Optical device production method

Patent metadata

Field	Value
Publication number	US-12189114-B2
Application number	US-202418584740-A
Country	US
Kind code	B2
Filing date	Feb 22, 2024
Priority date	Nov 15, 2017
Publication date	Jan 7, 2025
Grant date	Jan 7, 2025

Abstract

An optical device includes a support portion, a movable portion; and a pair of torsion bars. An optical function portion is provided on one surface of the movable portion and a rib portion is provided on the other surface of the movable portion. The rib portion includes eight extending portions of first to eighth extending portions. When setting directions in which the first to eighth extending portions extend as first to eighth extending directions respectively, and setting an angle between the first and second extending directions as a first angle, an angle between the third and fourth extending directions as a second angle, an angle between the fifth and sixth extending directions as a third angle, and an angle between the seventh and eighth extending directions as a fourth angle, each of the first and second angle is larger than each of the third and fourth angle.

First claim

The invention claimed is:

1. An optical device comprising:
a support portion;
a movable portion; and
a pair of first torsion bars disposed on both sides of the movable portion on a first axis and supporting the movable portion so that the movable portion is swingable with respect to the support portion around the first axis,
wherein an optical function portion is provided on one surface of the movable portion and a rib portion is provided on the other surface of the movable portion,
the rib portion includes eight extending portions of a first extending portion, a second extending portion, a third extending portion, a fourth extending portion, a fifth extending portion, a sixth extending portion, a seventh extending portion, and an eighth extending portion extending from a side of a center of the movable portion to a side of an outer edge of the movable portion respectively when viewed from a predetermined direction perpendicular to the first axis,
when setting a direction parallel to the first axis as a first axis direction, setting an axis that passes through the center of the movable portion and is perpendicular to the first axis and the predetermined direction as a second axis, and setting a direction parallel to the second axis as a second axis direction, the first extending portion and the second extending portion extend from the side of the center of the movable portion toward one side in the first axis direction so as to interpose the first axis therebetween, the third extending portion and the fourth extending portion extend from the side of the center of the movable portion toward the other side in the first axis direction so as to interpose the first axis therebetween, the fifth extending portion and the sixth extending portion extend from the side of the center of the movable portion toward one side in the second axis direction so as to interpose the second axis therebetween, and the seventh extending portion and the eighth extending portion extend from the side of the center of the movable portion toward the other side in the second axis direction so as to interpose the second axis therebetween,
when setting directions in which the first extending portion, the second extending portion, the third extending portion, the fourth extending portion, the fifth extending portion, the sixth extending portion, the seventh extending portion, and the eighth extending portion extend as a first extending direction, a second extending direction, a third extending direction, a fourth extending direction, a fifth extending direction, a sixth extending direction, a seventh extending direction, and an eighth extending direction, respectively, and setting an angle between the first extending direction and the second extending direction as a first angle, an angle between the third extending direction and the fourth extending direction as a second angle, an angle between the fifth extending direction and the sixth extending direction as a third angle, and an angle between the seventh extending direction and the eighth extending direction as a fourth angle, each of the first angle and the second angle is larger than each of the third angle and the fourth angle.

2. The optical device according to claim 1 ,
wherein the eight extending portions are connected at the center of the movable portion.

3. The optical device according to claim 2 ,
wherein the rib portion further includes a central portion disposed at the center of the movable portion, and
the eight extending portions extend from the central portion.

4. The optical device according to claim 1 ,
wherein the eight extending portions straightly extend from the side of the center of the movable portion to the side of the outer edge of the movable portion.

5. The optical device according to claim 1 ,
wherein the first angle is equal to the second angle and the third angle is equal to the fourth angle.

6. The optical device according to claim 1 ,
wherein a tip portion of the first extending portion at the side of the outer edge of the movable portion is not connected to a tip portion of the second extending portion at the side of the outer edge of the movable portion, and a tip portion of the third extending portion at the side of the outer edge of the movable portion is not connected to a tip portion of the fourth extending portion at the side of the outer edge of the movable portion.

7. The optical device according to claim 1 ,
wherein a tip portion of the fifth extending portion at the side of the outer edge of the movable portion is not connected to a tip portion of the sixth extending portion at the side of the outer edge of the movable portion, and a tip portion of the seventh extending portion at the side of the outer edge of the movable portion is not connected to a tip portion of the eighth extending portion at the side of the outer edge of the movable portion.

8. The optical device according to claim 1 ,
wherein the movable portion includes a main body portion on which the optical function portion and the rib portion are provided, a ring-shaped portion formed in a ring shape to surround the main body portion when viewed from the predetermined direction, and a connection portion connecting the main body portion and the ring-shaped portion to each other.

9. The optical device according to claim 1 , further comprising a base portion supporting the movable portion and the support portion, a pair of second torsion bars disposed on both sides of the support portion on the second axis and supporting the support portion so that the support portion is swingable with respect to the base portion around the second axis.

10. The optical device according to claim 1 ,
wherein the support portion, the movable portion, and the pair of first torsion bars are constituted by a semiconductor substrate including a first semiconductor layer and a second semiconductor layer,
the movable portion is constituted by the second semiconductor layer, and
the rib portion is constituted by the first semiconductor layer.

11. The optical device according to claim 10 ,
wherein the semiconductor substrate further includes an insulating layer disposed between the first semiconductor layer and the second semiconductor layer, and
the rib portion is constituted by the first semiconductor layer and the insulating layer.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Sugimoto Tatsuya
• Suzuki Tomofumi
• KOTANI Kyosuke
• Kuramoto Yutaka
• Suzuki Daiki

Classifications

• B81B3/0045

  Improve properties related to angular swinging, e.g. control resonance frequency · CPC title

• B81C2201/013

  Etching · CPC title

• B81C2201/0198

  for making a masking layer · CPC title

• B81C2201/0174

  for making multi-layered devices, film deposition or growing · CPC title

• B81C1/00555

  Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity (B81C1/00023 - B81C1/0019 take precedence) · CPC title