MEMs phased-array for LiDAR applications

Patent metadata

Field	Value
Publication number	US-12117606-B2
Application number	US-202017001477-A
Country	US
Kind code	B2
Filing date	Aug 24, 2020
Priority date	Aug 27, 2019
Publication date	Oct 15, 2024
Grant date	Oct 15, 2024

Abstract

An optical scanner including micro-electromechanical system phased-arrays suitable for use in a LiDAR system, and methods of operating the same are described. Generally, the scanner includes an optical transmitter having first phased-arrays to receive light from a light source, form a swath of illumination in a far field scene and to modulate phases of the light to sweep or steer the swath over the scene in two-dimensions (2D). An optical receiver in the scanner includes second phased-arrays to receive light from the far field scene and direct at least some of the light onto a detector. The second phased-arrays are configured to de-scan the received light by directing light reflected from the far field scene onto the detector while rejecting background light. In one embodiment the second phased-arrays direct light from a slice of the far field scene onto a 1D detector array.

First claim

What is claimed is:

1. An optical scanner comprising:
an optical transmitter to receive light from a light source and to modulate phases of at least some of the received light to project light onto a far field scene in two-dimensions, the two-dimensions including a first direction over which the light is dispersed to form a swath of illumination and a second dimension over which the swath is steered by modulating phases of the light received from the light source; and
an optical receiver including a number of first microelectromechanical system (MEMS) phased-arrays to receive light from the far field scene and to direct at least some of the received light onto a detector,
wherein the number of first MEMS phased-arrays are configured to de-scan the received light by directing light from the light source reflected from the far field scene onto the detector while rejecting background light.

2. The optical scanner of claim 1 the optical transmitter comprises a number of second MEMS phased-arrays to receive light from the light source and to modulate phases of at least some of the received light to project light onto the far field scene in two-dimensions.

3. The optical scanner of claim 2 wherein the optical transmitter further comprises projection optics to project light from the number of second MEMS phased-arrays to the far field scene, and wherein the projection optics comprise a lenticular array to disperse the light in the first direction to form the swath of illumination, and increase a field of view (FOV) of the optical scanner.

4. The optical scanner of claim 3 wherein the light source comprises vertical-cavity surface-emitting laser (VCSEL) array including a plurality of emitters to increase optical power and extend an eye-safe power limit.

5. The optical scanner of claim 4 wherein the optical transmitter further comprises illumination optics to illuminate the number of second MEMS phased-arrays with light from the light source, and wherein at the illumination optics include a lenticular array to individually illuminate one or more light modulators in the number of second MEMS phased-arrays.

6. The optical scanner of claim 5 wherein the optical receiver further comprises receiving optics to receive light from the far field scene and direct received light onto the number of first MEMS phased-arrays, and wherein the receiving optics comprises a lenticular array to increase an effective fill factor of the number of first MEMS phased-arrays.

7. The optical scanner of claim 1 wherein the detector comprises a one dimensional (1D) detector array and the optical receiver is a pointing-receiver in which the first MEMS phased-arrays selectively directs light reflected from a slice of the far field scene onto the 1D detector array while rejecting light reflected from the far field scene outside of the slice and background light.

8. The optical scanner of claim 1 wherein the number of first MEMS phased-arrays comprise a ribbon MEMS phased-array including plurality of ribbons suspended in parallel rows over a substrate, each ribbon having a light reflective surface and a length perpendicular to a long axis of the ribbon MEMS phased-array, and wherein the ribbon MEMS phased-array is configured to deflect at least a number of the plurality of ribbons towards the substrate to modulate phases of light reflected therefrom to scan the far field scene in an angular dimension and an axial dimension parallel to the long axis of the phased-array.

9. The optical scanner of claim 8 wherein the number of first MEMS phased-array comprise multiple ribbon MEMS phased-arrays arranged in line to increase an active aperture of the optical scanner.

10. The optical scanner of claim 9 wherein the ribbon MEMS phased-arrays further include damping structures between the plurality of ribbons and the substrate to modulate phases of light having long wavelengths.

11. The optical scanner of claim 8 wherein each of the plurality of ribbons are divided by posts along a length thereof to form a plurality of ribbon MEMS phased-arrays arranged in parallel to increase an active aperture of the optical scanner.

12. The optical scanner of claim 8 wherein the ribbon MEMS phased-array includes ribbons comprising a blaze profile to shift a 0 th order of light reflected from the ribbon MEMS phased-array.

13. An optical scanner comprising:
an optical transmitter including a number of microelectromechanical system (MEMS) phased-arrays to receive light from a light source and to project light onto a far field scene in two-dimensions, the two-dimensions including a first direction over which the light is dispersed to form a swath of illumination and a second dimension over which the swath is steered by modulating phases of at least some of the light received from the light source; and
an optical receiver to receive light including at least some light from the optical transmitter reflected from the far field scene and to direct at least some of the received light onto a detector.

14. The optical scanner of claim 13 wherein the optical transmitter further comprises projection optics to project light from the number of MEMS phased-arrays to the far field scene, and wherein the projection optics comprise a lenticular array to disperse the light in the first direction to form the swath of illumination, and increase a field of view (FOV) of the optical scanner.

15. The optical scanner of claim 13 wherein the light source comprises vertical-cavity surface-emitting laser (VCSEL) array including a plurality of emitters to increase optical power and extend an eye-safe power limit.

16. The optical scanner of claim 15 wherein the optical transmitter further comprises illumination optics to illuminate the number of MEMS phased-arrays with light from the light source, and wherein the illumination optics include a lenticular array to individually illuminate one or more light modulators in the number of MEMS phased-arrays.

17. The optical scanner of claim 13 wherein the number of MEMS phased-arrays comprise a ribbon MEMS phased-array including a plurality of ribbons suspended in parallel rows over a substrate, each ribbon having a light reflective surface and a length perpendicular to a long axis of the ribbon MEMS phased-array, and wherein the ribbon MEMS phased-array is configured to deflect at least a number of the plurality of ribbons towards the substrate to modulate phases of light received from the light source to project light onto the far field scene in an angular dimension and an axial dimension parallel to the long axis of the ribbon MEMS phased-array.

18. The optical scanner of claim 17 wherein the number of MEMS phased-arrays comprises multiple ribbon MEMS phased-array arranged in line to increase an active aperture of the optical scanner.

19. The optical scanner of claim 17 wherein the ribbon MEMS phased-array further includes damping structures between the plurality of ribbons and the substrate to modulate phases of light having long wavelengths.

20. The optical scanner of claim 17 wherein each of the plurality of ribbons are divided by posts along a length thereof to form a plurality of ribbon MEMS phased-arrays arranged in parallel to increase an active aperture of the optical scanner.

21. The optical scanner of claim 17 wherein the ribbon MEMS phased-array includes ribbons comprising a blaze profile.

22. A light detection and ranging (LiDAR) system comprising:
a microelectromechanical system (MEMS) phased-array;
a cohe

Assignees

• Silicon Light Machines Corp
• Screen Holdings Co Ltd

Inventors

• Ashida Yuki
• Hamann Stephen
• Solgaard Olav
• Payne Alexander
• Eng Lars
• Hunter James

Classifications

• B81B7/0067

  for controlling the passage of optical signals through the package · CPC title

• G01S7/4817

  relating to scanning · CPC title

• B81B3/0083

  Optical properties · CPC title

• B81B2201/047

  Optical MEMS not provided for in B81B2201/042 - B81B2201/045 · CPC title

• B81B7/02

  containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) · CPC title