Patterned substrate for light-emitting diode

Patent metadata

Field	Value
Publication number	US-12132147-B2
Application number	US-202217876546-A
Country	US
Kind code	B2
Filing date	Jul 29, 2022
Priority date	Jul 29, 2022
Publication date	Oct 29, 2024
Grant date	Oct 29, 2024

Abstract

A patterned substrate for light emitting diode includes a plurality of nodes and links protruding from a base plane of the substrate and base areas on the substrate, each pair of adjacent nodes is connected by a corresponding link, respectively. The nodes and links also can be concave nodes and concave links cutting into a surface of the substrate, each pair of adjacent concave nodes is connected by a corresponding concave link, respectively.

First claim

What is claimed is:

1. A substrate for light emitting diode, comprising base areas and a plurality of nodes and links protruding from a base plane of the substrate, wherein each pair of adjacent nodes is connected by a corresponding link, respectively, and the base areas are defined and exposed by the nodes and the links, wherein:
each node has a top surface and one or more sidewalls, the one or more sidewalls have an inclination angle with respect to the base plane of the substrate;
each link has a top surface of a rectangular shape and two sidewalls, the two sidewalls have an inclination angle with respect to the base plane of the substrate, and the links connect to the sidewall of the nodes, respectively;
wherein an area of the top surface of each of the nodes is in the range of 0.01-12.56 μm 2 , a width of the top surface of each of the links is in the range of 150-500 nm, a length of the top surface of each of the links is in the range of 500-3000 nm, a height between the base, plane and the top surface of the nodes is in the range of 500-2000 nm, and a height between the base plane and the top surface of each of the links is in the range of 500-2000 nm; and
a ratio of a total area of the top surface of the nodes and the top surface of the links to a total area of the top surface of the nodes, the top surface of the links, a projection area of the sidewalls of the nodes and the links to the base plane, and the base areas is in the range of 30%-80%.

2. The substrate of claim 1 , wherein the substrate is made of sapphire and the inclination angle of the sidewalls of the nodes is in the range of 35-55°.

3. The substrate of claim 1 , wherein the substrate is made of sapphire and the inclination angle of the sidewalls of the links is in the range of 35-55°.

4. The substrate of claim 1 , wherein the links have the same size and shape, the nodes have the same size and shape, and are evenly distributed on the substrate.

5. The substrate of claim 4 , wherein the top surface of the nodes is of a regular hexagon shape, a regular pentagon shape, a square shape, or a circular shape with an edge length or a diameter of the top surface in the range of 100-2000 nm.

6. The substrate of claim 5 , wherein the top surface of the nodes is of a regular hexagon shape and is coplanar with the top surface of the links, six links connect to six sidewalls of each of the nodes, respectively, or six links connect to six edges between the six sidewalls, respectively.

7. The substrate of claim 5 , wherein the top surface of the nodes is of a circular shape and is coplanar with the top surface of the links, six links connect to the sidewall of each of the nodes, respectively, and are distributed evenly along a circumference of the top surface of the nodes.

8. The substrate of claim 5 , wherein the top surface of the nodes is of a regular hexagon shape with six equal edges and is coplanar with the top surface of the links, a length of the edge of the top surface of the nodes is equal to the width of the top surface of the links, and six links connect to six sidewalls of each of the nodes, respectively, or
the top surface of the nodes is of a regular pentagon shape with five equal edges and is coplanar with the top surface of the links, a length of the edge of the top surface of the nodes is equal to the width of the top surface of the links, and five links connect to five sidewalls of each of the nodes, respectively, or
the top surface of the nodes is of a square shape with four equal edges and is coplanar with the top surface of the links, a length of the edge of the top surface of the nodes is equal to the width of the top surface of the links, and four links connect to four sidewalls of each of the nodes, respectively.

9. A UV light emitting diode formed on the substrate of claim 1 .

10. A substrate for light emitting diode, comprising a plurality of concave nodes and concave links cutting into a surface of the substrate and base areas on the surface of the substrate, wherein each pair of adjacent concave nodes is connected by a corresponding concave link, respectively, wherein:
each concave node has a bottom surface and one or more sidewalls, the one or more sidewalls have an inclination angle with respect to a base plane of the substrate;
each concave link has a bottom surface of a rectangular shape and two sidewalls, the two sidewalls have an inclination angle with respect to the base plane of the substrate, and the two sidewalls of the concave links connect to the sidewalls of the concave nodes, respectively;
an area of the bottom surface of each of the concave nodes is in the range of 0.01-12.56 μm 2 , a width of the bottom surface of the concave links is in the range of 100-450 nm, a length of the bottom surface of the concave links is in the range of 300-3000 nm, a height between the base plane and the bottom surface of the concave nodes is in the range of 200-800 nm, and a height between the base plane and the bottom surface of the concave links is in the range of 200-800 nm; and
a ratio of a total area of the bottom surface of the concave nodes and the bottom surface of the concave links to a total area of the bottom surface of the concave nodes, the bottom surface of the concave links, a projection area of the sidewalls of the nodes and links to the base plane, and the base areas is in the range of 30%-80%.

11. The substrate of claim 10 , wherein the concave links have the same size and shape, the concave nodes have the same size and shape and are evenly distributed in the substrate.

12. The substrate of claim 11 , wherein the bottom surface of the concave nodes is of a regular hexagon shape, a regular pentagon shape, a square shape, or a circular shape with an edge length or a diameter of the bottom surface in the range of 100-2000 nm.

13. The substrate of claim 12 , wherein the bottom surface of the concave nodes is of a regular hexagon shape and is coplanar with the bottom surface of the concave links, the sidewalls of six concave links connect to six sidewalls of each of the concave nodes, respectively, or the sidewalls of six concave links connect to six side edges between the six sidewalls, respectively.

14. The substrate of claim 12 , wherein the bottom surface of the concave nodes is of a circular shape and is coplanar with the bottom surface of the concave links, the sidewalls of six concave links connect to the sidewall of each of the concave nodes, respectively, and are distributed evenly along a circumference of the bottom surface of the concave nodes.

15. The substrate of claim 12 , wherein the bottom surface of the concave nodes is of a regular hexagon shape with six equal edges and is coplanar with the bottom surface of the concave links, a length of the edge of the bottom surface of the concave nodes is equal to the width of the bottom surface of the concave links, and six concave links connect to each of the concave nodes, respectively, with sidewalls of the concave nodes vanished, or
the bottom surface of the concave nodes is of a regular pentagon shape with five equal edges and is coplanar with the bottom surface of the concave links, a length of the edge of the bottom surface of the concave nodes is equal to the width of the bottom surface of the concave links, and five concave links connect to each of the concave nodes, respectively, with sidewalls of the concave nodes vanished, or
the bottom surface of the concave nodes is of a square shape with four equal edges and is coplanar with the bottom surface of the concave links, a length of the edge of the bottom surface of the concave nodes is equal to the width of the

Assignees

• Bolb Inc

Inventors

• Zhang Jianping
• Gao Ying
• Zhou Ling

Classifications

• H10H20/8162

  Current-blocking structures · CPC title

• H10H20/825

  containing nitrogen, e.g. GaN · CPC title

• H10H20/812 Primary

  within the light-emitting regions, e.g. having quantum confinement structures · CPC title

• H10H20/819 Primary

  characterised by their shape, e.g. curved or truncated substrates · CPC title

• H10H20/82

  Roughened surfaces, e.g. at the interface between epitaxial layers · CPC title