Chemical Liquid for Forming Water Repellent Protective Film
US-2019341246-A1 · Nov 7, 2019 · US
US12163087B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12163087-B2 |
| Application number | US-202017595797-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 4, 2020 |
| Priority date | Jun 21, 2019 |
| Publication date | Dec 10, 2024 |
| Grant date | Dec 10, 2024 |
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Please substitute the new Abstract submitted herewith for the original Abstract: The present disclosure provides a surface treatment agent capable of not only being prepared by dissolving raw materials in a short time but also exerting a good water repellency imparting effect, and a method for manufacturing a surface treated body with the use of the surface treatment agent. The surface treatment agent according to the present disclosure includes the following components: (I) at least one kind selected from the group consisting of silicon compounds represented by the following formulas (1) and (2); (II) at least one kind selected from the group consisting of a nitrogen-containing heterocyclic compound represented by the following general formula (3), a nitrogen-containing heterocyclic compound represented by the following general formula (4) and imidazole; (III) an organic solvent; and (IV) at least one kind selected from the group consisting of silicon compounds represented by the following formulas (5) and (6).
Opening claim text (preview).
The invention claimed is: 1. A surface treatment agent for surface treatment of a workpiece, comprising the following components: (I) at least one kind selected from the group consisting of silicon compounds represented by the following general formulas [1] and [2]; (II) at least one kind selected from the group consisting of a nitrogen-containing heterocyclic compound represented by the following general formula [3], a nitrogen-containing heterocyclic compound represented by the following general formula [4] and imidazole; (III) an organic solvent; and (IV) at least one kind selected from the group consisting of silicon compound represented by the following general formulas [5] and [6] (R 1 ) a (H) b Si[N(R 2 )C(═O)R 3 ] 4-a-b [1] where R 1 is each independently a C 1 -C 18 monovalent hydrocarbon group in which a part or all of hydrogen atoms may be substituted by a fluorine atom; R 2 is each independently a group selected from the group consisting of a C 1 -C 6 alkyl group in which a part or all of hydrogen atoms may be substituted by a fluorine atom, and a hydrogen atom; R 3 is each independently a C 1 -C 6 alkyl group in which a part or all of hydrogen atoms may be substituted by a fluorine atom; a is an integer of 1 to 3; b is an integer of 0 to 2; and the sum of a and b is 1 to 3, (R 4 ) c (H) d Si[OC(R 5 )═NSi(R 6 ) e (H) 3-e ] 4-c-d [2] where R 4 and R 6 are each independently a C 1 -C 18 monovalent hydrocarbon group in which a part or all of hydrogen atoms may be substituted by a fluorine atom; R 5 is each independently a group selected from the group consisting of a C 1 -C 6 alkyl group in which a part or all of hydrogen atoms may be substituted by a fluorine atom, and a hydrogen atom; c is an integer of 1 to 3; d is an integer of 0 to 2; e is an integer of 1 to 3; and the sum of c and d is 1 to 3, where R 7 and R 8 are each independently a divalent organic group consisting of carbon and/or nitrogen and hydrogen, in which the total number of carbon and nitrogen atoms is 1 to 9; and, in the case where the total number of carbon and nitrogen atoms is 2 or greater, there may exit a carbon atom that does not form a ring, where R 9 is a C 1 -C 6 alkyl group in which a part of all of hydrogen atoms may be substituted by a fluorine atom, a trialkylsilyl group having a C 1 -C 8 alkyl group in which a part of all of hydrogen atoms may be substituted by a fluorine atom, a C 2 -C 6 alkenyl group in which a part of all of hydrogen atoms may be substituted by a fluorine atom, a C 1 -C 6 alkoxy group in which a part of all of hydrogen atoms may be substituted by a fluorine atom, an amino group, an alkylamino group having a C 1 -C 6 alkyl group in which a part of all of hydrogen atoms may be substituted by a fluorine atom, a dialkylamino group having a C 1 -C 6 alkyl group in which a part of all of hydrogen atoms may be substituted by a fluorine atom, a C 1 -C 6 aminoalkyl group in which a part of all of hydrogen atoms may be substituted by a fluorine atom, a nitro group, a cyano group, a phenyl group, a