Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump

Patent metadata

Field	Value
Publication number	US-12106950-B2
Application number	US-202117905441-A
Country	US
Kind code	B2
Filing date	Feb 23, 2021
Priority date	Mar 5, 2020
Publication date	Oct 1, 2024
Grant date	Oct 1, 2024

Abstract

Method for the regeneration of a volume getter pump in a vacuum apparatus with a volume getter pump and an ion getter pump where the operating voltage of the ion getter pump is reduced, the current through the ion getter pump is recorded for determination of the pressure in the vacuum apparatus and then a heating element of the NEG is controlled as a function of the current of the ion getter pump for the purpose of heating the NEG material.

First claim

The invention claimed is:

1. A method for the regeneration of a volume getter pump (NEG) in a vacuum apparatus with the NEG and an ion getter pump, where
an operating voltage of the ion getter pump is reduced to a voltage at which no effective pumping is performed by the ion getter pump but the ion getter pump continues to generate a pressure-dependent current,
the pressure-dependent current through the ion getter pump is recorded for determination of a pressure in the vacuum apparatus, and
a heating element of the NEG is controlled as a function of the pressure-dependent current through the ion getter pump for the purpose of heating an NEG material of the NEG while maintaining the operating voltage of the ion getter pump at the voltage at which no effective pumping is performed by the ion getter pump but the ion getter pump continues to generate the pressure-dependent current.

2. The method in accordance with claim 1 , where the operating voltage is reduced to less than 5 kV.

3. The method in accordance with claim 1 , where the heating element is switched off if the pressure-dependent current recorded through the ion getter pump corresponds to a pressure which lies above a first pre-set pressure.

4. The method in accordance with claim 3 , where the heat output of the heating element is increased if the pressure-dependent current recorded through the ion getter pump corresponds to a pressure which lies below a second pre-set pressure.

5. The method in accordance with claim 4 , where the first pre-set pressure and the second pre-set pressure corresponds to 10 −5 mbar.

6. A vacuum apparatus with a volume getter pump (NEG) and an ion getter pump, where the NEG and the ion getter pump are directly connected, where the NEG and the ion getter pump are connected to a control unit, and where the control unit is configured to:
reduce an operating voltage of the ion getter pump to a voltage at which no effective pumping is performed by the ion getter pump but the ion getter pump continues to generate a pressure-dependent current,
record the pressure-dependent current through the ion getter pump to determine a pressure in the vacuum apparatus; and control a heating element of the NEG as a function of the pressure-dependent current of the ion getter pump for the purpose of heating an NEG material of the NEG while maintaining the operating voltage of the ion getter pump at the voltage at which no effective pumping is performed by the ion getter pump but the ion getter pump continues to generate the pressure-dependent current.

7. A vacuum apparatus with a volume getter pump (NEG) and an ion getter pump, where the NEG and the ion getter pump are arranged separately from each other in the vacuum apparatus, where the NEG and the ion getter pump are connected to a control unit, and where the control unit is configured to:
reduce an operating voltage of the ion getter pump to a voltage at which no effective pumping is performed by the ion getter pump but the ion getter pump continues to generate a pressure-dependent current,
record the pressure-dependent current through the ion getter pump to determine a pressure in the vacuum apparatus; and control a heating element of the NEG as a function of the pressure-dependent current of the ion getter pump for the purpose of heating an NEG material of the NEG while maintaining the operating voltage of the ion getter pump at the voltage at which no effective pumping is performed by the ion getter pump but the ion getter pump continues to generate the pressure-dependent current.

8. The method in accordance with claim 1 , where the operating voltage is reduced to less than 3 kV.

9. The method in accordance with claim 1 , where the operating voltage is reduced to less than 1 kV.

Assignees

• Edwards Vacuum Llc

Inventors

• Thierley Marcus Hans Robert

Classifications

• H01J41/06

  with ionisation by means of cold cathodes · CPC title

• F04B39/14

  Provisions for readily assembling or disassembling · CPC title

• F04B39/12

  Casings; Cylinders; Cylinder heads; Fluid connections · CPC title

• F04B37/02 Primary

  for evacuating by absorption or adsorption · CPC title

• H01J41/20 Primary

  using gettering substances · CPC title