Thermal control of MEMS mirrors to limit resonant frequency shift

Patent metadata

Field	Value
Publication number	US-12140752-B2
Application number	US-202017137211-A
Country	US
Kind code	B2
Filing date	Dec 29, 2020
Priority date	Dec 29, 2020
Publication date	Nov 12, 2024
Grant date	Nov 12, 2024

Abstract

A micro-electromechanical system (MEMS) apparatus has an array of micro-mirrors and a control circuit for rotating the micro-mirrors synchronously at a resonant frequency. The MEMS apparatus includes elements with different Coefficients of Thermal Expansion (CTE) for a die substrate coupled to the array of micro-mirrors, a die attach layer, a chip package coupled to the die substrate and a printed circuit board coupled to the chip package. The apparatus provides mechanisms for reducing changes in the resonant frequency due to changes in temperature causing stresses due to a mismatch between the CTE of the different elements. A thermoelectric cooler is used, along with the optional addition of heating resistors, additional pins to distribute stress, and the widened vias allowing room for the pins to bend and relieve stress on the chip package.

First claim

What is claimed is:

1. A micro-electromechanical system (MEMS) apparatus for beam steering in a Light Detection and Ranging (LiDAR) system of an autonomous vehicle, the apparatus comprising:
a mirror having a reflective surface and at least first and second respective sides;
first and second supporting torsion springs, wherein the first and second supporting torsion springs have first ends, respectively, connected to the first and second respective sides of the mirror, on opposite sides, to support the mirror;
first and second common terminals connected to the first and second supporting torsion springs, respectively, on second ends of the first and second supporting torsion springs;
a plurality of first fingers extending from the mirror on first and second sides orthogonal to the first and second supporting torsion springs;
first and second bias terminals opposite the first and second sides of the mirror;
a plurality of second fingers extending from the first and second bias terminals, the plurality of second fingers being interleaved with the plurality of first fingers and partially overlapping the plurality of first fingers;
a control circuit for rotating the mirror around an axis of the first and second supporting torsion springs at a resonant frequency;
an oxide layer below the first and second common terminals and the first and second bias terminals;
a die substrate below the oxide layer having a first Coefficient of Thermal Expansion (CTE);
a die attach material coupled to the die substrate having a second CTE;
a chip package coupled to the die attach material and having a chip package substrate with a third CTE;
a printed circuit board coupled to the chip package, the printed circuit board having a fourth CTE; and
means for reducing changes in the resonant frequency due to changes in temperature causing stresses due to a mismatch between the first, second, third and fourth CTE.

2. The apparatus of claim 1 further comprising:
an array of MEMS mirrors over the die substrate, each MEMS mirror in the array having a reflective surface for intercepting a laser beam and redirecting it toward an environment to be detected.

3. The apparatus of claim 1 wherein the means for reducing changes in the resonant frequency comprises a temperature control element.

4. The apparatus of claim 3 wherein the temperature control element comprises a thermoelectric cooler (TEC).

5. The apparatus of claim 3 wherein the temperature control element comprises at least one heating resistor.

6. The apparatus of claim 1 wherein the means for reducing changes in the resonant frequency comprises a plurality of additional pins attached to the chip package for adding rigidity to the chip package.

7. The apparatus of claim 1 wherein the means for reducing changes in the resonant frequency comprises a plurality of vias providing bending space for a plurality of pins attached to the chip package.

8. A micro-electromechanical system (MEMS) apparatus comprising:
an array of micro-mirrors having a reflective surface;
a control circuit for rotating the array of micro-mirrors synchronously at a resonant frequency;
a die substrate coupled to the array of micro-mirrors and having a first Coefficient of Thermal Expansion (CTE);
a die attach material coupled to the die substrate having a second CTE;
a chip package coupled to the die substrate and having a chip package substrate with a third CTE;
a printed circuit board coupled to the chip package, the printed circuit board having a fourth CTE;
a temperature sensor mounted proximate the chip package for detecting a temperature proximate the array of micro-mirrors;
at least one temperature control element mounted proximate to the array of micro-mirrors; and
a temperature control circuit, coupled to the temperature sensor and the at least one temperature control element, for activating the at least one temperature control element in response to a change in temperature that will change the resonant frequency due to changes in temperature causing stresses due to a mismatch between the first, second, third and fourth CTE.

9. The apparatus of claim 8 wherein the at least one temperature control element comprises a thermoelectric cooler (TEC).

10. The apparatus of claim 9 wherein the at least one temperature control element further comprises:
a plurality of heating resistors proximate the array of micro-mirrors; and
wherein the temperature control circuit controls the temperature of the array of micro-mirrors using the TEC, and controls temperatures of different areas in the array of micro-mirrors using the plurality of heating resistors.

11. The apparatus of claim 9 wherein the temperature sensor comprises a thermistor.

12. The apparatus of claim 8 wherein the at least one temperature control element comprises a plurality of heating resistors proximate the array of micro-mirrors.

13. The apparatus of claim 12 wherein a first group of heating resistors proximate edges of the array of micro-mirrors are a different size than a second group of heating resistors proximate a central portion of the array of micro-mirrors.

14. The apparatus of claim 13 wherein the plurality of heating resistors form an array with multiple rows of heating resistors, the heating resistors in each row being connected in series.

15. A method for controlling a resonant frequency of an array of micro-mirrors in a micro-electromechanical system (MEMS) mirror chip, the method comprising:
providing a die substrate coupled to an array of micro-mirrors and having a first Coefficient of Thermal Expansion (CTE);
providing a die attach material coupled to the die substrate having a second CTE;
providing a chip package coupled to the die substrate and having a chip package substrate with a third CTE;
providing a printed circuit board coupled to the chip package, the printed circuit board having a fourth CTE;
rotating the array of micro-mirrors synchronously at a resonant frequency;
detecting a temperature proximate the array of micro-mirrors;
changing the temperature of the array of micro-mirrors in response to detecting a change in temperature that will change the resonant frequency due to changes in temperature causing stresses due to a mismatch between the first, second, third and fourth CTE.

16. The method of claim 15 further comprising cooling the array of micro-mirrors in response to detecting an increase in temperature that will change the resonant frequency due to an increase in temperature causing stresses due to a mismatch between the first, second, third and fourth CTE.

17. The method of claim 16 further comprising heating portions of the array of micro-mirrors.

18. The method of claim 16 further comprising providing control signals to a thermoelectric cooler (TEC) by a TEC controller to cause the cooling.

19. The method of claim 18 further comprising heating portions of the array of micro-mirrors with an array of heating resistors.

20. The method of claim 15 further comprising:
detecting a pattern reflected off the array of micro-mirrors;
determining if the pattern indicates the array of micro-mirrors is not operating at the resonant frequency; and
changing temperatures of portions of the array of micro-mirrors until the pattern indicates the array of micro-mirrors is operating at the resonant frequency.

Assignees

• Beijing Voyager Tech Co Ltd

Inventors

• Lee Sae Won
• Wang Youmin
• Pan Anan

Classifications

• B81B3/0018

  Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators · CPC title

• G01S7/4817

  relating to scanning · CPC title

• G01S7/4814

  of transmitters alone · CPC title

• H05K1/0203

  Cooling of mounted components (H05K1/0272 takes precedence) · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title