Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
US-11901175-B2 · Feb 13, 2024 · US
Corrosion-resistant member
US12195641B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12195641-B2 |
| Application number | US-202117612871-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 24, 2021 |
| Priority date | Mar 11, 2020 |
| Publication date | Jan 14, 2025 |
| Grant date | Jan 14, 2025 |
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- Title
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Abstract
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A corrosion-resistant member including: a metal base material ( 10 ); and a corrosion-resistant coating ( 30 ) formed on the surface of the base material ( 10 ). The corrosion-resistant coating ( 30 ) is a stack of a magnesium fluoride layer ( 31 ) and an aluminum fluoride layer ( 32 ) in order from the base material ( 10 ) side. The aluminum fluoride layer ( 32 ) has a first crystalline region ( 32 A) and a second crystalline region ( 32 B) containing crystalline aluminum fluoride. The first crystalline region ( 32 A) is a region in which diffraction spot arrays having regularity are observed in an electron beam diffraction image obtained by irradiation with electron beams having a beam diameter of 10 nm to 20 nm. The second crystalline region ( 32 B) is a region in which a plurality of diffraction spots is observed but diffraction spot arrays having regularity are not observed in an electron beam diffraction image obtained by irradiation with the above-described electron beams.
First claim
Opening claim text (preview).
The invention claimed is: 1. A corrosion-resistant member comprising: a metal base material; and a corrosion-resistant coating formed on a surface of the base material, wherein the corrosion-resistant coating is a stack of a magnesium fluoride layer containing magnesium fluoride and an aluminum fluoride layer containing aluminum fluoride in order from a side of the base material, the aluminum fluoride layer has a first crystalline region and a second crystalline region containing crystalline aluminum fluoride, a ratio of a thickness of the first crystalline region to a thickness of the aluminum fluoride layer is 15% or more and 95% or less, the first crystalline region is a region in which diffraction spot arrays having regularity are observed in an electron beam diffraction image obtained by irradiation with electron beams having a beam diameter of 10 nm or more and 20 nm or less, and the second crystalline region is a region in which a plurality of diffraction spots is observed but diffraction spot arrays having regularity are not observed in an electron beam diffraction image obtained by irradiation with the electron beams. 2. The corrosion-resistant member according to claim 1 , wherein the first crystalline region is arranged adjacent to or close to the magnesium fluoride layer. 3. The corrosion-resistant member according to claim 1 , wherein the metal base material is formed of aluminum or an aluminum alloy. 4. The corrosion-resistant member according to claim 1 , wherein a thickness of the magnesium fluoride layer is 0.1 μm or more and 20 μm or less. 5. The corrosion-resistant member according to claim 1 , wherein a thickness of the aluminum fluoride layer is 0.2 μm or more and 50 μm or less. 6. The corrosion-resistant member according to claim 2 , wherein the metal base material is formed of aluminum or an aluminum alloy. 7. The corrosion-resistant member according to claim 2 , wherein a thickness of the magnesium fluoride layer is 0.1 μm or more and 20 μm or less. 8. The corrosion-resistant member according to claim 3 , wherein a thickness of the magnesium fluoride layer is 0.1 μm or more and 20 μm or less. 9. The corrosion-resistant member according to claim 2 , wherein a thickness of the aluminum fluoride layer is 0.2 μm or more and 50 μm or less. 10. The corrosion-resistant member according to claim 3 , wherein a thickness of the aluminum fluoride layer is 0.2 μm or more and 50 μm or less. 11. The corrosion-resistant member according to claim 4 , wherein a thickness of the aluminum fluoride layer is 0.2 μm or more and 50 μm or less.
Assignees
Inventors
Classifications
- C23C28/04Primary
only coatings of inorganic non-metallic material · CPC title
- C23C14/0694Primary
Halides · CPC title
Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances · CPC title
Coatings or surface treatment on the inside of the reaction chamber or on parts thereof · CPC title
by electron bombardment · CPC title
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- What does patent US12195641B2 cover?
- A corrosion-resistant member including: a metal base material ( 10 ); and a corrosion-resistant coating ( 30 ) formed on the surface of the base material ( 10 ). The corrosion-resistant coating ( 30 ) is a stack of a magnesium fluoride layer ( 31 ) and an aluminum fluoride layer ( 32 ) in order from the base material ( 10 ) side. The aluminum fluoride layer ( 32 ) has a first crystalline region…
- Who is the assignee on this patent?
- Showa Denko Kk, Resonac Corp
- What technology area does this patent fall under?
- Primary CPC classification C23C28/04. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Jan 14 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).