benzyl group, or a halogen atom; and R 10 , R 11 and R 12 are each independently a C 1 -C 6 alkyl group in which a part or all of hydrogen atoms may be substituted by a fluorine atom, or a hydrogen atom, (R 13 ) f (H) g Si[OC(═O)R 14 ] 4-f-g [5] where R 13 is each independently a C 1 -C 18 monovalent hydrocarbon group in which a part or all of hydrogen atoms may be substituted by a fluorine atom; R 14 is each independently a C 1 -C 6 alkyl group in which a part or all of hydrogen atoms may be substituted by a fluorine atom; f is an integer of 1 to 3; g is an integer of 0 to 2; and the sum of f and g is 1 to 3, (R 15 ) h (H) i SiX 4-h-i [6] where R 15 is each independently a C 1 -C 18 monovalent hydrocarbon group in which a part or all of hydrogen atoms may be substituted by a fluorine atom; X is each independently a halogen atom, an alkylsulfonate group, or a perfluoroalkylsulfonate group; h is an integer of 1 to 3; i is an integer of 0 to 2; and the sum of h and i is 1 to 3. 2. The surface treatment agent according to claim 1 , wherein an amount of the component (IV) contained relative to the amount of the component (I) is more than or equal to 0.001 and less than 1 in terms of molar ratio. 3. The surface treatment agent according to claim 1 , wherein the component (IV) comprises at least one kind of silicon compound represented by the general formula [5] in which f is 3; and R 14 is a C 1 -C 6 fluorine-containing alkyl group. 4. The surface treatment agent according to claim 1 , wherein the component (IV) comprises (CH 3 ) 3 SiOC(═O)CF 3 . 5. The surface treatment agent according to claim 1 , wherein the component (IV) comprises a silicon compound represented by the general formula [6] in which h is 3; i is 0; and R 15 is a C 1 -C 6 alkyl group or a C 1 -C 6 fluorine-containing alkyl group. 6. The surface treatment agent according to claim 1 , wherein the component (IV) comprises a silicon compound represented by the general formula [6] in which X is a chlorine atom. 7. The surface treatment agent according to claim 1 , wherein the component (IV) comprises (CH 3 ) 3 SiCl. 8. The surface treatment agent according to claim 1 , wherein a concentration of the component (II) is 0.05 to 10 mass % with respect to a total amount of the components (I) to (IV). 9. The surface treatment agent according to claim 1 , wherein the component (II) is liquid at 25° C. and 1.0 atmospheric pressure. 10. The surface treatment agent according to claim 1 , wherein, in the general formula [4], R 9 is a C 1 -C 4 alkyl group or a trimethylsilyl group, and R 10 , R 11 and R 12 are hydrogen atoms, respectively. 11. The surface treatment agent according to claim 1 , wherein the component (II) is at least one selected from the group consisting of N-methylimidazole, N-ethylimidazole, N-propylimidazole, N-butylimidazole and trimethylsilylimidazole. 12. The surface treatment agent according to claim 1 , wherein the concentration of the component (I) is 0.1 to 35 mass % with respect to the total amount of the components (I) to (IV). 13. The surface treatment agent according to claim 1 , wherein the component (I) comprises at least one kind of silicon compound represented by the general formula [1] in which a is 3; R 2 is a methyl group; and R 3 is a C 1 -C 6 fluorine-containing alkyl group. 14. The surface treatment agent according to claim 1 , wherein the component (I) comprises (CH 3 ) 3 SiN(CH 3 )C(═O)CF 3 . 15. The surface treatment agent according to claim 1 , wherein the component (I) comprises at least one kind of silicon compound represented by the general formula [2] in which c and e are each 3; and R 5 is a methyl group or a trifluoromethyl group. 16. The surface treatment agent according to claim 1 , wherein the component (I) comprises (CH 3 ) 3 SiOC(CF 3 )═NSi(CH 3 ) 3 . 17. The surface treatment agent according to claim 1 , wherein the organic solvent is an aprotic solvent. 18. A method for manufacturing a surface treated body, comprising bringing the surface treatment agent according to claim 1 into contact with a surface of a workpiece and thereby surface treating the workpiece.
Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title
Cleaning during device manufacture · CPC title
Treatment after imagewise removal, e.g. baking · CPC title
containing silicon bound to organic groups containing atoms other than carbon, hydrogen, and oxygen · CPC title
Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) · CPC title
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