Method of bonding substrates and separating a portion of the bonded substrates through the bond, such as to manufacture an array of liquid lenses and separate the array into individual liquid lenses

Patent metadata

Field	Value
Publication number	US-12116303-B2
Application number	US-202017634158-A
Country	US
Kind code	B2
Filing date	Aug 11, 2020
Priority date	Aug 15, 2019
Publication date	Oct 15, 2024
Grant date	Oct 15, 2024

Abstract

A method of forming a bond between substrates and manipulating the bond comprises: emitting a first laser energy onto a strip of an absorption material disposed between a first substrate and a second substrate until the strip diffuses into the first substrate and the second substrate resulting in workpiece with a bond between the first substrate and the second substrate; emitting a second laser energy through the workpiece at the bond to create a fault line through the bond, the first substrate, and the second substrate, the second laser energy provided by an approximated Bessel beam, the approximated Bessel beam incident upon the bond having a diameter that is greater than a width of the bond; and repeating emitting the second laser energy step along a length of the bond to create a series of fault lines through the bond, the series of fault lines forming a contour.

First claim

What is claimed is:

1. A method of forming a bond between substrates and manipulating the bond, the method comprising:
emitting a first laser energy onto a length and a width of a strip of an absorption material disposed between a first substrate and a second substrate until the strip of the absorption material diffuses into the first substrate and the second substrate resulting in a bond between the first substrate and the second substrate, thereby creating a workpiece comprising the first substrate bonded to the second substrate through the bond, the bond having a length and a width at least approximating the length and the width of the strip before the strip is diffused;
emitting a second laser energy through the workpiece at the bond to create a fault line through the first substrate and the second substrate, the second laser energy provided by an approximated Bessel beam, the approximated Bessel beam incident upon the bond having a diameter that is greater than the width of the bond; and
repeating emitting the second laser energy step along the length of the bond to create a series of fault lines forming a contour.

2. The method of claim 1 wherein:
the bond is not essentially transparent to the second laser energy.

3. The method of claim 1 further comprising:
separating a first portion of the workpiece from a second portion of the workpiece along the contour.

4. The method of claim 3 , wherein:
separating the first portion of the workpiece from the second portion of the workpiece along the contour comprises applying mechanical or thermal stress on or around the contour.

5. The method of claim 3 , wherein:
the first portion comprises one or more edges; and
at least one of the one or more edges comprises at least a portion of the bond between the first substrate and the second substrate.

6. The method of claim 3 , wherein:
each of the first portion and the second portion comprises the first substrate, the second substrate, and a portion of the width of the bond.

7. The method of claim 3 , wherein:
the bond is contiguous around a perimeter of the first portion.

8. The method of claim 1 further comprising:
emitting a third laser energy onto a layer of the absorption material disposed on either of the first substrate or the second substrate to remove a portion of the absorption material from the first substrate or the second substrate to form the strip of the absorption material.

9. The method of claim 8 , wherein:
after the strip of the absorption material is formed, a first portion of the layer of the absorption material remains disposed between the first substrate and the second substrate lateral to the strip, and a second portion of the layer of the absorption material remains disposed between the first substrate and the second substrate lateral to the strip.

10. The method of claim 9 , wherein:
the first portion of the layer of the absorption material and the second portion of the layer of the absorption material do not interfere with the approximated Bessel beam.

11. The method of claim 9 , wherein:
the first portion of the layer of the absorption material and the second portion of the layer of the absorption material are separated by a distance; and
the distance is greater than the diameter of the approximated Bessel beam that intersects with an incident plane defined by the first portion and the second portion, such that the first portion and the second portion do not interfere with the second laser energy creating the fault line during the emitting the second laser energy step.

12. The method of claim 1 , wherein:
the first substrate and the second substrate are glass substrates.

13. The method of claim 1 , wherein:
the first laser energy penetrates through either the first substrate or the second substrate before interacting with the strip of the absorption material to cause the absorption material to diffuse;
whichever of the first substrate or the second substrate through which the first laser energy penetrates before interacting with the strip of the absorption material is at least essentially transparent to a wavelength of the first laser energy; and
the absorption material is essentially opaque to the wavelength of the first laser energy.

14. The method of claim 13 , wherein:
both the first substrate and the second substrate are at least essentially transparent to the wavelength of the first laser energy.

15. The method of claim 1 , wherein:
the absorption material comprises a metal, a semiconductor, or a ceramic.

16. The method of claim 1 , wherein:
the strip of the absorption material has a thickness of at least 1 nm.

17. The method of claim 1 , wherein:
the first laser energy is provided by a Gaussian laser beam.

18. The method of claim 1 , wherein:
the width of the strip is between 5 μm and 350 μm.

19. The method of claim 1 , wherein:
the fault lines in the series of fault lines are separated by a distance of between 0.1 μm and 20 μm.

20. The method of claim 1 , wherein:
the second laser energy has a wavelength of any of 266 nm, 355 nm, 532 nm, or 1064 nm.

21. The method of claim 1 , wherein:
the second laser energy is provided in a pulse duration of 100 psec or less.

22. The method of claim 1 , wherein:
the approximated Bessel beam is generated by emitting the second laser energy in the form of a Gaussian laser beam and then manipulating the Gaussian laser beam with an axicon lens.

23. The method of claim 1 further comprising:
emitting a third laser energy onto a layer of the absorption material disposed between the first substrate and the second substrate to remove a portion of the absorption material to form the strip of the absorption material;
wherein, after the strip of the absorption material is formed, a first portion of the layer of the absorption material remains disposed between the first substrate and the second substrate lateral to the strip, and a second portion of the layer of the absorption material remains disposed between the first substrate and the second substrate lateral to the strip;
wherein, the first portion of the layer of the absorption material and the second portion of the layer of the absorption material are separated by a distance; and
wherein, the approximated Bessel beam has a diameter at an incident surface of the workpiece that is greater than the distance between the first portion of the layer of the absorption material and the second portion of the layer of the absorption material, such that the first portion and the second portion do not interfere with the second laser energy creating the fault line during the emitting the second laser energy step.

24. The method of claim 23 further comprising:
separating a first portion of the workpiece from a second portion of the workpiece along the contour;
wherein, the workpiece is an array of liquid lenses, and the first portion and the second portion are liquid lenses.

25. The method of claim 23 further comprising:
separating a first portion of the workpiece from a second portion of the workpiece along the contour;
wherein, the workpiece is an array of micro-electro-mechanical systems, and the first portion and the second portion are micro-electro-mechanical systems.

26. The method of claim 23 further comprising:
separating a first portion of the workpiece from a second portion of the workpiece along the contour;
wherei

Assignees

• Corning Inc

Inventors

• Wynne Thomas Mikio

Classifications

• G02B3/0031

  Replication or moulding, e.g. hot embossing, UV-casting, injection moulding · CPC title

• C03B33/04

  Cutting or splitting in curves, especially for making spectacle lenses · CPC title

• C03B23/203

  Uniting glass sheets (C03B23/24 takes precedence) · CPC title

• B81C2203/037

  Thermal bonding techniques not provided for in B81C2203/035 - B81C2203/036 · CPC title

• B81C3/001

  Bonding of two components · CPC title