Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods
US-2020369691-A1 · Nov 26, 2020 · US
Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods
US12180240B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12180240-B2 |
| Application number | US-202017067232-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 9, 2020 |
| Priority date | Apr 11, 2018 |
| Publication date | Dec 31, 2024 |
| Grant date | Dec 31, 2024 |
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Abstract
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A pure composition comprises a monoalkyltin trialkoxide compound represented by the chemical formula RSn(OR′) 3 or a monoalkyl tin triamide compound represented by the chemical formula RSn(NR′ 2 ) 3 and no more than 4 mole % dialkyltin compounds relative to the total tin amount, where R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ is a hydrocarbyl group with 1-10 carbon atoms. Methods are described for the formation of the pure compositions. A solid composition comprises a monoalkyl triamido tin compound represented by the chemical formula RSn—(NR′COR″) 3 , where R is a hydrocarbyl group with 1-31 carbon atoms, and where R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms. The compositions are suitable for the formation of resist compositions suitable for EUV patterning in which the compositions have a high EUV absorption.
First claim
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What is claimed is: 1. A composition comprising: a monoalkyl triamido tin compound represented by the chemical formula RSn—(NR′COR″) 3 , wherein R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ and R″ are independently a hydrocarbyl group with 1-10 carbon atoms. 2. The composition of claim 1 wherein R′ is a methyl group. 3. The composition of claim 1 wherein R″ is a methyl group. 4. The composition of claim 1 wherein R′ is a methyl group and R″ is a methyl group. 5. The composition of claim 4 wherein R comprises methyl (CH 3 —), ethyl (CH 3 CH 2 —), isopropyl (CH 3 CH 3 HC—), tert-butyl ((CH 3 ) 3 C—), tert-amyl (CH 3 CH 3 (CH 3 CH 2 )C—), sec-butyl (CH 3 (CH 3 CH 2 ) HC—), neopentyl (CH 3 ) 3 CCH 2 —), cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl. 6. The composition of claim 5 wherein the composition is crystalline and comprises no more than about 1 mole percent dialkyl tin contaminants. 7. The composition of claim 1 wherein R comprises methyl (CH 3 —), ethyl (CH 3 CH 2 —), isopropyl (CH 3 CH 3 HC—), tert-butyl ((CH 3 ) 3 C—), tert-amyl (CH 3 CH 3 (CH 3 CH 2 )C—), sec-butyl (CH 3 (CH 3 CH 2 ) HC—), neopentyl (CH 3 ) 3 CCH 2 —), cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl. 8. The composition of claim 1 wherein the composition is crystalline and comprises no more than about 1 mole percent dialkyl tin contaminants. 9. The composition of claim 1 wherein the composition is crystalline and comprises no more than about 0.5 mole percent dialkyl tin contaminants.
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Classifications
Compounds having one or more tin-oxygen linkages · CPC title
- C07F7/2284Primary
Compounds with one or more Sn-N linkages · CPC title
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Frequently asked questions
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- What does patent US12180240B2 cover?
- A pure composition comprises a monoalkyltin trialkoxide compound represented by the chemical formula RSn(OR′) 3 or a monoalkyl tin triamide compound represented by the chemical formula RSn(NR′ 2 ) 3 and no more than 4 mole % dialkyltin compounds relative to the total tin amount, where R is a hydrocarbyl group with 1-31 carbon atoms, and wherein R′ is a hydrocarbyl group with 1-10 carbon atoms…
- Who is the assignee on this patent?
- Inpria Corp
- What technology area does this patent fall under?
- Primary CPC classification C07F7/2284. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Dec 31 2024 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 12 related publications on this page (citations in our corpus or others sharing the same primary CPC).