Methods of making nanopowders, nanoceramic materials and nanoceramic components

Patent metadata

Field	Value
Publication number	US-12098107-B2
Application number	US-202318140372-A
Country	US
Kind code	B2
Filing date	Apr 27, 2023
Priority date	Oct 27, 2017
Publication date	Sep 24, 2024
Grant date	Sep 24, 2024

Abstract

Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.

First claim

What is claimed is:

1. A chamber component for a processing chamber, comprising:
a sintered bulk nanoceramic material, the sintered bulk nanoceramic material comprising a first material and a second material, the first material comprising a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof, and the second material comprising a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof,
the sintered bulk nanoceramic material formed from a plurality of nanoparticles, at least a portion of the plurality of nanoparticles comprising:
a core particle comprising the first material; and
a thin film coating over the core particle, the thin film coating comprising the second material,

wherein the portion of the plurality of nanoparticles have a donut-shape comprising a spherical form with indentations on opposite sides, and
wherein the plurality of nanoparticles are sintered together to form the chamber component comprising the sintered bulk nanoceramic material.

2. The component of claim 1 , wherein the first material is selected from the group consisting of yttrium fluoride (YF 3 ), yttrium oxyfluoride (Y x O y F 2 ), erbium fluoride (ErF 3 ), erbium oxyfluoride (Er x O y F z ), dysprosium fluoride (DyF 3 ), dysprosium oxyfluoride (Dy x O y F z ), gadolinium fluoride (GdF 3 ), gadolinium oxyfluoride (Gd x O x F z ), scandium fluoride (ScF 3 ), scandium oxyfluoride (Sc x O y F z ) and combinations thereof, and
the second material is selected from the group consisting of yttria (Y 2 O 3 ), yttrium fluoride (YF 3 ), yttrium oxyfluoride (Y x O y F z ), erbium oxide (Er 2 O 3 ), erbium fluoride (ErF 3 ), erbium oxyfluoride (Er x O y F z ), dysprosium oxide (Dy 2 O 3 ), dysprosium fluoride (DyF 3 ), dysprosium oxyfluoride (Dy x O y F z ), gadolinium oxide (Gd 2 O 3 ), gadolinium fluoride (GdF 3 ), gadolinium oxyfluoride (Gd x O y F z ), scandium oxide (Sc 2 O 3 ), scandium fluoride (ScF 3 ), scandium oxyfluoride (Sc x O y F z ) and combinations thereof, or
wherein the sintered bulk nanoceramic material comprises Y 3 Al 5 O 12 (YAG), Y 4 Al 2 O 9 (YAM), YAlO 3 (YAP), Y 2 O 3 —ZrO 2 solid solution, Er 4 Al 5 O 12 (EAG), Er 4 Al 2 O 9 (EAM) or ErAlO 3 (EAP).

3. The component of claim 1 , wherein the sintered bulk nanoceramic material comprises:
a density of about 1/cm 3 to about 10/cm 3 ,
a flexural strength of about 170 MPA to about 250 MPA,
a modulus of elasticity of about 100 GPA to about 300 GPA,
a fracture toughness of about 0.1 Mpam 1/2 to about 5.0 Mpam 1/2 ,
a coefficient of thermal expansion of about 1.0×10 6 to about 15×10 6 ,
a volumetric resistivity of about 1.0×10 16 Ohm-cm to about 10×10 16 Ohm-cm,
a dielectric constant at 13.56 MHz of about 5 to about 25,
a dielectric loss tangent at 13.56 MHz of less than about 10×10 4
a thermal conductivity of about 1.0 W/mK to about 15 W/mK, or
a combination of any two or more thereof.

4. The component of claim 1 , wherein the chamber component is selected from the group consisting of a shower head, a nozzle, a gas distribution plate, and a chamber lid.

5. The chamber component of claim 1 , wherein the chamber component is formed by a method comprising:
(a) filling a mold with the plurality of nanoparticles; and
(b) sintering the plurality of nanoparticles to form the nanoceramic component.

