Measurement device and measurement method

Patent metadata

Field	Value
Publication number	US-12174231-B2
Application number	US-201917275743-A
Country	US
Kind code	B2
Filing date	Sep 19, 2019
Priority date	Sep 26, 2018
Publication date	Dec 24, 2024
Grant date	Dec 24, 2024

Abstract

A measurement device includes an electric field generator, an electric field detector, a thickness gauge, and a processor. The electric field generator generates an alternating current electric field. The electric field detector detects the alternating current electric field generated by the electric field generator. The thickness gauge measures a thickness of a measurement target in a non-contact manner. The processor derives a calibration curve representing a relationship between a specific dielectric constant and an intensity of an alternating current electric field. The measurement target is insertable between the electric field generator and the electric field detector. The electric field detector detects an intensity of the alternating current electric field attenuated by the measurement target. The processor calculates a specific dielectric constant of the measurement target based on the detected intensity of the alternating current electric field, the measured thickness, and the derived calibration curve.

First claim

The invention claimed is:

1. A measurement device comprising:
an electric field generator configured to generate an alternating current electric field;
an electric field detector disposed to face the electric field generator at a distance from the electric field generator and configured to detect the alternating current electric field generated by the electric field generator;
a thickness gauge configured to measure a thickness of a measurement target in a non-contact manner; and
a processor configured to, using a plurality of samples whose specific dielectric constants are known, derive a plurality of calibration curves for each thickness of the plurality of samples, the plurality of calibration curves representing a relationship between a specific dielectric constant and an intensity of an alternating current electric field,
wherein the measurement target is insertable between the electric field generator and the electric field detector,
the electric field detector is configured to detect an intensity of the alternating current electric field attenuated by the measurement target, and
the processor is configured to calculate a specific dielectric constant of the measurement target based on the detected intensity of the alternating current electric field, the measured thickness of the measurement target, and a calibration curve associated with the measured thickness among the derived plurality of calibration curves,
wherein the processor is configured to obtain slopes and intercepts for each thickness of the plurality of samples from the derived plurality of calibration curves, to obtain a first function having a plurality of slopes as thickness variables, to obtain a second function having a plurality of intercepts as thickness variables, to obtain a slope and an intercept of a calibration curve associated with the measured thickness of the measurement target using the measured thickness, the first function, and the second function, and to calculate a specific dielectric constant of the measurement target using the obtained slope and the obtained intercept and the detected intensity of the alternating current electric field.

2. The measurement device according to claim 1 , wherein the electric field detector is an electric field sensor to which an electro-optic effect is applied.

3. The measurement device according to claim 1 ,
wherein the measurement target is a sheet- or film-shaped dielectric material,
a high-voltage signal is used as an excitation signal of the alternating current electric field generated from the electric field generator and a distance between the electric field generator and the electric field detector is several millimeters, and
in a case in which the measurement target is conveyed by a conveyance device at a high speed, the electric field generator and the electric field detector are disposed not to contact with the measurement target even if the measurement target vibrates in a vertical direction.

4. The measurement device according to claim 1 , further comprising a movement device configured to move the electric field generator, the electric field detector, and the thickness gauge in a horizontal direction orthogonal to a conveying direction of the measurement target,
wherein the processor is configured to measure a surface distribution of a specific dielectric constant of the measurement target.

5. The measurement device according to claim 1 , further comprising a storage storing the derived plurality of calibration curves.

6. The measurement device according to claim 1 , wherein the processor is configured to control a start and an end of electric field generation of the electric field generator and a magnitude of the electric field.

7. A measurement method using a measurement device comprising an electric field generator configured to generate an alternating current electric field, an electric field detector disposed to face the electric field generator at a distance from the electric field generator and configured to detect the alternating current electric field generated by the electric field generator, a thickness gauge configured to measure a thickness of a measurement target in a non-contact manner, and a processor configured to derive a calibration curve representing a relationship between a specific dielectric constant and an intensity of an alternating current electric field, wherein the measurement target is insertable between the electric field generator and the electric field detector, the measurement method comprising:
deriving, by the processor, using a plurality of samples whose specific dielectric constants are known, a plurality of calibration curves for each thickness of the plurality of samples, the plurality of calibration curves representing a relationship between the specific dielectric constant and the intensity of the alternating current electric field;
detecting, by the electric field detector, an intensity of the alternating current electric field attenuated by the measurement target whose specific dielectric constant is unknown;
measuring, by the thickness gauge, the thickness of the measurement target; and
calculating, by the processor, a specific dielectric constant of the measurement target based on the detected intensity of the alternating current electric field, the measured thickness of the measurement target, and a calibration curve associated with the measured thickness among the derived plurality of calibration curves,
wherein calculating the specific dielectric constant of the measurement target comprises:
obtaining, by the processor, slopes and intercepts for each thickness of the plurality of samples from the derived plurality of calibration curves;
obtaining, by the processor, a first function having a plurality of slopes as thickness variables;
obtaining, by the processor, a second function having a plurality of intercepts as thickness variables;
obtaining, by the processor, a slope and an intercept of a calibration curve associated with the measured thickness using the measured thickness, the first function, and the second function; and
calculating, by the processor, the specific dielectric constant of the measurement target using the slope and the intercept and the detected intensity of the alternating current electric field.

Assignees

• Yokogawa Electric Corp
• Univ Hosei

Inventors

• Katsuyama Jun
• Matsumoto Yoshinori
• Shinagawa Mitsuru

Classifications

• G01R29/08

  Measuring electromagnetic field characteristics · CPC title

• G01B21/08

  for measuring thickness · CPC title

• G01R27/2623 Primary

  Measuring-systems or electronic circuits (G01R27/2635, G01R27/2682 take precedence) · CPC title