Micro-electro mechanical system and manufacturing method thereof
US-11851321-B2 · Dec 26, 2023 · US
US12168604B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12168604-B2 |
| Application number | US-202017419818-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 1, 2020 |
| Priority date | Dec 30, 2019 |
| Publication date | Dec 17, 2024 |
| Grant date | Dec 17, 2024 |
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A micro-nano incremental mechanical surface treatment method, comprising the following steps: using a modification tool having a designable end to contact a surface of a substrate material, rotating the modification tool in a local region and compressing the material surface, presetting processing parameters by means of 3D modeling software, and after the tool has processed the entire surface, enabling the tool to move downwards to the indented surface compressed previously. The process continues until the surface material is compressed to a pre-defined thickness, thereby achieving the goals of grain refinement and surface performance improvement. By means of the present method, a workpiece having a complex shape can be flexibly and designably surface modified. The method has the advantages of high bonding strength, no pollution, and low cost.
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The invention claimed is: 1. A micro-nano incremental mechanical surface treatment method, comprising the following steps: (1) using an end of a modification tool to contact a surface of a substrate material, and presetting moving parameters of the modification tool by means of 3D modeling software; (2) rotating the modification tool in a local region of the surface of the substrate material, and moving the modification tool according to preset moving parameters in step (1) to compress the surface of the substrate material; (3) after the modification tool has processed the entire surface of the substrate material, enabling the modification tool to move downwards to the indented surface compressed previously; and (4) repeating step (2) and step (3) until the substrate material is compressed to a preset thickness: wherein the moving parameters in step (1) comprise a moving path, a tool rotating speed, a feeding speed, a single-layer downward compressing amount, a processing pass and a secondary feeding overlapping rate; wherein the moving path is a unidirectional, a reciprocating, a lattice, or a spiral, the tool rotating speed is in a range of 1000 rpm to 30000 rpm, the feeding speed is in a range of 1000 mm/min to 6000 mm/min, the single-layer downward compressing amount is in a range of 0.01 mm to 0.1 mm, the processing pass is in a range of 10 times to 30 times, and the secondary feeding overlapping rate is in a range of 2% to 10%. 2. The micro-nano incremental mechanical surface treatment method according to claim 1 , wherein in step (3), a downward moving distance is controlled according to the preset single-layer downward compressing amount. 3. The micro-nano incremental mechanical surface treatment method according to claim 1 , wherein in the whole processing process, the modification tool is assisted by an ultrasonic vibration device. 4. The micro-nano incremental mechanical surface treatment method according to claim 3 , wherein a static pressure of ultrasonic vibration of the ultrasonic vibration device is in a range of 150 N to 350 N, and a vibration amplitude is in a range of 2 μm to 7 μm. 5. The micro-nano incremental mechanical surface treatment method according to claim 1 , wherein the end of the modification tool is a ball head, a flat head or a needle head. 6. The micro-nano incremental mechanical surface treatment method according to claim 1 , wherein in step (3), a downward moving distance is controlled according to the preset single-layer downward compressing amount.
Surface micromachining · CPC title
for improving the physical properties of a device · CPC title
without movable or flexible elements (array of static structures for functionalising surfaces in B81C1/00206; manufacture of MEMS devices for specific applications, see relevant places, e.g. microreactors B01J19/0093, lab-on-chip B01L3/5027, micromixers B01F33/30) · CPC title
Treating or finishing by hammering or applying repeated pressure · CPC title
Surface micromachining, i.e. structuring layers on the substrate · CPC title
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