Master for micro flow path creation, transfer copy, and method for producing master for micro flow path creation

Patent metadata

Field	Value
Publication number	US-12194459-B2
Application number	US-202016927425-A
Country	US
Kind code	B2
Filing date	Jul 13, 2020
Priority date	Nov 28, 2014
Publication date	Jan 14, 2025
Grant date	Jan 14, 2025

Abstract

There is provided a master for micro flow path creation, a transfer copy, and a method for producing a master for micro flow path creation by which transfer copies having an area with high hydrophilicity can be easily mass-produced, the master for micro flow path creation including: a base material; a main concave-convex portion provided on a surface of the base material and extending in a planar direction of the base material; and a fine concave-convex portion provided on a surface of the main concave-convex portion and having a narrower pitch than the main concave-convex portion. The fine concave-convex portion has an arithmetic average roughness of 10 nm to 150 nm and has a specific surface area ratio of 1.1 to 3.0.

First claim

The invention claimed is:

1. A master for micro flow path creation comprising:
a base material;
a surface layer comprising a main concave-convex portion, the surface layer provided on a surface of the base material and extending in a planar direction of the base material; and
a coating layer comprising a fine concave-convex portion, the coating layer provided on a surface of the main concave-convex portion, and the fine concave-convex portion having a narrower pitch than the main concave-convex portion,
wherein the fine concave-convex portion has an arithmetic average roughness of 10 nm to 150 nm and has a specific surface area ratio of 1.1 to 3.0.

2. The master for micro flow path creation according to claim 1 ,
wherein the main concave-convex portion has a width and a depth of 1 μm to 2000 μm, and
the fine concave-convex portion has a width and a depth of 30 nm to 1000 nm.

3. The master for micro flow path creation according to claim 2 , comprising a plurality of the fine concave-convex portions,
wherein the widths and the depths of the fine concave-convex portions are values different between positions where the fine concave-convex portion is formed.

4. The master for micro flow path creation according to claim 1 , wherein the fine concave-convex portion is provided so as to extend along a longitudinal direction of the main concave-convex portion.

5. A method for producing the master for micro flow path creation according to claim 1 , comprising:
forming, on a surface of a base material, a main concave-convex portion extending in a planar direction of the base material; and
forming, on a surface of the main concave-convex portion, a fine concave-convex portion having a narrower pitch than the main concave-convex portion, by irradiating the surface of the main concave-convex portion with ultrashort pulse laser light having a pulse width of 10 picoseconds or less.

6. The method for producing a master for micro flow path creation according to claim 5 , wherein the ultrashort pulse laser light is applied such that a polarization direction is orthogonal to a longitudinal direction of the main concave-convex portion.

7. A transfer copy comprising a resin layer to which a surface shape of the master for micro flow path creation according to claim 1 is transferred.

8. A transfer copy comprising:
a resin layer;
a main concave-convex portion provided on a surface of the resin layer and extending in a planar direction of the resin layer; and
a fine concave-convex portion provided on a surface of the main concave-convex portion and having a narrower pitch than the main concave-convex portion,
wherein the fine concave-convex portion is present only on the bottom surface of the concavity and/or the upper surface of the convexity of the main concave-convex portion, and
wherein the fine concave-convex portion has an arithmetic average roughness of 10 nm to 150 nm and has a specific surface area ratio of 1.1 to 3.0.

9. The transfer copy according to claim 8 ,
wherein the main concave-convex portion has a width and a depth of 1 μm to 2000 μm, and
the fine concave-convex portion has a width and a depth of 30 nm to 1000 nm.

10. The transfer copy according to claim 9 , comprising a plurality of the fine concave-convex portion,
wherein the widths and the depths of the plurality of the fine concave-convex portion are values different between positions where the fine concave-convex portion is formed.

11. The transfer copy according to claim 8 , wherein the fine concave-convex portion is provided so as to extend along a longitudinal direction of the main concave-convex portion.

12. The transfer copy according to claim 7 , wherein the resin layer is made of a hardenable hydrophilic resin.

13. A micro fluid chip comprising the transfer copy according to claim 8 .

14. The master for micro flow path creation according to claim 1 ,
wherein the fine concave-convex portion is present only on the bottom surface of the concavity and/or the upper surface of the convexity of the main concave-convex portion.

15. The master for micro flow path creation according to claim 1 ,
wherein the fine concave-convex portion is present only on the bottom surface of the concavity of the main concave-convex portion.

16. The master for micro flow path creation according to claim 1 ,
wherein the fine concave-convex portion is present only on the upper surface of the convexity of the main concave-convex portion.

17. The master for micro flow path creation according to claim 1 ,
wherein the surface layer and the coating layer comprise different materials.

18. The master for micro flow path creation according to claim 1 ,
wherein the surface layer comprises NiP, and the coating layer comprises DLC coating.

Assignees

• Dexerials Corp

Inventors

• Suzuki Shinya
• Hayashibe Kazuya
• Shibata Akihiro

Classifications

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• B81C99/009

  Manufacturing the stamps or the moulds · CPC title

• B81C99/0085

  using moulds and master templates, e.g. for hot-embossing · CPC title

• B29C2059/023

  Microembossing · CPC title

• B29C2035/0827

  using UV radiation · CPC title