporization rate of the volatile dopant; and
introducing dopant species into the melt while growing the body region of the single crystal silicon ingot by contacting the surface of the melt with the gaseous dopant, wherein the vaporization rate is controlled such that the dopant species are introduced at a rate sufficient to maintain a resistivity of the body region over an axial length of the body region,
wherein the vaporization rate is controlled such that introducing the dopant species includes increasing an amount of the dopant species to a maximum dopant concentration at a constant rate and subsequently decreasing the amount of the dopant species at a constant rate.

9. The method of claim 1 , further comprising introducing an inert gas flow into at least one of the inner chamber and the feed tube to produce an inert atmosphere and guiding the gaseous dopant to the surface of the melt using the inert gas flow.

10. The method of claim 1 , wherein adding the charge of the volatile dopant into the feed tube includes adding a charge of a solid dopant into the feed tube.

11. The method of claim 10 , wherein the solid dopant is a solid n-type dopant.

12. The method of claim 10 , wherein the solid dopant is a solid p-type dopant.

13. The method of claim 12 , wherein the solid dopant is boric acid.

14. A method of growing a doped single crystal silicon ingot using an ingot pulling apparatus including an inner chamber, a crucible disposed within the inner chamber, a heat source, and at least two feed tubes, each feed tube having an open end and comprising a capsule proximate the open end, the method further comprising:
adding polycrystalline silicon to the crucible;
heating, by the heat source, the crucible to form a silicon melt from the po

Assignees

• Globalwafers Co Ltd

Inventors

• Hu Chieh
• Tseng Hsien-Ta
• Wu Chun-Sheng
• Luter William Lynn
• Chen Liang-Chin
• Bhagavat Sumeet
• Hudson Carissima Marie
• Wu Yu-Chiao

Classifications

• C30B15/14

  Heating of the melt or the crystallised materials · CPC title

• C30B29/06

  Silicon · CPC title

• C30B15/04 Primary

  adding doping materials, e.g. for n-p-junction · CPC title