Method for manufacturing multi-stage compound eye lens

Patent metadata

Field	Value
Publication number	US-12105301-B2
Application number	US-202017758304-A
Country	US
Kind code	B2
Filing date	Aug 28, 2020
Priority date	Jan 19, 2020
Publication date	Oct 1, 2024
Grant date	Oct 1, 2024

Abstract

A method for manufacturing a multi-stage compound eye lens includes the steps of manufacturing a micropillar array using a photoetching method, then sputtering ZnO on the surface of the micropillar array, jet printing an ultraviolet curing adhesive onto gaps in the micropillar array using a micro jet printing machine, and controlling the morphology of microlens using the number of droplet dropping instances to obtain a microlens array; further respectively dissolving hexamethyl tetramine and zinc nitrate in deionized water, then pouring the hexamethyl tetramine solution into the zinc nitrate solution to obtain a mixed solution, placing the microlens array into the mixed solution, and placing is in a water bath kettle for a water bath, and finally, removing the microlens array from the mixed solution, rinsing it with deionized water, and drying same to obtain the multi-stage compound eye lens.

First claim

What is claimed is:

1. A method for manufacturing a multi-stage compound eye lens, comprising the steps of:
1) manufacturing a micropillar array using a photoetching method: spin-coating a photoresist 4620 on a glass slide, wherein a spin-coating speed is 1500 r/s, wherein the glass slide is placed on a drying table for 5 minutes, and repeatedly spin-coating the photoresist on the glass slide to obtain a microporous array with a thickness of 22 μm, which is a sample 1 ; after turning over the sample 1 twice by PDMS, obtaining a microporous array mold of PDMS, which is a sample 2 ; pouring NOA61 UV-curable adhesive on a surface of the sample 2 , pressing it on the glass slide, and then exposing it by a UV exposure machine for 100 s, and demolding the micropillar array with a height of 22 μm to obtain a sample 3 ;
2) sputtering 30 nm of ZnO on a surface of the sample 3 to obtain a sample 4 , jet-printing an ultraviolet curing adhesive onto gaps in the micropillar array using a micro jet printing machine, and controlling a morphology of microlenses using 2-12 number of droplets, and obtaining a sample 5 with a microlens array;
3) dissolving 7 g of hexamethyl tetramine and 14.87 g of zinc nitrate in deionized water respectively and stir for 20 minutes to obtain a hexamethyl tetramine solution and a zinc nitrate solution respectively, then pouring the hexamethyl tetramine solution into the zinc nitrate solution, and mixing and stirring for 15 minutes to obtain a mixed solution, and placing the sample 5 into the mixed solution and placing it in a water bath at 90° C. for 80 minutes to obtain a sample 6 ; and
4) rinsing the sample 6 with deionized water for 2 minutes and drying it on a drying table at 60° ° C. for 50 minutes to obtain the multi-stage compound eye lens.

Assignees

• Univ Xi An Jiaotong

Inventors

• Mei Xuesong
• Wang Wenjun
• Li Jiang
• Pan Aifei
• Liu Bin
• Cui Jianlei

Classifications

• G03F7/162

  Coating on a rotating support, e.g. using a whirler or a spinner · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• C23C14/34

  Sputtering · CPC title

• C23C14/086

  of zinc, germanium, cadmium, indium, tin, thallium or bismuth · CPC title

• G03F7/0005

  Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor · CPC title