Sensing an ICMFB output to detect functional state of a mems sensor

Patent metadata

Field	Value
Publication number	US-12092653-B2
Application number	US-202117472126-A
Country	US
Kind code	B2
Filing date	Sep 10, 2021
Priority date	May 18, 2017
Publication date	Sep 17, 2024
Grant date	Sep 17, 2024

Abstract

In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.

First claim

What is claimed is:

1. A method comprising:
monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit, the ICMFB coupled to a microelectromechanical system (MEMS) sensor through a plurality of nodes, the monitoring comprising:
measuring, by a sample and hold (S/H) circuit, a first ICMFB voltage generated by the ICMFB circuit operating in a first operating mode, and
measuring, by the S/H circuit, a second ICMFB voltage generated by the ICMFB circuit in a second operating mode, the second operating mode being a reverse input polarity mode of the first operating mode;

computing a first differential voltage corresponding to a difference between the first ICMFB voltage and the second ICMFB voltage;
reading a predetermined voltage stored in a memory;
computing a second differential voltage corresponding to a difference between the first differential voltage and the predetermined voltage, wherein the predetermined voltage is read from memory before computing the second differential voltage; and
determining whether all of the plurality of nodes are electrically connected to the ICMFB circuit in accordance with the second differential voltage.

2. The method of claim 1 , wherein the determining whether all of the plurality of nodes is electrically connected comprises computing a third differential voltage corresponding to a difference between the second differential voltage and a threshold voltage.

3. The method of claim 1 , further comprising:
measuring a minimum voltage corresponding to a minimum value of the first differential voltage; and
determining whether all of the plurality of nodes is electrically connected based on a comparison between the minimum voltage and a threshold value stored in the memory.

4. The method of claim 1 , further comprising storing the first differential voltage and the second differential voltage in the memory.

5. The method of claim 1 , wherein the ICMFB circuit comprises a first terminal and a second terminal, wherein the MEMS sensor comprises a first terminal and a second terminal, the method further comprising:
providing the first operating mode corresponding to the first terminal of the MEMS sensor coupled to the first terminal of the ICMFB circuit and the second terminal of the MEMS sensor coupled to the second terminal of the ICMFB circuit; and
providing the second operating mode corresponding to the first terminal of the MEMS sensor coupled to the second terminal of the ICMFB circuit and the second terminal of the MEMS sensor coupled to the first terminal of the ICMFB circuit, the second operating mode being a reverse input polarity mode of the first operating mode.

6. The method of claim 1 , wherein the MEMS sensor is coupled to a differential sense interface.

7. A circuit comprising:
an application specific integrated circuit (ASIC) comprising an input common-mode feedback (ICMFB) circuit coupled to a MEMS sensor through a plurality of nodes, wherein the ASIC is configured to monitor an input common-mode feedback (ICMFB) voltage generated by the ICMFB circuit, the monitoring comprising:
measure a first ICMFB voltage generated by the ICMFB circuit operating in a first operating mode;
measure a second ICMFB voltage generated by the ICMFB circuit in a second operating mode, the second operating mode being a reverse input polarity mode of the first operating mode;
compute a first differential voltage corresponding to a difference between the first ICMFB voltage and the second ICMFB voltage;
compute a second differential voltage corresponding to a difference between the first differential voltage and a predetermined voltage; and
determine whether all of the plurality of nodes are electrically connected to the ICMFB circuit in accordance with the second differential voltage.

8. The circuit in claim 7 , wherein the ASIC is further configured to read the predetermined voltage stored in a memory before computing the second differential voltage.

9. The circuit in claim 7 , wherein the determining whether all of the plurality of nodes is electrically connected comprises computing a third differential voltage corresponding to a difference between the second differential voltage and a threshold voltage.

10. The circuit in claim 7 , wherein the ASIC is further configured to store the first differential voltage and the second differential voltage in a memory.

11. The circuit in claim 7 , wherein the ASIC is further configured to:
measure a minimum voltage corresponding to a minimum value of the first differential voltage; and
determine whether all of the plurality of nodes is electrically connected based on a comparison between the minimum voltage and a threshold value stored in a memory.

12. The circuit in claim 7 , wherein the ICMFB circuit comprises a first terminal and a second terminal, wherein the MEMS sensor comprises a first terminal and a second terminal, the ASIC further configured to:
provide the first operating mode corresponding to the first terminal of the MEMS sensor coupled to the first terminal of the ICMFB circuit and the second terminal of the MEMS sensor coupled to the second terminal of the ICMFB circuit; and
provide the second operating mode corresponding to the first terminal of the MEMS sensor coupled to the second terminal of the ICMFB circuit and the second terminal of the MEMS sensor coupled to the first terminal of the ICMFB circuit, the second operating mode being a reverse input polarity mode of the first operating mode.

13. A device comprising:
a microelectromechanical system (MEMS) sensor; and
an application specific integrated circuit (ASIC) comprising an input common-mode feedback (ICMFB) circuit coupled to the MEMS sensor through a plurality of nodes, wherein the ASIC is configured to monitor an input common-mode feedback (ICMFB) voltage generated by the ICMFB circuit, the monitoring comprising:
measure, by a sample and hold (S/H) circuit, a first ICMFB voltage generated by the ICMFB circuit operating in a first operating mode;
measure, by the S/H circuit, a second ICMFB voltage generated by the ICMFB circuit in a second operating mode, the second operating mode being a reverse input polarity mode of the first operating mode;
compute a first differential voltage corresponding to a difference between the first ICMFB voltage and the second ICMFB voltage;
compute a second differential voltage corresponding to a difference between the first differential voltage and a predetermined voltage; and
determine whether all of the plurality of nodes are electrically connected to the ICMFB circuit in accordance with the second differential voltage.

14. The device of claim 13 , wherein the ASIC is further configured to read the predetermined voltage stored in a memory before computing the second differential voltage.

15. The device of claim 13 , wherein the determining whether all of the plurality of nodes is electrically connected comprises computing a third differential voltage corresponding to a difference between the second differential voltage and a threshold voltage.

16. The device of claim 13 , wherein the ASIC is further configured to:
measure a minimum voltage corresponding to a minimum value of the first differential voltage; and
determine whether all of the plurality of nodes is electrically connected based on a comparison between the minimum voltage and a threshold value stored in a memory.

17. The device of claim 13 , wherein the ASIC is further configured to store the first differential voltage and the second differential voltage in a memory.

Assignees

• St Microelectronics Inc

Inventors

• Choi Davy
• Hu Yamu
• Fang Deyou

Classifications

• G01R31/2829

  Testing of circuits in sensor or actuator systems (testing of apparatus for measuring electric or magnetic variables G01R35/00; testing of indicating or recording apparatus G01D; in airbag systems B60R21/0173; checking gas analysers G01N33/007; monitoring or fail-safe circuits for electromagnets H01F7/1844) · CPC title

• G01R19/10

  Measuring sum, difference or ratio · CPC title

• G01P15/125

  by capacitive pick-up · CPC title

• G01P21/00 Primary

  Testing or calibrating of apparatus or devices covered by the preceding groups · CPC title