Plasma uniformity control in pulsed DC plasma chamber

Patent metadata

Field	Value
Publication number	US-12148595-B2
Application number	US-202117537328-A
Country	US
Kind code	B2
Filing date	Nov 29, 2021
Priority date	Jun 9, 2021
Publication date	Nov 19, 2024
Grant date	Nov 19, 2024

Abstract

Embodiments provided herein generally include apparatus, e.g., plasma processing systems and methods for the plasma processing of a substrate in a processing chamber. In some embodiments, aspects of the apparatus and methods are directed to improving process uniformity across the surface of the substrate, reducing defectivity on the surface of the substrate, or both. In some embodiments, the apparatus and methods provide for improved control over the uniformity of a plasma formed over the edge of a substrate and/or the distribution of ion energies at the surface of the substrate. The improved control over the plasma uniformity may be used in combination with substrate handling methods, e.g., de-chucking methods, to reduce particulate-related defectivity on the surface of the substrate. In some embodiments, the improved control over the plasma uniformity is used to preferentially clean accumulated processing byproducts from portions of the edge ring during an in-situ plasma chamber cleaning process.

First claim

What is claimed is:

1. A processing method, comprising:
(i) generating, by use of a radio frequency (RF) signal from an RF generator, a plasma of gases or vapors delivered to a processing region defined by a chamber lid and a substrate support assembly, the substrate support assembly comprising:
a support base that is electrically coupled to the RF generator;
a first electrode that is disposed over the support base and is spaced apart from the support base by a first portion of dielectric material, wherein the RF signal establishes a first RF waveform at the first electrode;
a second portion of dielectric material disposed over the first electrode, the second portion of dielectric material forming a substrate supporting surface; and
a second electrode that is disposed a distance from a center of the first electrode, is spaced apart from the support base by a third portion of dielectric material, and is electrically coupled to an edge tuning circuit; and

(ii) establishing, by use of the RF signal and the tuning circuit, a second RF waveform at the second electrode, wherein one or more characteristics of the first RF waveform are different from characteristics of the second RF waveform.

2. The method of claim 1 , wherein the one or more different characteristics between the first RF waveform and the second RF waveform comprise:
(a) a difference in voltage amplitude ratio between the second RF waveform at the second electrode and the first RF waveform at the first electrode;
(b) a difference in current amplitude ratio between the second RF waveform and the first RF waveform;
(c) a phase difference between the second RF waveform at the second electrode and the first RF waveform at the first electrode; or
(d) a combination of (a), (b) or (c).

3. The method of claim 2 , wherein
a first portion of the plasma is formed between the chamber lid and the first electrode,
a second portion of the plasma is formed between the chamber lid and the second electrode, and
the one or more different characteristics between the second RF waveform and the first RF waveform are configured to control a plasma density in the second portion of the plasma relative to the plasma density in the first portion of the plasma, wherein the plasma density comprises a number of free electrons per cm 3 of the first and second portions of the plasma.

4. The method of claim 3 , further comprising:
(iii) adjusting one or more characteristics of the second RF waveform relative to the first RF waveform to increase the plasma density in the second portion of the plasma relative to the plasma density in the first portion of the plasma;
(iv) at least partially lifting a substrate from the substrate supporting surface; and
(v) after (iv), extinguishing the plasma.

5. The method of claim 2 , wherein
the plasma is a cleaning plasma formed of one or more cleaning gases,
a plasma density in the second portion of the cleaning plasma is greater than the plasma density in the first portion of the cleaning plasma, and
the method further comprises exposing surfaces of the substrate support assembly to the cleaning plasma to remove processing byproducts therefrom.

6. The method of claim 4 , wherein adjusting the one or more characteristics of the second RF waveform relative to the one or more characteristics of first RF waveform comprises changing a capacitance of one or more variable capacitors of an edge tuning circuit.

7. The method of claim 6 , wherein the edge tuning circuit is electrically coupled between the second electrode and the ground.

8. The method of claim 6 , wherein the edge tuning circuit is electrically coupled between the second electrode and the RF generator.

9. The method of claim 6 , wherein the edge tuning circuit is electrically coupled to the second electrode, the ground, and the RF generator.

10. The method of claim 6 , wherein generating the plasma comprises igniting and maintaining the plasma from the gases or vapors delivered to the processing region through capacitively coupling the plasma to the chamber lid and the substrate support assembly.

11. The method of claim 1 , wherein the RF signal has a frequency of about 1 MHz or greater.

12. The method of claim 11 , wherein the RF signal has a frequency of about 20 MHz or greater.

13. The method of claim 1 , further comprising establishing, using a first pulsed voltage waveform generator, a first pulsed voltage waveform at the first electrode.

14. The method of claim 13 , wherein
the first pulsed voltage waveform comprises a series of repeating cycles, and
a waveform within each cycle has a first portion that occurs during a first time interval and a second portion that occurs during a second time interval.

15. The method of claim 13 , further comprising establishing, using a second pulsed voltage waveform generator, a second pulsed voltage waveform at the second electrode.

16. The method of claim 13 , further comprising:
delivering, by use of a first direct-current (DC) voltage source, a chucking voltage to the first electrode to electrostatically chuck the substrate to the substrate support assembly.

17. The method of claim 16 , wherein
the first pulsed voltage waveform generator is electrically coupled to the first electrode using a first transmission line, the first transmission line comprising a first blocking capacitor, and
the first DC voltage source is electrically coupled between a first point of the first transmission line and ground, wherein the first point is between the first blocking capacitor and the first electrode.

18. The method of claim 17 , wherein generating the plasma comprises igniting and maintaining the plasma from the gases or vapors delivered to the processing region through capacitively coupling the plasma to the chamber lid and the substrate support assembly.

19. The method of claim 13 , further comprising:
delivering, by use of a second direct-current (DC) voltage source, a chucking voltage to the second electrode to electrostatically chuck the edge ring to a surface of the third portion of dielectric material.

20. The method of claim 19 , wherein
a second pulsed voltage waveform generator is electrically coupled to the second electrode using a second transmission line, the second transmission line comprising a second blocking capacitor, and
the second DC voltage source is electrically coupled between a second point of the second transmission line and ground, wherein the second point is between the second blocking capacitor and the second electrode.

Assignees

• Applied Materials Inc

Inventors

• Cui Linying
• Rogers James

Classifications

• H01J2237/334

  Etching · CPC title

• H01J37/32724

  Temperature · CPC title

• H01J37/32642

  Focus rings · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• H01J37/3244

  Gas supply means · CPC title