Master for micro flow path creation, transfer copy, and method for producing master for micro flow path creation

Patent metadata

Field	Value
Publication number	US-10850273-B2
Application number	US-201515531267-A
Country	US
Kind code	B2
Filing date	Oct 26, 2015
Priority date	Nov 28, 2014
Publication date	Dec 1, 2020
Grant date	Dec 1, 2020

Abstract

There is provided a master for micro flow path creation, a transfer copy, and a method for producing a master for micro flow path creation by which transfer copies having an area with high hydrophilicity can be easily mass-produced, the master for micro flow path creation including: a base material; a main concave-convex portion provided on a surface of the base material and extending in a planar direction of the base material; and a fine concave-convex portion provided on a surface of the main concave-convex portion and having a narrower pitch than the main concave-convex portion. The fine concave-convex portion has an arithmetic average roughness of 10 nm to 150 nm and has a specific surface area ratio of 1.1 to 3.0.

First claim

The invention claimed is:

1. A master for micro flow path creation comprising:
a base material;
a surface layer comprising a main concave-convex portion, the surface layer provided on a surface of the base material and extending in a planar direction of the base material; and
a coating layer comprising a fine concave-convex portion, the coating layer provided on a surface of the main concave-convex portion, and the fine concave-convex portion having a narrower pitch than the main concave-convex portion,
wherein the fine concave-convex portion has an arithmetic average roughness of 10 nm to 150 nm and has a specific surface area ratio of 1.1 to 3.0,
wherein the main concave-convex portion has a width and a depth of 1 μm to 2000 μm,
wherein the fine concave-convex portion has a width and a depth of 30 nm to 1000 nm, and
wherein the fine concave-convex portion is present only on the bottom surface of the concavity or the upper surface of the convexity of the main concave-convex portion.

2. The master for micro flow path creation according to claim 1 , comprising a plurality of the fine concave-convex portions,
wherein the widths and the depths of the fine concave-convex portions are values different between positions where the fine concave-convex portion is formed.

3. The master for micro flow path creation according to claim 1 , wherein the fine concave-convex portion is provided so as to extend along a longitudinal direction of the main concave-convex portion.

4. A method for producing the master for micro flow path creation according to claim 1 , comprising:
forming, on a surface of a base material, a main concave-convex portion extending in a planar direction of the base material; and
forming, on a surface of the main concave-convex portion, a fine concave-convex portion having a narrower pitch than the main concave-convex portion, by irradiating the surface of the main concave-convex portion with ultrashort pulse laser light having a pulse width of 10 picoseconds or less.

5. The method for producing a master for micro flow path creation according to claim 4 , wherein the ultrashort pulse laser light is applied such that a polarization direction is orthogonal to a longitudinal direction of the main concave-convex portion.

6. A transfer copy comprising a resin layer to which a surface shape of the master for micro flow path creation according to claim 1 is transferred.

7. A transfer copy comprising:
a resin layer;
a main concave-convex portion provided on a surface of the resin layer and extending in a planar direction of the resin layer; and
a fine concave-convex portion provided on a surface of the main concave-convex portion and having a narrower pitch than the main concave-convex portion,
wherein the fine concave-convex portion is present only on the bottom surface of the concavity or the upper surface of the convexity of the main concave-convex portion,
wherein the fine concave-convex portion has an arithmetic average roughness of 10 nm to 150 nm and has a specific surface area ratio of 1.1 to 3.0, and
wherein the main concave-convex portion has a width and a depth of 1 μm to 2000 μm, and
the fine concave-convex portion has a width and a depth of 30 nm to 1000 nm.

8. The transfer copy according to claim 7 , comprising a plurality of the fine concave-convex portion,
wherein the widths and the depths of the plurality of the fine concave-convex portion are values different between positions where the fine concave-convex portion is formed.

9. The transfer copy according to claim 7 , wherein the fine concave-convex portion is provided so as to extend along a longitudinal direction of the main concave-convex portion.

10. The transfer copy according to claim 6 , wherein the resin layer is made of a hardenable hydrophilic resin.

11. A micro fluid chip comprising the transfer copy according to claim 7 .

12. The master for micro flow path creation according to claim 1 ,
wherein the fine concave-convex portion is present only on the bottom surface of the concavity of the main concave-convex portion.

13. The master for micro flow path creation according to claim 1 ,
wherein the fine concave-convex portion is present only on the upper surface of the convexity of the main concave-convex portion.

14. The master for micro flow path creation according to claim 1 ,
wherein the surface layer and the coating layer comprise different materials.

15. The master for micro flow path creation according to claim 1 ,
wherein the surface layer comprises NiP, and the coating layer comprises DLC coating.

Assignees

• Dexerials Corp

Inventors

• Suzuki Shinya
• Hayashibe Kazuya
• Shibata Akihiro

Classifications

• B29C33/42

  characterised by the shape of the moulding surface, e.g. ribs or grooves · CPC title

• B01J2219/00786

  Geometry of the plates · CPC title

• B01L2300/161

  Control and use of surface tension forces, e.g. hydrophobic, hydrophilic · CPC title

• B81C99/00

  Subject matter not provided for in other groups of this subclass · CPC title

• B01L3/502746

  characterised by the means for controlling flow resistance, e.g. flow controllers, baffles or throttle valves · CPC title