Aligner apparatus

Patent metadata

Field	Value
Publication number	US-12148646-B2
Application number	US-202117357354-A
Country	US
Kind code	B2
Filing date	Jun 24, 2021
Priority date	Jun 24, 2021
Publication date	Nov 19, 2024
Grant date	Nov 19, 2024

Abstract

An aligner system includes a motor, a rotating device, a control device, and a sensor. The motor generates a rotational drive force. The rotating device 11 is rotated by the rotational drive force generated by the motor, while supporting a wafer. The control device controls rotation of the rotating device, and performs a process of setting a rotational phase of the wafer to a predetermined value. The sensor emits a plurality of light beams traveling in different directions toward an edge of the wafer, and receives the light beams to detect a defect in the edge of the wafer.

First claim

What is claimed is:

1. An aligner system comprising:
a motor that generates a rotational drive force;
a rotating device that is rotated by the rotational drive force generated by the motor, while supporting a wafer;
a control device that controls rotation of the rotating device, and performs operations comprising:
concurrently, during a single rotation of the wafer, detecting a notch or orientation flat in the edge of the wafer indicating an alignment of the wafer, and detecting a defect in the edge of the wafer; and
setting a rotational phase of the wafer to a predetermined value based on the detected notch or orientation flat; and
a sensor that emits a plurality of light beams traveling in different directions toward an edge of the wafer, and receives the light beams to detect the notch or orientation flat, and the defect in the edge of the wafer.

2. The aligner system according to claim 1 , wherein
the control device performs operations further comprising recording a position of the detected notch or orientation flat; and
the control device performs operations such that setting the rotational phase of the wafer to the predetermined value comprises adjusting the rotation phase of the wafer to the predetermined value based on the recorded position of the detected notch or orientation flat.

3. The aligner system according to claim 1 ,
further comprising a communication device that communicates with an external device, wherein
the communication device transmits to the external device a result of detecting a defect in the edge of the wafer in association with identification information on the wafer.

4. The aligner system according to claim 1 , wherein
the sensor detects a defect in a side surface of the wafer, without detecting a defect in a principal surface of the wafer, and
the control device determines the presence or absence of a defect in the principal surface of the wafer, based on a defect in the side surface of the wafer.

5. The aligner system according to claim 1 , wherein
each of the plurality of light beams traveling in the different directions toward the edge of the wafer produces a representative current signal when received by the sensor, and
the control device is configured to detect the defect in the edge of the wafer based on the representative current signal.

6. The aligner system according to claim 5 , wherein
the sensor comprises a plurality of light receiving elements, and
the representative current signal comprises a different current signal based on which of the plurality of different light receiving elements receives the respective light beam.

7. The aligner system according to claim 5 , wherein
the sensor comprises a single light receiving element,
each of the plurality of light beams is transmitted at a different time, and
the representative current signal is based on the different time at which the respective light beam is received by the single light receiving element.

8. A control method for performing defect inspection and alignment of a wafer, the method comprising:
controlling a motor to generate a rotational drive force to rotate a rotating device supporting a wafer;
concurrently performing operations comprising:
controlling the motor to generate a single rotation of the wafer;
detecting a notch or orientation flat in an edge of the wafer indicating an alignment of the wafer; and
detecting a defect in the edge of the wafer; and

setting a rotational phase of the wafer to a predetermined value based on the detected notch or orientation flat in the edge of the wafer.

9. The control method according to claim 8 , further comprising
recording a position of the detected notch or orientation flat as the rotation phase of the wafer, wherein
setting the rotational phase of the wafer to the predetermined value comprises adjusting the rotation phase of the wafer to the predetermined value based on the recorded rotation phase.

10. The control method according to claim 8 ,
transmitting to an external device a result of detecting the defect in the edge of the wafer in association with identification information on the wafer.

11. The control method according to claim 8 , wherein
detecting a defect in the edge of the wafer comprises detecting a defect in a side surface of the wafer, without detecting a defect in a principal surface of the wafer, and
the method further comprises determining the presence or absence of a defect in the principal surface of the wafer, based on a defect in the side surface of the wafer.

12. The control method according to claim 8 , wherein detecting the notch or orientation flat and detecting the defect comprises detecting, by a sensor that emits a plurality of light beams traveling in different directions toward the edge of the wafer, and receives the light beams, the notch or orientation flat, and the defect.

13. A sensor for inspecting an edge of a wafer, comprising:
a housing;
a plurality of light projecting parts; and
a light receiving part, wherein
each of a plurality of light beams emitted from respective ones of the plurality of light projecting parts travels in a different direction toward the edge of the wafer;
each of the plurality of light beams produces a representative current signal when received in the light receiving part, and
a defect in the edge of the wafer is detectable based on the one or more of the representative current signals.

14. The sensor according to claim 13 , wherein
the light receiving part comprises a plurality of light receiving element corresponding to the light projecting parts,
each light receiving element of the plurality of light receiving elements generates a different current signal, and
the representative current signal is based on one or more of the different current signals.

15. The sensor according to claim 13 , wherein
each of the plurality of light beams is emitted from respective ones of the plurality of light projecting parts at different times,
the light receiving part comprises a single light receiving element, and
the representative current signal is based on the different time at which the respective light beam is received by the single light receiving element.

16. The sensor according to claim 13 , wherein the housing comprises a box-shaped member in which the plurality of light projecting parts and the light receiving part are housed.

17. The sensor according to claim 13 , wherein, the housing has a substantially U shape, and comprises a first portion and a second portion that are opposed to each other with an inspection space therebetween through which the edge of the wafer passes.

18. The sensor according to claim 13 , wherein the plurality of light-projecting parts are disposed in the first portion and the light receiving part is disposed in the second portion.

Assignees

• Kawasaki Heavy Ind Ltd
• Kawasaki Robotics Usa Inc

Inventors

• Tan Haruhiko
• BHARWANI Avish Ashok
• Chin George
• Jeyapalan Simon

Classifications

• H10W46/201

  located on the periphery of wafers, e.g. orientation notches or lot numbers · CPC title

• H10P72/0616 Primary

  Monitoring of warpages, curvatures, damages, defects or the like · CPC title

• H10W46/401

  for identification or tracking · CPC title

• H10W46/00

  Marks applied to devices, e.g. for alignment or identification · CPC title

• H10P72/53 Primary

  using optical controlling means · CPC title