Tin oxide mandrels in patterning

Patent metadata

Field	Value
Publication number	US-12183589-B2
Application number	US-202117302847-A
Country	US
Kind code	B2
Filing date	May 13, 2021
Priority date	Jan 30, 2018
Publication date	Dec 31, 2024
Grant date	Dec 31, 2024

Abstract

Tin oxide films are used as mandrels in semiconductor device manufacturing. In one implementation the process starts by patterning a tin oxide layer using at least one of a hydrogen-based etch chemistry and a chlorine-based etch chemistry, and using patterned photoresist as a mask, thereby providing a substrate having a plurality of protruding tin oxide features (mandrels). Next, a conformal layer of spacer material is formed both on the horizontal surfaces and on the sidewalls of the mandrels. The spacer material is then removed from the horizontal surfaces exposing the tin oxide material of the mandrels, without fully removing the spacer material residing at the sidewalls of the mandrels. Next, mandrels are selectively removed (e.g., using hydrogen-based etch chemistry), while leaving the spacer material that resided at the sidewalls of the mandrels. The resulting spacers can be used for patterning underlying layers on the substrate.

First claim

What is claimed is:

1. A method of processing a semiconductor substrate, the method comprising:
(a) providing a semiconductor substrate having a patterned photoresist layer overlying a tin oxide layer;
(b) etching a plurality of openings in the tin oxide layer using the patterned photoresist layer as a mask, wherein etching the plurality of openings comprises etching the tin oxide layer using a hydrogen-based etch chemistry to form a tin hydride;
(c) at least partially removing the photoresist layer using an oxygen-based etch chemistry and forming a plurality of tin oxide mandrels;
(d) depositing a layer of spacer material over the tin oxide mandrels such that the spacer material coats sidewalls of the tin oxide mandrels and horizontal portions of the tin oxide mandrels;
(e) removing the spacer material from the horizontal portions of the tin oxide mandrels, and
(f) removing the tin oxide mandrels to form a plurality of spacers on the semiconductor substrate.

2. The method of claim 1 , wherein (b) comprises etching the tin oxide layer using the hydrogen-based etch chemistry, and wherein the etching comprises contacting the semiconductor substrate with H 2 activated in a plasma and Cl 2 activated in a plasma.

3. The method of claim 2 , wherein a process gas used for etching the tin oxide layer further comprises an inert gas.

4. The method of claim 2 , wherein a process gas used for etching the tin oxide layer further comprises an inert gas selected from the group consisting of argon, N 2 , and combinations thereof.

5. The method of claim 1 , wherein (b) comprises etching the tin oxide layer using the hydrogen-based etch chemistry, wherein the etching comprises contacting the semiconductor substrate with a plasma formed in a process gas comprising H 2 and Cl 2 , wherein H 2 concentration in the process gas is at least 50%.

6. The method of claim 1 , wherein (b) comprises etching the tin oxide layer using the hydrogen-based etch chemistry, wherein the etching comprises contacting the semiconductor substrate with a plasma formed in a process gas comprising H 2 and Cl 2 , wherein H 2 concentration in the process gas is at least 80%.

7. The method of claim 1 , wherein etching of the tin oxide layer in (b) is conducted using an etch chemistry that etches tin oxide at a higher etch rate than photoresist.

8. The method of claim 1 , wherein (b) comprises etching the tin oxide layer using the hydrogen-based etch chemistry, wherein the etching comprises forming a plasma in a process gas comprising a hydrogen-containing gas selected from the group consisting of H 2 , HBr, NH 3 , H 2 O, a hydrocarbon, and combinations thereof.

9. The method of claim 1 , wherein the semiconductor substrate provided in (a) comprises one or more intermediate layers between the tin oxide layer and the patterned photoresist layer, and wherein etching a plurality of openings in the tin oxide layer using the patterned photoresist layer as a mask comprises transferring a pattern of the patterned photoresist layer to the one or more intermediate layers.

10. The method of claim 1 , wherein the photoresist is completely removed in (c) after the openings in the tin oxide layer are formed.

11. The method of claim 1 , wherein the semiconductor substrate provided in (a) comprises one or more intermediate layers between the tin oxide layer and the patterned photoresist layer, wherein etching a plurality of openings in the tin oxide layer using the patterned photoresist layer as a mask comprises transferring a pattern of the patterned photoresist layer to the one or more intermediate layers, and wherein the photoresist is completely removed in (c) before the openings in the tin oxide layer are formed.

12. The method of claim 1 , further comprising:
(g) after (f) using the plurality of spacers as a mask to etch one or more underlying layers.

13. The method of claim 1 , wherein removing the tin oxide mandrels in (e) comprises etching the tin oxide mandrels using a hydrogen-based etch chemistry.

14. The method of claim 1 , wherein removing the tin oxide mandrels in (f) comprises etching the tin oxide mandrels using a hydrogen-based etch chemistry by exposing the semiconductor substrate to a process gas comprising a gas selected from the group consisting of H 2 , HBr, and NH 3 , and combinations thereof.

15. The method of claim 1 , wherein removing the spacer material from the horizontal portions of the tin oxide mandrels comprises using an etch chemistry that etches the spacer material at a faster rate than the tin oxide layer.

16. The method of claim 1 , wherein the spacer material is selected from the group consisting of a silicon-containing material, a carbon-containing material, and a metal oxide.

17. The method of claim 1 , wherein the spacer material is a silicon-containing material, and wherein (c) comprises removing the spacer material from horizontal surfaces using a fluorocarbon etch chemistry selectively to tin oxide.

18. The method of claim 1 , wherein (c) comprises removing the photoresist using the oxygen-based etch chemistry to expose the tin oxide layer.

19. The method of claim 1 , further comprising:
(g) after (f), using the spacers to form a plurality of openings in an etch stop layer underlying the spacers, and in a target layer, underlying the etch stop layer.

20. A method of processing a semiconductor substrate, the method comprising:
(a) providing a semiconductor substrate having a patterned photoresist layer overlying a tin oxide layer;
(b) etching a plurality of openings in the tin oxide layer using the patterned photoresist layer as a mask, wherein etching the plurality of openings comprises etching the tin oxide layer using (i) a hydrogen-based etch chemistry to form a tin hydride and (ii) a chlorine-based etch chemistry;
(c) at least partially removing the photoresist layer using an oxygen-based etch chemistry and forming a plurality of tin oxide mandrels;
(d) depositing a layer of spacer material over the tin oxide mandrels such that the spacer material coats sidewalls of the tin oxide mandrels and horizontal portions of the tin oxide mandrels;
(e) removing the spacer material from the horizontal portions of the tin oxide mandrels; and
(f) removing the tin oxide mandrels to form a plurality of spacers on the semiconductor substrate.

Assignees

• Lam Res Corp

Inventors

• Yu Jengyi
• Tan Samantha S H
• Heo Seongjun
• Volosskiy Boris
• Kanakasabapathy Sivananda Krishnan
• Wise Richard
• Pan Yang
• Wu Hui-Jung

Classifications

• H10P14/3412

  including tin · CPC title

• H10P95/70

  Chemical treatments · CPC title

• H10P76/4085 Primary

  characterised by the processes involved to create the masks · CPC title

• H10P72/0612

  Production flow monitoring, e.g. for increasing throughput · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title