Semiconductor package with power electronics carrier having trench spacing adapted for delamination

Patent metadata

Field	Value
Publication number	US-12183667-B2
Application number	US-202217579727-A
Country	US
Kind code	B2
Filing date	Jan 20, 2022
Priority date	Jan 20, 2022
Publication date	Dec 31, 2024
Grant date	Dec 31, 2024

Abstract

A semiconductor package includes a first power electronics carrier including a structured metallization layer disposed on an electrically insulating substrate, a power semiconductor die mounted on the first power electronics carrier, and a first pair of metal pads that are immediately laterally adjacent one another and are low-voltage difference nodes of the semiconductor package, a second pair of metal pads that are immediately laterally adjacent one another and are high-voltage difference nodes of the semiconductor package, and an encapsulant body of electrically insulating material that encapsulates the power semiconductor die and the first and second pairs of metal pads, wherein the first pair of the metal pads are laterally isolated from one another by a first minimum separation distance, and wherein the second pair of the metal pads are laterally isolated from one another by a second minimum separation distance that is greater than the first minimum separation distance.

First claim

The invention claimed is:

1. A semiconductor package, comprising:
a first power electronics carrier comprising a structured metallization layer disposed on an electrically insulating substrate;
a power semiconductor die mounted on the first power electronics carrier; and
a first pair of metal pads that are immediately laterally adjacent one another and are low-voltage difference nodes of the semiconductor package;
a second pair of metal pads that are immediately laterally adjacent one another and are high-voltage difference nodes of the semiconductor package; and
an encapsulant body of electrically insulating material that encapsulates the power semiconductor die and the first and second pairs of metal pads,
wherein the first pair of the metal pads are laterally isolated from one another by a first minimum separation distance, and
wherein the second pair of the metal pads are laterally isolated from one another by a second minimum separation distance that is greater than the first minimum separation distance.

2. The semiconductor package of claim 1 , wherein the structured metallization layer of the first power electronics carrier comprises trenches that define a plurality of isolated pads, and wherein the plurality of isolated pads from the first power electronics carrier comprises the first pair of the metal pads.

3. The semiconductor package of claim 2 , wherein the plurality of isolated pads from the first power electronics carrier comprises the second pair of the metal pads, and wherein the second minimum separation distance is greater than a minimum trench separation distance of the trenches in the structured metallization layer of the first power electronics carrier.

4. The semiconductor package of claim 3 , wherein the first minimum separation distance is equal to the minimum trench separation distance of the trenches in the structured metallization layer of the first power electronics carrier.

5. The semiconductor package of claim 2 , further comprising a second power electronics carrier comprising a structured metallization layer disposed on an electrically insulating substrate, wherein the first and second power electronics carriers are arranged with the power semiconductor die in between the first and second power electronics carriers and with the structured metallization layers of the first and second power electronics carriers facing one another.

6. The semiconductor package of claim 5 , wherein the structured metallization layer of the second power electronics carrier comprises trenches that define a plurality of isolated pads, wherein the plurality of isolated pads from the second power electronics carrier comprises the second pair of the metal pads, and wherein the second minimum separation distance is greater than a minimum trench separation distance of the trenches in the structured metallization layer of the second power electronics carrier.

7. The semiconductor package of claim 1 , wherein the second separation distance is between two times and twenty times greater than the first minimum separation distance.

8. The semiconductor package of claim 1 , wherein the first minimum separation distance is between 0.5 mm and 1.0 mm, and wherein the second separation distance is between 1.0 mm and 20 mm.

9. The semiconductor package of claim 1 , wherein the first power electronics carrier is any one of: a direct bonded copper substrate, an active metal brazed substrate, or an insulated metal substrate.

10. The semiconductor package of claim 1 , wherein the semiconductor package is a power module comprising one or more discrete power devices, wherein the low-voltage difference nodes of the semiconductor package are nodes that are biased below a load voltage of the one or more discrete power devices during all operational states of the power module, and wherein the high-voltage difference nodes of the semiconductor package are nodes that are biased at the load voltage of the one or more discrete power devices during an operational state of the power module.

11. The semiconductor package of claim 10 , wherein the low-voltage difference nodes of the semiconductor package comprise any one or more of: a gate node, a sensing node, and a reference potential node, and wherein the high-voltage difference nodes of the semiconductor package comprise any one or more of: a positive fixed potential node, a negative fixed potential node, a reference potential node, and an output node.

12. The semiconductor package of claim 1 , wherein the low-voltage difference nodes of the semiconductor package are nodes that are biased at no greater than 100 V during all operational states of the power module.

13. The semiconductor package of claim 12 , wherein the low-voltage difference nodes of the semiconductor package are nodes that are biased at no greater than 60 V during all operational states of the power module.

14. A semiconductor package, comprising:
a first power electronics carrier comprising a structured metallization layer disposed on an electrically insulating substrate;
a second power electronics carrier comprising a structured metallization layer disposed on an electrically insulating substrate;
a first pair of metal pads from the structured metallization layer of the first power electronics carrier that are immediately laterally adjacent one another and are low-voltage difference nodes of the semiconductor package;
a second pair of metal pads from the structured metallization layer of the second power electronics carrier that are immediately laterally adjacent one another and are high-voltage difference nodes of the semiconductor package;
a power semiconductor die mounted on the first power electronics carrier; and
an encapsulant body of electrically insulating material that encapsulates the power semiconductor die and the structured metallization layers of the first and second power electronics carriers,
wherein the first pair of the metal pads are laterally isolated from one another by a first minimum separation distance, and
wherein the second pair of the metal pads are laterally isolated from one another by a second minimum separation distance that is greater than the first minimum separation distance.

15. The semiconductor package of claim 14 , wherein the structured metallization layers of the first and second power electronics carriers each comprise trenches that define a plurality of isolated pads, wherein the first minimum separation distance is equal to a minimum trench separation distance of the structured metallization layer of the first power electronics carrier, and wherein the second minimum separation distance is equal to a minimum trench separation distance of the trenches in the structured metallization layer of the second power electronics carrier.

16. A method of producing a semiconductor package, the method comprising:
providing a first power electronics carrier comprising a structured metallization layer disposed on an electrically insulating substrate;
mounting a power semiconductor die on the first power electronics carrier;
forming an encapsulant body of electrically insulating material that encapsulates the power semiconductor die and the structured metallization layer of the first power electronics carrier,
wherein the semiconductor package comprises a first pair of metal pads that are immediately laterally adjacent one another and are low-voltage difference nodes of the semiconductor package and a second pair of metal pads that are immediately laterally adjacent one another and are high-voltage difference nodes of the semiconductor package,
wherein the first pa

Assignees

• Infineon Technologies Ag

Inventors

• Scherl Peter
• Lis Adrian
• Neugirg Christian

Classifications

• H10W90/401

  characterised by multiple insulating or insulated package substrates, interposers or RDLs · CPC title

• H10W74/111

  the semiconductor body being completely enclosed · CPC title

• H10W74/016

  using moulds · CPC title

• H10W70/685

  comprising multiple insulating layers · CPC title

• H10W70/05

  of insulating or insulated package substrates, or of interposers, or of redistribution layers (manufacture or treatment of leadframes H10W70/04) · CPC title