Plasma treatment process to densify oxide layers

Patent metadata

Field	Value
Publication number	US-12094709-B2
Application number	US-202117390151-A
Country	US
Kind code	B2
Filing date	Jul 30, 2021
Priority date	Jul 30, 2021
Publication date	Sep 17, 2024
Grant date	Sep 17, 2024

Abstract

Embodiments of the present disclosure generally relate to methods for gap fill deposition and film densification on microelectronic devices. The method includes forming an oxide layer containing silicon oxide and having an initial wet etch rate (WER) over features disposed on the substrate, and exposing the oxide layer to a first plasma treatment to produce a treated oxide layer. The first plasma treatment includes generating a first plasma by a first RF source and directing the first plasma to the oxide layer by a DC bias. The method also includes exposing the treated oxide layer to a second plasma treatment to produce a densified oxide layer. The second plasma treatment includes generating a second plasma by top and side RF sources and directing the second plasma to the treated oxide layer without a bias. The densified oxide layer has a final WER of less than one-half of the initial WER.

First claim

What is claimed is:

1. A method for processing a substrate, comprising:
forming an oxide layer comprising silicon oxide and having an initial wet etch rate (WER) over features disposed on the substrate, wherein the initial WER is determined with an etchant having a concentration;
exposing the oxide layer to a first plasma treatment to produce a treated oxide layer while maintaining the substrate at a first temperature of less than 600° C., wherein the first plasma treatment comprises:
generating a first plasma by a first RF source; and
directing the first plasma to the oxide layer by a DC bias; and then

exposing the treated oxide layer to a second plasma treatment to produce a densified oxide layer while maintaining the substrate at a second temperature of less than 600° C., wherein the densified oxide layer has a final WER of less than one-half of the initial WER, wherein the final WER is determined with the etchant having the concentration, wherein the oxide layer comprising silicon oxide has a normalized wet etch rate ratio (WERR) of 1 and the densified oxide layer has a final WERR of about 0.1 to about 0.48, and wherein the second plasma treatment comprises:
generating a second plasma by a top RF source and a side RF source; and
directing the second plasma to the treated oxide layer without a bias.

2. The method of claim 1 , wherein the initial WER is greater than 4 Å/min and the final WER is less than 2 Å/min.

3. The method of claim 2 , wherein the initial WER is about 5 Å/min to about 10 Å/min.

4. The method of claim 1 , wherein the final WERR is about 0.1 to about 0.35.

5. The method of claim 1 , wherein the first RF source has a power of about 0.1 kW to about 3 kW when generating the first plasma during the first plasma treatment.

6. The method of claim 1 , wherein the DC bias has a voltage of about 0.1 kV to about 10 kV during the first plasma treatment.

7. The method of claim 1 , wherein the oxide layer is exposed to the first plasma at a dosage value of about 1×10 14 ion/cm 2 to about 1×10 18 ion/cm 2 during the first plasma treatment.

8. The method of claim 1 , wherein each of the top RF source and the side RF source independently has a power of about 1 kW to about 9 kW when generating the second plasma during the second plasma treatment.

9. The method of claim 1 , wherein each of the first temperature and the second temperature is independently about 300° C. to about 575° C.

10. The method of claim 1 , wherein the densified oxide layer has a porosity of less value compared to the porosity of the treated oxide layer from which the densified oxide layer is prepared from.

11. The method of claim 1 , wherein forming the oxide layer further comprises:
depositing a flowable film comprising a polysilazane on the features;
curing the polysilazane to produce a solidified film comprising silicon, nitrogen, and hydrogen; and
converting the solidified film to the oxide layer comprising silicon oxide during an oxidation process.

12. The method of claim 11 , wherein the oxidation process comprises exposing the solidified film to steam during an anneal process.

13. The method of claim 12 , wherein the substrate is maintained at a temperature of less than 600° C. during the anneal process.

14. The method of claim 11 , wherein the polysilazane is cured with ultraviolet light to produce the solidified film.

15. The method of claim 1 , further comprising depositing a fill layer over the densified oxide layer.

16. The method of claim 15 , wherein the fill layer comprises silicon oxide and is deposited by chemical vapor deposition.

17. The method of claim 1 , wherein the features disposed on the substrate are a plurality of fins.

18. The method of claim 17 , wherein each of the fins comprises a film stack containing alternating pairs of layers, wherein each of the pairs of layers contains a silicon-germanium layer and a silicon layer disposed on one another.

19. A method for processing a substrate, comprising:
forming an oxide layer comprising silicon oxide and having an initial wet etch rate (WER) over features disposed on the substrate, wherein the initial WER is determined with an etchant having a concentration, and wherein forming the oxide layer comprises;
depositing a flowable film comprising a polysilazane on the features;
curing the polysilazane to produce a solidified film comprising silicon, nitrogen, and hydrogen; and
converting the solidified film to the oxide layer comprising silicon oxide during an oxidation process;

exposing the oxide layer to a first plasma treatment to produce a treated oxide layer, wherein the first plasma treatment comprises:
generating a first plasma by a first RF source; and
directing the first plasma to the oxide layer by a DC bias; and then

exposing the treated oxide layer to a second plasma treatment to produce a densified oxide layer, wherein the densified oxide layer has a final WER of less than one-half of the initial WER, wherein the final WER is determined with the etchant having the concentration, and wherein the oxide layer comprising silicon oxide has a normalized wet etch rate ratio (WERR) of 1 and the densified oxide layer has a final WERR of about 0.1 to about 0.4, and wherein the second plasma treatment comprises:
generating a second plasma by a top RF source and a side RF source; and
directing the second plasma to the treated oxide layer without a bias.

20. A method for processing a substrate, comprising:
forming an oxide layer comprising silicon oxide and having an initial wet etch rate (WER) over a plurality of fins disposed on the substrate, wherein the initial WER is determined with an etchant having a concentration, and wherein each of the fins comprises a film stack containing alternating pairs of layers, wherein each of the pairs of layers contains a silicon-germanium layer and a silicon layer disposed on one another;
exposing the oxide layer to a first plasma treatment to produce a treated oxide layer, wherein the first plasma treatment comprises:
generating a first plasma by a first RF source; and
directing the first plasma to the oxide layer by a DC bias; and then

exposing the treated oxide layer to a second plasma treatment to produce a densified oxide layer, wherein the initial WER is greater than 4 Å/min, wherein the densified oxide layer has a final WER of less than 2 Å/min, wherein the final WER is determined with the etchant having the concentration, and wherein the second plasma treatment comprises:
generating a second plasma by a top RF source and a side RF source; and
directing the second plasma to the treated oxide layer without a bias, and

wherein the oxide layer comprising silicon oxide has a normalized wet etch rate ratio (WERR) of 1 and the densified oxide layer has a final WERR of about 0.1 to about 0.48.

Assignees

• Applied Materials Inc

Inventors

• Lee Jung Chan
• Park Mun Kyu
• Lee Jun
• Lee Euhngi
• Shim Kyu-Ha
• Mittal Deven Matthew Raj
• Jo Sungho
• Miller Timothy
• Liang Jingmei
• Jha Praket Prakash
• Kamath Sanjay G

Classifications

• H10P14/69215

  the material being a silicon oxide, e.g. SiO2 · CPC title

• H10P14/6334

  using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition (deposition by physical ablation of a target H10P14/6329) · CPC title

• H10P14/6304

  Formation by oxidation, e.g. oxidation of the substrate · CPC title

• H10P14/6532 Primary

  by exposure to a plasma · CPC title

• H10P14/6529

  by exposure to a gas or vapour · CPC title