Reactor for coating particles in stationary chamber with rotating paddles

Patent metadata

Field	Value
Publication number	US-12134091-B2
Application number	US-202318212599-A
Country	US
Kind code	B2
Filing date	Jun 21, 2023
Priority date	Apr 24, 2019
Publication date	Nov 5, 2024
Grant date	Nov 5, 2024

Abstract

A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.

First claim

What is claimed is:

1. A method of coating particles, comprising:
dispensing particles into a lower portion of a vacuum chamber, wherein the lower portion of the vacuum chamber forms a half-cylinder having a horizontally extending axial axis;
evacuating the vacuum chamber through a vacuum port in an upper portion of the vacuum chamber;
rotating a drive shaft secured to a plurality of paddles such that the plurality of paddles orbit the drive shaft and agitate the particles in the lower portion of the vacuum chamber, the plurality of paddles including a plurality of groups of paddles positioned at different positions along the drive shaft with each group of paddles positioned in a common plane normal to the drive shaft while a powder bed provided by the particles remains in the lower portion of the vacuum chamber;
injecting a reactant or precursor gas through an aperture in the lower portion of the vacuum chamber as the plurality of paddles rotates such that the reactant or precursor gas flows upward through the powder bed in the lower portion of the vacuum chamber; and
withdrawing, through the aperture in the lower portion, the particles from the vacuum chamber.

2. The method of claim 1 , comprising coating the particles by atomic layer deposition or molecular layer deposition.

3. The method of claim 1 , wherein the particles comprise a core containing a drug.

4. The method of claim 1 , wherein each paddle of the plurality of groups of paddles has a primary planar surface with a normal intersecting a plane normal to the horizontally extending axial axis at an oblique angle such that rotating the drive shaft drives the particles in a direction parallel to the drive shaft.

5. The method of claim 4 , wherein the plurality of paddles comprise a first plurality of outer paddles at a first radial distance from the drive shaft and a first plurality of inner paddles at a second radial distance from the drive shaft, wherein the second radial distance is smaller than the first radial distance.

6. The method of claim 5 , wherein the first plurality of outer paddles are oriented at a first oblique angle so as to drive particles in a first direction along the axial axis and a second plurality of inner paddles are oriented at a second oblique angle that is opposite in sign to the first oblique angle so as to drive particles in a second direction along the axial axis opposite to the first direction.

7. The method of claim 6 , wherein the second oblique angle is equal in magnitude to the first oblique angle.

8. The method of claim 6 , wherein the plurality of paddles comprise a second plurality of outer paddles at a third radial distance from the drive shaft and a second plurality of inner paddles at a fourth radial distance from the drive shaft, wherein the fourth radial distance is smaller than the third radial distance, wherein the second plurality of outer paddles are oriented at a third oblique angle so as to drive particles in the second direction and the second plurality of inner paddles are oriented at a fourth oblique angle so as to drive particles in the first direction.

9. The method of claim 8 , wherein the third radial distance equals the first radial distance, the fourth radial distance equals the second radial distance, and wherein the third oblique angle is equal in magnitude and opposite in direction to the first oblique angle, and the fourth oblique angle is equal in magnitude and opposite in direction to the second oblique angle.

10. The method of claim 9 , wherein the third oblique angle equals the second oblique angle and the fourth oblique angle equals the first oblique angle.

11. The method of claim 9 , wherein the first plurality of outer paddles and the first plurality of inner paddles are positioned on a first side of a dividing plane through the vacuum chamber normal to the axial axis, and the second plurality of outer paddles and the second plurality of inner paddles are positioned on an opposite second side of the dividing plane.

12. The method of claim 11 , wherein rotation of the drive shaft causes the outer paddles of the first plurality of outer paddles and second plurality of outer paddles to push the particles toward the dividing plane and causes the inner paddles of the first plurality of inner paddles and second plurality of inner paddles to push the particles away from the dividing plane.

13. The method of claim 11 , wherein dispensing the particles comprises delivering particles through a port into the vacuum chamber positioned at the dividing plane.

14. The method of claim 1 , comprising sweeping along an entirety of a length of the vacuum chamber using the plurality of paddles.

15. The method of claim 1 , comprising maintaining a gap between outer edges of the paddles and an inner surface of the lower portion of a wall of the vacuum chamber.

16. The method of claim 15 , wherein the gap is 1-3 mm.

Assignees

• Applied Materials Inc

Inventors

• Frankel Jonathan
• Neikirk Colin C
• Narwankar Pravin K
• Truong Quoc
• Desai Govindraj
• Krishnasamy Sekar

Classifications

• B01F2101/22

  Mixing of ingredients for pharmaceutical or medical compositions · CPC title

• B01F27/112

  with arms, paddles, vanes or blades · CPC title

• B01F27/70

  with paddles, blades or arms · CPC title

• B05D1/60

  Deposition of organic layers from vapour phase (vapour phase deposition in general C23C14/00, C23C16/00) · CPC title

• C23C16/4417

  Methods specially adapted for coating powder · CPC title