6. A chamber component for a processing chamber, comprising:
a sintered nanoceramic coating on a surface of the chamber component, the sintered nanoceramic coating comprising a first material and a second material, the first material comprising a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof, and the second material comprising a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof,
wherein the sintered nanoceramic coating is formed by a method comprising:
plasma spraying a nanopowder onto a surface of the chamber component, wherein the nanopowder comprises a plurality of nanoparticles, at least a portion of the plurality of nanoparticles comprising:
a core particle comprising the first material; and
a thin film coating over the core particle, the thin film coating comprising the second material,
wherein the portion of the plurality of nanoparticles has a donut-shape comprising a spherical form with indentations on opposite sides; and
sintering the plurality of nanoparticles to form the sintered nanoceramic coating on the surface of the chamber component.

7. The component of claim 6 , wherein the first material is selected from the group consisting of yttrium fluoride (YF 3 ), yttrium oxyfluoride (Y x O y F z ), erbium fluoride (ErF 3 ), erbium oxyfluoride (Er x O y F z ), dysprosium oxide (Dy 2 O 3 ), dysprosium fluoride (DyF 3 ), dysprosium oxyfluoride (Dy x O y F z ), gadolinium oxide (Gd 2 O 3 ), gadolinium fluoride (GdF 3 ), gadolinium oxyfluoride (Gd x O x F z ), scandium oxide (Sc 2 O 3 ), scandium fluoride (ScF 3 ), scandium oxyfluoride (Sc x O y F z ) and combinations thereof, and
the second material is selected from the group consisting of yttria (Y 2 O 3 ), yttrium fluoride (YF 3 ), yttrium oxyfluoride (Y x O y F z ), erbium oxide (Er 2 O 3 ), erbium fluoride (ErF 3 ), erbium oxyfluoride (Er x O y F z ), dysprosium oxide (Dy 2 O 3 ), dysprosium fluoride (DyF 3 ), dysprosium oxyfluoride (Dy x O y F 2 ), gadolinium oxide (Gd 2 O 3 ), gadolinium fluoride (GdF 3 ), gadolinium oxyfluoride (Gd x O y F z ), scandium oxide (Sc 2 O 3 ), scandium fluoride (ScF 3 ), scandium oxyfluoride (Sc x O y F 2 ) and combinations thereof, or
wherein the sintered nanoceramic coating comprises Y 3 Al 5 O 12 (YAG), Y 4 Al 2 O 9 (YAM), YAlO 3 (YAP), Y 2 O 3 —ZrO 2 solid solution, Er 3 Al 5 O 12 (EAG), Er 4 Al 2 O 9 (EAM) or ErAlO 3 (EAP), or
wherein the sintered nanoceramic coating comprises about 60 mol % to about 70 mol % of yttrium oxide and about 30 mol % to about 40 mol % of zirconium oxide.

8. The component of claim 6 , wherein the sintered nanoceramic coating comprises:
a density of about 1/cm 3 to about 10/cm 3 ,
a flexural strength of about 170 MPA to about 250 MPA,
a modulus of elasticity of about 100 GPA to about 300 GPA,
a fracture toughness of about 0.1 Mpam 1/2 to about 5.0 Mpam 1/2
a coefficient of thermal expansion of about 1.0×10 6 to about 15×10 6 ,
a volumetric resistivity of about 1.0×10 16 Ohm-cm to about 10×10 16 Ohm-cm,
a dielectric constant at 13.56 MHz of about 5 to about 25,
a dielectric loss tangent at 13.56 MHz of less than about 10×10 4
a thermal conductivity of about 1.0 W/mK to about 15 W/mK, or
a combination of any two or more thereof.

9. The component of claim 6 , wherein the semiconductor processing chamber component is selected from the group consisting of a shower head, a nozzle, a gas distribution plate, and a chamber lid.

10. The component of claim 6 , wherein the article comprises aluminum, anodized aluminum, alumina, stainless steel, titanium, silicon, silicon carbide, a ceramic, yttrium oxide, Y 3 Al 5 O 12 (YAG) or AlN.

Assignees

• Applied Materials Inc

Inventors

• Zhan Guodong
• Wu Xiaowei
• He Xiao Ming
• Sun Jennifer Y

Classifications

• C01F17/218

  Yttrium oxides or hydroxides · CPC title

• C01F17/265

  Fluorides · CPC title

• C23C16/405

  of refractory metals or yttrium · CPC title

• C04B2235/3222

  Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4) · CPC title

• C04B35/645

  Pressure sintering · CPC title